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Annular dark-field imaging

Annular dark-field imaging, often referred to as ADF or high-angle annular dark-field (HAADF) imaging, is a scanning transmission electron microscopy (STEM) technique that forms images by collecting incoherently scattered electrons at high scattering angles from a focused electron probe raster-scanned across a thin specimen.^[1] This method utilizes an annular detector positioned to capture thermal diffuse scattering events, typically with inner collection angles around 50 milliradians and outer angles up to 200 milliradians, excluding low-angle elastically scattered or unscattered electrons that would contribute to bright-field images.^[1] The resulting images exhibit Z-contrast, where intensity is approximately proportional to Z^{1.4} to Z^2 (with Z being the atomic number), making heavier elements appear brighter and enabling straightforward atomic-number-sensitive visualization without the complications of coherent interference effects.^[1]^[2] Developed as part of advancements in STEM instrumentation, annular dark-field imaging provides incoherent imaging that simplifies interpretation compared to phase-contrast methods, achieving atomic resolution down to approximately 0.05 nm on aberration-corrected instruments.^[1] It is particularly valuable for materials science applications, such as mapping compositional variations in alloys, semiconductors, and nanostructures at the atomic scale, and can be combined with techniques like electron energy-loss spectroscopy (EELS) for site-specific elemental analysis.^[2] Variations like low-angle annular dark-field (LAADF) extend its utility to imaging lighter elements and defects by using lower collection angles, providing strong diffraction contrast.^[1] Overall, this imaging mode has become a cornerstone of high-resolution electron microscopy for probing atomic structures and defects in diverse fields including photovoltaics, sensors, and aerospace materials.^[2]

Fundamentals

Definition and Principles

Annular dark-field (ADF) imaging is a technique employed in scanning transmission electron microscopy (STEM) that utilizes an annular detector to gather incoherently scattered electrons, enabling the formation of images based on the intensity of these scattered electrons rather than the direct beam.^[3] This approach contrasts with bright-field imaging, which captures the unscattered or low-angle transmitted beam to produce phase-contrast images sensitive to diffraction effects.^[4] In ADF imaging, the annular detector is positioned to exclude the central direct beam, focusing instead on electrons deflected by interactions with the sample, which results in dark regions for vacuum areas and brighter signals from atomic structures.^[3] The fundamental operating principle involves raster-scanning a finely focused electron probe across the specimen surface, with the probe typically achieving sub-angstrom dimensions to enable atomic-scale resolution.^[3] As the probe illuminates each point, electrons interact with the sample atoms through scattering processes, primarily elastic and thermal diffuse scattering, and those deflected to angles greater than approximately 5° are collected by the surrounding annular detector.^[4] The resulting image intensity at each scan position corresponds directly to the flux of these high-angle scattered electrons, providing a map of the sample's structural features without reliance on coherent interference.^[3] This incoherent imaging mode arises because the large collection angles of the annular detector average out phase relationships among the scattered electrons, effectively destroying transverse coherence and simplifying image interpretation compared to coherent techniques.^[3] Consequently, the image contrast is determined solely by the localized scattering probability, often yielding a Z-contrast effect where intensity scales with atomic number.^[4] ADF imaging requires a dedicated STEM configuration, including aberration-corrected electron optics to form the high-resolution focused probe and precise control systems for the raster scanning pattern, ensuring uniform illumination and signal collection across the field of view.^[3]

Contrast Mechanisms

In annular dark-field (ADF) imaging, the primary contrast mechanism arises from high-angle Rutherford scattering of the incident electron probe by atomic nuclei, where the differential cross-section is given by \sigma \propto \frac{Z^2}{\sin^4(\theta/2)}, with Z denoting the atomic number and \theta the scattering angle.^[5] This angular dependence favors collection of electrons scattered at large angles, resulting in image intensity that scales approximately as I \propto Z^2 \cdot f(\theta), where f(\theta) accounts for the detector's angular acceptance function.^[5] Consequently, this produces Z-contrast, in which heavier atomic columns appear brighter due to their enhanced scattering efficiency, enabling direct visualization of atomic composition without phase contrast artifacts.^[5] A significant contribution to the incoherent signal in ADF imaging comes from thermal diffuse scattering (TDS), where lattice vibrations displace atoms, randomizing the phase of scattered electrons and distributing intensity diffusely at high angles.^[6] TDS dominates the collected signal, particularly at elevated specimen temperatures where phonon populations increase, or for heavy atoms with larger scattering cross-sections, as the TDS intensity also follows \propto Z^2 from underlying Rutherford processes.^[6] This incoherence ensures that image contrast reflects local atomic density rather than crystalline orientation effects, though quantitative analysis requires accounting for temperature-dependent phonon contributions.^[5] The probe convergence semi-angle and detector collection semi-angle critically influence contrast transfer by determining the degree of scattering angle selectivity and probe-sample interaction coherence.^[5] A larger probe convergence angle broadens the angular range of incident electrons, enhancing overlap in multiple scattering events and promoting incoherence for improved Z-contrast fidelity, while the collection semi-angle defines the inner and outer limits that filter low-angle coherent beams from high-angle incoherent ones.^[5] Optimal settings, such as collection angles exceeding 30 mrad, minimize interference and maximize sensitivity to atomic-number variations.^[5] The annular detector geometry briefly supports this by confining detection to an annular region around the optic axis, isolating the desired high-angle scatters.^[5]

