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Autocollimator

An autocollimator is an optical instrument designed for the non-contact, high-precision measurement of small angular deviations, typically by projecting a collimated beam of light onto a reflective surface and analyzing the position of the reflected beam.^[1] It integrates the functions of a collimator, which produces parallel light rays, and a telescope, which views distant objects, using a beam splitter and shared objective lens to enable both projection and detection within a single unit.^[2] This setup allows for angular resolutions as fine as 1 arcsecond or better, making it essential for applications requiring sub-microradian accuracy in alignment and adjustment.^[1] The core working principle relies on the reflection of a collimated beam from a test surface, where any tilt causes a lateral displacement of the returned image on a focal plane detector or screen; this shift is directly proportional to the angular change, approximated as twice the focal length times the angle in radians.^[1] Traditional autocollimators use visual observation of a reticle or spot on a screen, while electronic variants employ position-sensitive detectors, such as focal plane arrays, for automated digital readout and integration into feedback systems.^[1] Modern designs often incorporate low-power laser sources, like Class I or II diode lasers, for enhanced visibility and precision, with interfaces such as USB or Ethernet for data processing.^[1] Autocollimators find widespread use in optical metrology for verifying the angular alignment of components like lenses, mirrors, windows, and crystals, as well as in aligning laser resonators and cavities.^[1] In industrial settings, they measure geometrical tolerances including straightness, squareness, parallelism, and flatness of machine tools and mechanical parts, supporting quality control in sectors like aerospace and precision manufacturing.^[2] Their distance-independent measurements and high sensitivity also enable applications in vibration analysis and deflection monitoring.^[1] The underlying principle of autocollimation has been employed since the late 19th century in angular measurement, evolving from basic visual tools to sophisticated electronic systems integral to modern engineering.^[1]^[3]

Introduction

Definition and Purpose

An autocollimator is a non-contact optical instrument designed for the precise measurement of small angular displacements, typically in the range of arcseconds or microradians, through the detection of a reflected light beam from a target surface.^[4]^[5] This device combines the functions of a collimator and a telescope, projecting a collimated beam that reflects off a mirror or reflective surface and returns to form an image whose position indicates the angular deviation.^[1]^[6] The primary purpose of an autocollimator is to facilitate high-accuracy alignment in various technical fields, including the positioning of optical components such as lenses and mirrors, as well as machine tools and assemblies in manufacturing.^[1]^[6] It also serves to detect minute deflections or tilts in surfaces and structures, enabling non-invasive monitoring of angular changes over time without physical contact.^[4]^[5] The non-contact measurement capability of autocollimators is particularly advantageous in sensitive environments, such as high-precision optics laboratories or cleanrooms, where traditional tactile methods could introduce contamination or mechanical disturbances.^[4] This feature allows for reliable assessments of straightness, flatness, parallelism, and squareness in applications ranging from aerospace components to servo systems.^[6]^[1]

Historical Development

The concept of autocollimation emerged in the early 20th century as an advancement in optical angle measurement, building on the optical lever principle first invented by Johann Christian Poggendorff in 1826 to enhance the sensitivity of theodolites to approximately 5 arcseconds.^[7] Poggendorff's device amplified small angular deflections using a mirror to reflect light, laying foundational groundwork for non-contact precision measurements in surveying and instrumentation.^[7] By the 1920s, autocollimation was formalized as a distinct optical technique for accurate, contactless angle detection, initially applied in total stations and similar devices.^[8] In the mid-20th century, autocollimators gained prominence in industrial metrology, with companies like Taylor Hobson advancing designs based on earlier products from Hilger and Watts, focusing on high-sensitivity alignment for manufacturing and optics.^[9] Post-World War II, significant progress occurred in aerospace applications, where autocollimators were integral to aligning components in missile systems, such as the Minuteman program, enabling precise optical and mechanical setups critical for guidance technologies.^[10] These developments emphasized repeatability in demanding environments, transitioning from basic visual models to more robust instruments for large-scale engineering projects.^[11] The 1980s marked the introduction of electronic autocollimators, with prototypes incorporating position-sensitive detectors for automated angle detection, which improved resolution and reduced reliance on manual eyepiece readings.^[12] Prototypes, such as those from Möller-Wedel Optical, emerged by the late 1980s, integrating image evaluation for enhanced precision in metrology.^[12] Concurrently, laser integration began in the early 1980s, with A.E. Ennos and M.S. Virdee developing a laser autocollimation method in 1982 for profiling quasi-conical mirror surfaces with sub-micrometer accuracy, leveraging the beam's collimation for extended range and stability.^[13] This evolution continued into the 21st century with fully digital automated platforms, boosting measurement repeatability from subjective manual interpretations to objective, data-driven outputs with nanoradian sensitivity as of the 2010s.^[14] Recent advancements as of 2024 include ultra-stable wide-field electronic autocollimators for enhanced applications in photonics and metrology.^[15] These developments, driven by semiconductor and laser technologies, have solidified autocollimators as essential tools in precision engineering.^[16]

Operating Principle

Basic Optical Setup

The basic optical setup of an autocollimator consists of several core components that enable precise angular measurements through reflection. These include a light source, typically an LED or lamp, which illuminates a reticle or target pattern to produce a defined beam; a collimating objective lens that converts the diverging light into parallel rays; a beam splitter or partially reflecting mirror that directs the outgoing beam toward the target and routes the returning light to the detector; the reticle itself, often a crosshair or graticule for reference; and a detector, such as an eyepiece for visual observation or a CCD sensor for electronic detection.^[9]^[6]^[17]^[18] In the light path, illumination from the source passes through the reticle and beam splitter before reaching the objective lens, which collimates the light into a parallel beam projected toward a flat mirror target at a distance. Upon striking a perpendicular mirror, the rays reflect back along the identical path, re-enter the objective lens, and are deflected by the beam splitter to converge on the focal plane, forming a superimposed image of the reticle observable at the detector. This autocollimation principle ensures the returned image aligns perfectly with the original when no angular deviation is present, allowing deviations to manifest as lateral displacements in the image.^