Historical Development

Origins in STEM

Annular dark-field (ADF) imaging emerged in the 1970s as a natural extension of the scanning transmission electron microscope (STEM), which was invented by Albert Crewe and his team at the University of Chicago in 1966 to achieve high-resolution imaging of individual atoms using a focused electron probe. Early dark-field concepts in STEM were developed to collect scattered electrons, with initial proposals for high-angle detection appearing in 1973 by C.J. Humphreys and collaborators, who recognized the potential for enhanced contrast from electrons scattered at larger angles to distinguish atomic species. These origins built on Crewe's foundational work, shifting from conventional bright-field imaging to dark-field modes that prioritized scattered signals for improved visibility of heavy atoms in thin specimens. The first implementations of ADF imaging employed simple annular detectors positioned below the sample to capture diffusely scattered electrons, bypassing the need for objective apertures that limited conventional transmission electron microscopy (TEM) dark-field techniques. In TEM dark-field, imaging typically involves selecting specific diffracted beams with an aperture in the back focal plane, which can introduce coherent artifacts and restrict field of view; in contrast, STEM's annular detectors integrated over a range of scattering angles directly in the far-field, enabling incoherent collection without such constraints. This design facilitated the direct observation of single uranium atoms on thin carbon films, demonstrating atomic resolution without the phase contrast limitations inherent to coherent TEM imaging. Key early publications in the 1970s emphasized ADF's incoherent imaging properties, which mitigated the phase contrast issues plaguing conventional TEM by treating the scattered electrons as an incoherent superposition, akin to classical optical imaging. For instance, Crewe, Wall, and Langmore's 1970 work detailed how high-angle scattering in STEM produced interpretable images of isolated heavy atoms, establishing ADF as a tool for bypassing coherent interference effects that obscured weak scattering signals in TEM. These studies highlighted the technique's reliance on thermal diffuse scattering for contrast, allowing straightforward interpretation of atomic positions and compositions. Early experiments also revealed Z-contrast behavior, where image intensity scaled approximately with the square of atomic number, providing a direct visual map of material composition. The conceptual foundations of ADF imaging drew heavily from particle physics scattering theories, particularly Rutherford scattering, which describes the Coulomb interaction between incident electrons and atomic nuclei at high angles. This framework, originally developed for alpha-particle scattering in the early 20th century, was adapted in the 1970s to model electron-nucleus interactions in microscopy, predicting that high-angle electrons follow classical trajectories dominated by unscreened nuclear potentials. By applying these theories, researchers quantified the incoherent nature of ADF signals, where multiple scattering events averaged out phase information, yielding robust intensity proportional to atomic density and number.^[7]

Key Advancements

In the late 1980s and early 1990s, the development of high-angle annular dark-field (HAADF) imaging in scanning transmission electron microscopy (STEM) introduced Z-contrast imaging, which provides direct atomic-number sensitivity and incoherent imaging for atomic-resolution visualization of crystalline materials. Pioneered by Stephen J. Pennycook and collaborators, this technique utilized annular detectors to collect high-angle scattered electrons, enabling the first direct imaging of atomic columns in semiconductors and interfaces without phase contrast artifacts, achieving resolutions approaching 0.2 nm.^[8] These advancements, detailed in foundational works from 1989 to 1992, established HAADF as a cornerstone for materials characterization by suppressing diffraction effects and enhancing chemical contrast.^[9] The 2000s marked a transformative era with the implementation of aberration correction in STEM, dramatically reducing probe sizes to sub-angstrom levels and elevating ADF imaging resolution. Ondrej L. Krivanek and colleagues at Nion developed sextupole-based correctors for STEM, compensating for spherical aberration and enabling beam diameters below 0.5 Å at 200 kV, as demonstrated in 2002 experiments resolving silicon atomic spacings at 0.078 nm. Concurrently, Max Haider's team advanced multipole correctors for transmission electron microscopes, influencing STEM designs and allowing routine atomic-resolution ADF imaging of complex structures like defects in oxides.^[10] These corrections, commercialized by the mid-2000s, increased signal-to-noise ratios in ADF by factors of up to 10, facilitating quantitative analysis of light elements alongside heavy atoms.^[11] From the 2010s onward, ADF imaging integrated with cryogenic electron microscopy (cryo-EM) for beam-sensitive biological samples, combining low-temperature stages with HAADF to preserve native structures while providing mass-thickness contrast. This approach, refined in the 2010s, enabled 3D tomography of proteins and cellular components at resolutions of 2-5 nm, as shown in variable-angle HAADF studies of vitreous ice-embedded specimens.^[12] Parallel advances in AI-assisted reconstruction, particularly deep learning models for denoising, reduced noise in low-dose ADF datasets by 50-70%, improving signal recovery in sparse acquisitions for dynamic biological processes.^[13] In the 2020s, low-dose ADF techniques for beam-sensitive materials like metal-organic frameworks achieved atomic-level imaging with doses under 10 electrons/Å², minimizing damage through compressed sensing and ptychographic enhancements.^[14] A significant methodological shift occurred in the 2010s with the adoption of segmented and pixelated detectors, replacing analog annular designs to enable simultaneous multi-angle electron collection in 4D-STEM. These detectors, dividing the ADF signal into quadrants or pixels, facilitated differential phase contrast and angular-resolved mapping, capturing scattering variations with sub-milliradian precision and boosting throughput by orders of magnitude for quantitative strain and field analysis.^[15]

Types of Annular Dark-Field Imaging

Conventional ADF

Conventional annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM) utilizes an annular detector with typical inner collection angles of 10–50 mrad, enabling the capture of electrons scattered at medium angles and rendering it sensitive to both elastic scattering, including thermal diffuse scattering, and to a lesser extent inelastic processes such as plasmons. This configuration distinguishes it from bright-field imaging by excluding the unscattered beam while incorporating a broader range of scattering events compared to stricter high-angle setups. The primary contrast mechanisms in conventional ADF arise from mass-thickness variations across the sample and diffraction effects, leading to an intensity dependence on atomic number (Z) that is approximately Z^{1.5–1.7} but modulated by these factors, making it less exclusively Z-dependent than in high-angle annular dark-field (HAADF) imaging. Diffraction contrast, in particular, introduces coherent contributions from Bragg scattering, which can enhance visibility of structural features but also complicates purely incoherent interpretation. As a result, images often exhibit a mix of amplitude and phase-related effects, requiring careful consideration of sample orientation. One key advantage of conventional ADF is its higher signal yield for light elements or thicker samples, where lower-angle scattering provides more electrons to the detector without the rapid attenuation seen at higher angles. This makes it suitable for applications involving beam-sensitive materials or those with lower atomic mass, such as organic nanostructures or light alloys. Furthermore, the inclusion of diffraction effects allows for orientation mapping, where variations in Bragg scattering reveal crystallographic domains and misorientations. A representative example is the imaging of crystalline defects in semiconductors, such as dislocations in GaN, where Bragg scattering from strained lattice regions contributes to localized contrast enhancements, aiding in defect characterization without relying solely on Z-contrast.

Low-Angle ADF (LAADF)

Low-angle annular dark-field (LAADF) imaging is a variation of ADF-STEM that collects electrons scattered at low to medium angles, typically 20–50 mrad inner angle. This setup emphasizes diffraction contrast and is particularly useful for visualizing light elements and orientation-dependent features, as it includes more elastically scattered beams compared to higher-angle modes. The contrast is sensitive to crystal structure and defects, with reduced Z-dependence, making LAADF ideal for mapping strain fields, phase boundaries, and polycrystalline materials where mass-thickness contrast is minimal. LAADF extends the utility of ADF to beam-sensitive or low-Z samples by providing higher signal levels while highlighting coherent scattering effects. It is often used in combination with other modes for comprehensive analysis, such as in semiconductors or nanomaterials, to reveal features obscured in HAADF due to low scattering efficiency from light atoms.

High-Angle ADF (HAADF)

High-angle annular dark-field (HAADF) imaging is a specialized form of annular dark-field imaging in scanning transmission electron microscopy (STEM) that collects electrons scattered at high angles, typically greater than 50 mrad (or approximately >3°), to minimize contributions from diffracted beams and achieve predominantly incoherent imaging.^[5] This configuration ensures that the image intensity arises mainly from thermal diffuse scattering and single elastic scattering events, providing a Z-contrast mechanism where the signal is roughly proportional to the square of the atomic number (Z²) of the scattering atoms.^[16] By excluding low-angle scattering associated with Bragg diffraction, HAADF delivers sharp, localized contrast that directly reflects the atomic composition without the phase effects inherent in bright-field or conventional ADF modes.^[5] The enhanced sensitivity of HAADF to atomic number makes it particularly effective for distinguishing heavy elements within lighter atomic matrices, such as identifying catalytic metal atoms (e.g., platinum or iridium) dispersed on carbon supports.^[15] This Z-dependent contrast allows for the direct visualization of individual heavy atoms or clusters, even at low concentrations, enabling precise compositional mapping at the atomic scale.^[16] For instance, in materials like oxide catalysts, HAADF can highlight dopant atoms with high fidelity, as the scattering cross-section scales strongly with Z, outperforming other imaging modes in chemical specificity.^[5] At high collection angles, HAADF exhibits a depth-sectioning effect due to the reduced influence of multiple scattering events, which are more prominent at lower angles and can blur subsurface features.^[5] Electrons scattered to these elevated angles primarily result from single, large-angle Rutherford-like interactions, limiting the propagation of coherence along the beam direction and confining the signal to a shallower effective depth within the sample.^[15] This property facilitates three-dimensional profiling of atomic distributions, as deeper atoms contribute less to the high-angle signal compared to surface or near-surface ones, aiding in the analysis of layered or buried structures.^[5] In aberration-corrected STEM, HAADF is widely employed for direct visualization of atomic structures, bypassing the need for phase reconstruction techniques required in coherent imaging methods like high-resolution TEM.^[16] The incoherent nature of HAADF simplifies interpretation, as image intensity monotonically relates to atomic column occupancy and position, allowing sub-angstrom resolution mapping of crystal lattices and defects without artifacts from interference.^[5] This capability has become essential for studying complex nanomaterials, where precise atomic-scale insights into structure and chemistry are critical.^[15]

Instrumentation and Setup

Detector Geometry

In annular dark-field (ADF) imaging within scanning transmission electron microscopy (STEM), the detector is designed as a ring-shaped annular structure positioned to collect scattered electrons while blocking the unscattered central beam.^[17] The central hole in the detector prevents direct beam electrons from reaching the sensor, ensuring that only electrons deflected by the sample contribute to the image signal.^[15] This geometry allows for the selection of electrons scattered over a specific annular range, typically defined by inner and outer collection semi-angles, α_i and α_o, respectively.^[1] The inner semi-angle α_i marks the boundary of the central hole, excluding low-angle scattering such as the direct beam and small-angle diffraction, while the outer semi-angle α_o sets the maximum collection angle, capturing higher-angle scattered electrons. For conventional ADF setups, typical values might include α_i ≈ 5–20 mrad and α_o ≈ 50–100 mrad, whereas high-angle ADF (HAADF) configurations often use larger ranges like α_i ≈ 50 mrad and α_o ≈ 200 mrad to emphasize incoherent scattering for Z-contrast imaging.^[1]^[15] These angles can be adjusted experimentally; for instance, in variable-angle HAADF, settings of α_i = 60 mrad and α_o = 390 mrad have been achieved at a camera length of 100 mm.^[15] Detector types vary to meet different imaging needs, with single-ring annular detectors providing basic integration of scattered intensity over the entire ring for standard ADF signals.^[17] More advanced segmented detectors, such as those with 16 quadrants, or pixellated detectors that divide the annular area into numerous pixels (e.g., for 4D-STEM), enable angular-resolved imaging by isolating signals from specific azimuthal or radial sectors.^[18] Segmented and pixellated designs offer enhanced capabilities, such as differential phase contrast or ptychographic reconstruction, by allowing post-processing of spatially variant scattering data, though they require higher data throughput compared to single-ring systems.^[18] The detector is positioned in the far-field plane of the STEM column, downstream of the sample, where the diffraction pattern is formed.^[17] Effective collection angles are tuned by varying the camera length L, the distance from the sample to the detector plane, using projector lenses; the semi-angle α is approximately given by α ≈ r / L, where r is the radial distance on the detector from the beam center.^[17] This adjustment scales the angular acceptance without physically resizing the detector, enabling optimization for different scattering regimes.^[15] Calibration of the detector geometry ensures accurate angular definition and minimal overlap with bright-field or diffraction patterns, typically achieved by imaging standard samples like undoped crystals to measure beam position and adjust for aberrations or misalignment.^[15] For segmented detectors, individual pixel or segment responses are balanced using far-field diffraction from a polycrystalline sample to verify uniform collection across the annulus.^[18] Such procedures confirm that the inner hole fully blocks the unscattered beam while the outer radius captures the desired scattering angles without contamination from unwanted diffraction orders.^[15]

Microscope Specifications

Annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM) demands precise probe-forming optics to generate a focused electron beam with a spot size below 1 nm, enabling atomic-scale resolution. This is achieved through a series of condenser lenses that demagnify and converge the beam from the electron source, typically a field emission gun, to form the probe. Aberration correctors, such as hexapole or octopole systems (e.g., CEOS hexapole correctors), are integrated into the probe-forming aperture to compensate for spherical and chromatic aberrations, reducing the probe diameter to sub-angstrom levels (e.g., <0.1 nm) while maintaining sufficient current (e.g., >100 pA) for adequate signal intensity.^[19]^[10]^[20]^[21] The acceleration voltage for STEM equipped for ADF imaging typically spans 80–300 kV, selected to optimize the trade-off between resolution and sample integrity. Higher voltages (e.g., 200–300 kV) shorten the electron de Broglie wavelength, enhancing spatial resolution for imaging fine structures, but increase beam penetration and potential radiation damage in beam-sensitive specimens. Lower voltages (e.g., 80–120 kV) reduce damage by limiting energy deposition while still supporting sub-nanometer probes, particularly with aberration correction.^[22]^[23]^[24] Mechanical and environmental stability is essential for sub-angstrom precision in ADF-STEM, necessitating advanced vibration isolation platforms that attenuate low-frequency disturbances (<1 Hz) from building or external sources. Electromagnetic shielding enclosures around the microscope column and laboratory further prevent interference from AC power lines or nearby equipment, minimizing probe drift and ensuring stable scanning over extended periods.^[25]^[26]^[27] Seamless integration with spectrometers for concurrent electron energy-loss spectroscopy (EELS) and energy-dispersive X-ray (EDX) analysis requires coaxial alignment of the probe with detector axes to avoid signal attenuation during ADF imaging. This setup enables simultaneous collection of structural and chemical data, with systems like Gatan Tridiem GIF for EELS and Oxford X-Max detectors for EDX positioned to capture transmitted or scattered electrons without compromising ADF signal fidelity.^[19]^[28]^[29]

Imaging Performance

Resolution Determinants

The spatial resolution in annular dark-field (ADF) imaging is fundamentally governed by the size of the incident electron probe, which sets the minimum achievable detail in the image. The probe diameter d is approximated by the diffraction limit d \approx 0.61 \lambda / \alpha_c, where \lambda is the de Broglie wavelength of the electrons and \alpha_c is the convergence semi-angle of the probe.^[30] This limit arises from the wave nature of electrons, with higher accelerating voltages reducing \lambda (e.g., \lambda \approx 0.025 Å at 200 kV) and larger \alpha_c allowing tighter focusing. Aberration correction plays a critical role in approaching this limit by compensating for spherical and chromatic aberrations, enabling probe sizes as small as ~0.5 Å in modern instruments.^[31] Without correction, aberrations broaden the probe, degrading resolution to several angstroms; with correction, atomic-scale imaging becomes routine for heavy elements in high-angle ADF modes.^[32] The signal-to-noise ratio (SNR) further modulates practical resolution, particularly in beam-sensitive samples where low probe currents or short dwell times are necessary to avoid damage. In ADF imaging, the detected intensity I from scattered electrons obeys Poisson statistics, with SNR scaling as \sqrt{N_\text{scattered}}, where N_\text{scattered} is proportional to the probe current and dwell time per pixel.^[33] Higher currents increase N_\text{scattered} and thus SNR, but excessive current can induce specimen drift or damage, limiting effective resolution; conversely, short dwell times (e.g., <1 μs) reduce SNR, blurring fine features unless compensated by averaging multiple frames.^[34] Optimizing these parameters—typically balancing currents of 10–100 pA with dwell times of 5–50 μs—ensures that statistical noise does not dominate over the probe size limit.^[35] An additional constraint is the delocalization inherent to the scattering process, which smears the signal beyond the probe diameter. For high-angle scattering (\theta > 50 mrad), delocalization is minimal (~0.1–0.5 Å) due to small impact parameter b, enabling near-probe resolution for heavy atoms; however, for light atoms, lower atomic number Z requires larger b to achieve the same \theta via Rutherford scattering, increasing delocalization to 1–2 Å and reducing effective resolution.^[36] In the 2020s, machine learning techniques have pushed effective resolutions below these hardware constraints by post-processing noisy images. Deep learning-based denoising, such as diffusion models or convolutional neural networks, reconstructs atomic details from low-dose ADF data, achieving sub-Ångström effective resolution even in uncorrected microscopes.^[37] These methods leverage simulated training data to suppress Poisson noise while preserving structural fidelity, enabling sub-Ångström resolutions in beam-sensitive materials without increasing dose.^[38] The probe size itself remains tied to optical performance, as outlined in microscope specifications.

Limitations and Artifacts

One significant limitation of annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM) is beam damage to sensitive samples. High-angle scattering, which underpins the Z-contrast mechanism, requires intense electron probes to generate adequate signal intensity, exacerbating damage mechanisms such as radiolysis and knock-on displacement in beam-sensitive materials like organics and biological specimens. Organics tolerate approximately 10³ electrons per square angstrom, while biological specimens are limited to ~10 electrons per square angstrom before structural degradation occurs, severely restricting imaging time and resolution for such samples.^[4]^[39] Various artifacts can also compromise image fidelity in ADF-STEM. Scan distortions, stemming from instabilities in the scanning fields, manifest as wavy patterns and non-orthogonal deformations, particularly noticeable in high-resolution aberration-corrected imaging. In crystalline specimens, channeling effects—where the electron probe is steered along atomic columns—induce false contrast variations, displacing apparent atomic positions by several picometers and misleading interpretations of structure or composition.^[40]^[41] Sample thickness imposes another key constraint through multiple scattering effects. As thickness exceeds about 50 nm, repeated elastic and inelastic scattering events broaden the angular distribution of scattered electrons, diminishing the high-angle specificity essential for Z-contrast and leading to reduced image contrast and resolution. This limitation is pronounced in substrates supporting nanoparticles, where central contrast fades significantly beyond this thickness threshold.^[42] Additionally, ADF imaging exhibits lower dose efficiency compared to bright-field methods, especially for light elements that scatter predominantly at low angles rather than the high angles collected in ADF detectors. This inefficiency necessitates longer acquisition times or higher doses to achieve comparable signal-to-noise ratios, further challenging applications involving low-Z materials and amplifying beam damage risks.^[43]

Applications

Materials Characterization

Annular dark-field (ADF) imaging, particularly in the high-angle annular dark-field (HAADF) mode, plays a crucial role in materials characterization by providing Z-contrast sensitivity that highlights atomic number differences, enabling the visualization of heavy elements against lighter matrices in inorganic and composite materials. This technique excels in rigid, high-Z systems such as semiconductors, alloys, and catalysts, where it reveals structural and compositional details at the atomic scale without requiring staining or complex sample preparation. By leveraging incoherent scattering, ADF imaging achieves high signal-to-noise ratios for direct interpretation of atomic positions and distributions. In atomic-scale structure determination, ADF imaging has been instrumental in locating individual dopant atoms within semiconductor lattices, such as heavy impurities like antimony in silicon. For instance, aberration-corrected HAADF-STEM allows direct visualization of single dopant atoms embedded in bulk-like silicon environments, confirming their positions and enabling studies of substitutional incorporation. This capability, often combined with techniques like energy-dispersive X-ray spectroscopy (EDS), has advanced understanding of dopant distribution in materials like phosphorus-doped silicon delta-layers, where contrasts reveal layer widths and concentrations at sub-nanometer resolution.^[44]^[45] For interface analysis, ADF imaging visualizes grain boundaries and precipitates in alloys by exploiting Z-contrast to map compositional variations across interfaces. In Ni-rich Ni-Au alloys, HAADF-STEM images delineate bulk interfaces and segregation profiles, showing bright contrasts from heavy Au atoms at boundaries. Similarly, in magnesium alloys, atomic-resolution HAADF reveals co-segregated atoms at grain boundaries, aiding in the study of complexion formation and mechanical properties. This approach facilitates composition mapping of precipitates, such as ordered Cu segregation in boundaries, without the need for additional spectroscopic confirmation in initial structural assessments.^[46]^[47]^[48] In catalyst studies, ADF imaging locates and characterizes metal nanoparticles on oxide supports, critical for optimizing activity and stability. HAADF-STEM images of Pt nanoparticles on CeO₂ supports show their dispersion and size distribution, with bright Pt contrasts against the darker CeO₂ matrix, as seen in systems reduced under hydrogen for CO oxidation. This visualization has revealed atomic-level fluxional behavior in Pt/CeO₂, where single atoms and clusters migrate during reaction conditions, correlating structure with enhanced catalytic performance. Such imaging guides the design of supported catalysts by quantifying nanoparticle-support interactions.^[49]^[50] Integration of ADF imaging with electron energy-loss spectroscopy (EELS) enables HAADF-guided elemental quantification at atomic columns, combining structural imaging with chemical analysis. In perovskite-related oxides, HAADF images direct EELS acquisition to specific columns, allowing quantification of coordination numbers and oxidation states via fine structure analysis. This tandem approach has quantified elemental ratios in heterostructures, such as Cu-Zn-S interfaces, providing atomic-resolution maps of composition that inform defect chemistry and functionality. By aligning the probe with HAADF-identified features, EELS achieves precise, site-specific quantification with minimal delocalization.^[51]^[52]^[53]

Biological and Nanostructure Analysis

Annular dark-field (ADF) imaging has proven particularly valuable in biological applications due to its sensitivity to mass-thickness contrast, enabling visualization of beam-sensitive samples under low-dose conditions. In cryo-ADF, frozen-hydrated protein samples are imaged to map heavy-atom labels within macromolecules, such as metal ions bound to ferritin. This approach detects isolated atoms of zinc and iron with atomic precision, leveraging the incoherent scattering that enhances contrast for high-Z elements in low-Z biological matrices.^[54] Recent advancements in low-dose cryo-electron ptychography combined with 4D-STEM have achieved sub-nanometer resolution in 3D reconstructions of single protein particles, minimizing radiation damage while preserving structural details.^[55] For nanoscale organic structures, ADF imaging excels in revealing defects and morphologies in carbon-based nanomaterials, capitalizing on its mass-thickness sensitivity to differentiate subtle density variations. In carbon nanotubes, low-voltage ADF-STEM provides high-contrast images of multi-walled structures at resolutions better than 2 nm, highlighting wall defects and alignments without staining.^[56] Similarly, for graphene, aberration-corrected ADF-STEM visualizes atomic-scale defects, such as vacancies and substitutions, by directly imaging local electric fields and lattice distortions, which inform electronic property modifications.^[57]^[58] In soft matter systems, low-angle ADF (LAADF) imaging highlights density variations in organic assemblies, offering contrast for unstained samples where phase contrast alone is insufficient. For polymer blends, ADF-STEM tomography reconstructs 3D morphologies, revealing phase separations and nanoparticle distributions in block copolymers at cryogenic temperatures.^[59] In lipid bilayers, LAADF detects thickness fluctuations and domain formations in model membranes, providing insights into biomolecular interactions under hydrated conditions.^[60] These techniques are constrained by dose limitations in cryo setups, where electron doses must remain below 10-20 electrons/Å² to avoid structural alterations.^[61] Advancements in the 2020s have integrated ADF imaging with tomography for 3D reconstruction of viral nanostructures, enhancing understanding of assembly and infection mechanisms. Variable-angle HAADF-STEM tomography improves contrast and reduces artifacts in thick biological sections, enabling precise mapping of viral capsid architectures in samples like SARS-CoV-2.^[62] Cryo-electron tomography using ADF detectors has unraveled membrane rearrangements during coronavirus replication, correlating 2D projections with volumetric models at near-atomic resolution.^[63] This correlative approach has also facilitated studies of large DNA viruses, where STEM tomography visualizes internal components within intact capsids.^[64]

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The two shiny additions to the column are the CEOS aberration correctors. The upper corrects the probe-forming lens (STEM) and the lower corrects the image- ...Missing: octopole | Show results with:octopole
[21]
Center for Functional Nanomaterials (CFN) | Electron Microscopy
The aberration corrector improves the spatial resolution (probe size) to <0.1 nm, while boosting the probe current to 200 pA. The instrument is optimized for ...Missing: specifications | Show results with:specifications
[22]
Transmission Electron Microscopy-EDX & EELS
The microscopes can be operated with a voltage range of 80–300 kV and include a high-angle annular dark-field (HAADF) detector and CCD cameras for different ...
[23]
Optimal acceleration voltage for near-atomic resolution imaging of ...
Jul 8, 2022 · Among a broad range of electron acceleration voltages (300 kV, 200 kV, 120 kV, and 80 kV) tested, we found that the highest resolution in the HRTEM image is ...
[24]
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM ...
STEM resolution: ranging from <60pm at 300kV to <120pm at 60 kV; Greater than 100 pA probe currents available in a 1 angstrom electron probe; High Angle Annular ...Missing: specifications | Show results with:specifications
[25]
Effects of Electromagnetic Shielding in EM Lab Environment - CIQTEK
Nov 11, 2024 · Vibrations below 20 Hz have a significant disruptive effect on electron microscopes, as depicted in the following figures.
[26]
PMC - NIH
The stability requirements have become even more stringent with the relatively recent introduction of aberration correctors and high coherence electron sources ...
[27]
Understanding Vibration Isolation for Electron Microscopes | VEC
May 14, 2025 · Passive and active vibration isolation work together to reduce vibrations across frequencies, maximizing precision for sensitive equipment,Missing: shielding STEM stability
[28]
Fast STEM spectrum imaging using simultaneous EELS and EDS in ...
In this paper, we present a data collection system that is designed to allow EELS, EDS and dark field detectors to operate efficiently at spectral rates over 1 ...
[29]
Workflows for multimodal electron tomography using EELS and EDX ...
Sep 29, 2025 · Spectroscopic electron tomography using EDX and EELS signals presents significant challenges in both data acquisition and processing, ...
[30]
The rapidly changing face of electron microscopy - ScienceDirect.com
Jul 1, 2015 · ... electron probe diameter and high electron current density. This high ... convergence angle, are compared to a library of simulated ...
[31]
Atomic-Resolution Imaging with a Sub-50-pm Electron Probe
Mar 2, 2009 · It is shown that the goal of forming smaller electron probes is not achievable solely by improving the aberration-corrected optics.
[32]
Aberration-corrected STEM imaging of 2D materials - Science
Sep 9, 2020 · From a theoretic perspective, reaching the highest spatial resolution in STEM requires an electron beam (probe) of an infinitely small size. In ...<|separator|>
[33]
Quantification and optimization of ADF-STEM image contrast for ...
May 2, 2018 · Here we report a method to optimize annular dark-field (ADF) STEM imaging conditions and detector geometries for a thick and beam-sensitive low- ...Abstract · 2. Methods · 2.1. Adf-Stem ImagingMissing: multi- | Show results with:multi-
[34]
Phase contrast scanning transmission electron microscopy imaging ...
Feb 8, 2018 · To achieve the best available resolution in STEM mode, probe aberration correction is employed and aberrations are reduced such that the optimal ...
[35]
Optical STEM detection for scanning electron microscopy
The SNR curves for OSTEM and SE remain constant at short dwell times (<1 µs) and then start to gradually increase for longer dwell times (>1 µs), while the SNR ...
[36]
Delocalization in inelastic scattering - ScienceDirect.com
How delocalized is an EELS signal? For instance, how far from a silicon atom must the electron probe be before a Si edge can be detected?
[37]
Quantitative annular dark-field imaging in the scanning transmission ...
Aug 13, 2021 · This article provides a review of quantitative annular dark-field imaging in the scanning transmission electron microscope
[38]
Deep learning for sub-ångström-resolution imaging in uncorrected ...
This study presents a deep-learning diffusion model that processes uncorrected scanning transmission electron microscopy images, achieving atomic resolutio.
[39]
Deep learning-based noise filtering toward millisecond order ...
Aug 5, 2022 · Here we show an image correction framework integrating deep learning (DL)-based denoising and image distortion correction schemes optimized for STEM rapid ...
[40]
Low-Dose Electron Microscopy Imaging of Electron Beam-Sensitive ...
Apr 19, 2022 · This account focuses on our recent works pertaining to the high-resolution imaging of electron beam-sensitive materials using very low electron doses.
[41]
Artifacts in aberration-corrected ADF-STEM imaging - ScienceDirect
The lowest signal in an ADF-STEM image decreases as the incident probe shrinks in size. Therefore, care must be taken when interpreting the resolution limit of ...
[42]
[PDF] ChannelingInduced Artifacts in Atom Tracking of Cations in Distorted ...
Here, we show experimentally that cation sites in a distorted perovskite oxide crystal imaged by HAADFSTEM appear displaced by several picometers with respect ...
[43]
Dark-field image contrast in transmission scanning electron ...
In STEM, electrons transmitted through the sample are collected serially by an annular detector to form an annular dark field STEM image (ADF-STEM). This ...
[44]
Phase Imaging Methods in the Scanning Transmission Electron ...
Jun 28, 2025 · This review introduces phase imaging methods in the STEM and explores how the most recent innovations are driving progress in nanoscience.
[45]
Imaging individual atoms inside crystals with ADF-STEM
This allows us to image individual dopants as they exist within a bulk-like silicon environment. We also discuss the image analysis techniques used to ...
[46]
[PDF] Accessing atomic-scale phosphorus dopant distribution in precise ...
Here we describe several efforts of utilizing advanced STEM imagining and spectroscopic techniques to quantify the Si:P delta- layers. STEM imaging combining ...
[47]
Bulk interfaces in a Ni-rich Ni–Au alloy investigated by high ...
In the following, HAADF STEM is termed Z-contrast imaging, as the scattering signal at high scattering angles is dominated by Rutherford scattering which is ...
[48]
Direct observation and impact of co-segregated atoms in ... - NIH
Here we show that we can image segregation in magnesium alloys with atomic-resolution X-ray dispersive spectroscopy at a much lower electron voltage.
[49]
A Direct Observation of Ordered Structures Induced by Cu ...
Jun 28, 2018 · STEM Z-contrast images followed by EDS mapping and EELS analysis illustrated the ordered segregation of Cu atoms on the grain boundaries. Based ...
[50]
Atomic level fluxional behavior and activity of CeO 2 -supported Pt ...
Oct 4, 2021 · A HAADF-STEM image of a typical Pt-loaded CeO2 nanoparticle is shown in Fig. 1b. The Pt nanoparticles are well-dispersed on the CeO2 ...
[51]
Tuning Pt-CeO2 interactions by high-temperature vapor-phase ... - NIH
Figure 2 shows HAADF-STEM images of the as-synthesized (CPA) and activated (CPA and TAPN) catalysts. In the as-synthesized state, the AT and SEA catalysts show ...
[52]
Aberration-corrected scanning transmission electron microscopy for ...
Mar 13, 2014 · This was very quickly followed by aberration correction of the objective lens of a transmission electron microscope and the achievement of 1 Å ...
[53]
Imaging atomic-scale chemistry from fused multi-modal electron ...
Jan 27, 2022 · Fused multi-modal electron microscopy offers high signal-to-noise ratio (SNR) recovery of material chemistry at nano- and atomic-resolution.
[54]
Local quantification of coordination number for perovskite-related ...
Aug 22, 2018 · One goal using STEM-EELS is the quantitative determination of composition in an atomic column. The spatial resolution of high-angle annular ...
[55]
Detection of isolated protein-bound metal ions by single-particle ...
Oct 2, 2017 · We demonstrate here the detection of isolated atoms of Zn and Fe on ferritin, using cryogenic annular dark-field scanning transmission electron microscopy ( ...
[56]
Low-dose cryo-electron ptychography of proteins at sub-nanometer ...
Sep 14, 2024 · Here we apply 4D-STEM and ptychographic data analysis to frozen hydrated proteins, reaching sub-nanometer resolution 3D reconstructions.
[57]
Low voltage STEM imaging of multi-walled carbon nanotubes
ADF-STEM images of multi-walled carbon nanotubes, with high contrast and resolution better than 2 nm, have been obtained using a SEM operating with 5 kV ...Missing: mass- | Show results with:mass-
[58]
Direct electric field imaging of graphene defects - Nature
Sep 24, 2018 · Here, we show that atomic-resolution differential phase-contrast STEM imaging can directly visualize the anisotropy of single Si atomic electric fields in ...Missing: nanotubes | Show results with:nanotubes
[59]
Atomic‐Scale Insights into the 2D Materials from Aberration ...
Dec 14, 2023 · Defect structure of atomic interfaces has been visualized using ADF-STEM by comparing calculated and experimental interlayer distance. While the ...2.1 Graphene · 2.5 Mxenes · 3.2 Dopants
[60]
(PDF) Annular dark-field scanning transmission electron microscopy ...
Aug 10, 2025 · Annular dark-field scanning transmission electron microscopy (ADF-STEM) tomography of polymer systems: Journal of Electron Microscopy 2010 59(S1): ...
[61]
Liquid‐Phase Electron Microscopy for Soft Matter Science and Biology
May 17, 2020 · Annular dark-field (ADF) STEM is particularly effective for imaging materials of high atomic number in thick liquid layers due to the strong ...
[62]
Cryo Electron Tomography (cryoET)
The rule-of-thumb in much of cryoTEM work is that the total dose that the specimen receives should be limited to between 10 and 20 electrons/Å2. This is the ...
[63]
Annular Dark Field Imaging with Variable Angle for Improving STEM ...
Aug 6, 2025 · Variable-angle high-angle annular dark-field (HAADF) imaging in scanning transmission electron microscopy is developed for precise and ...Missing: cryo- 2020s
[64]
Electron Tomography as a Tool to Study SARS-CoV-2 Morphology
In this review, we present our recent findings using transmission electron microscopy (TEM) combined with electron tomography (ET) to reveal the morphologically ...
[65]
Scanning transmission electron tomography to study virus assembly
With the option of using such section thickness, STEM tomography becomes an extremely powerful imaging technique to study large DNA viruses, which are ...Missing: annular field 2020s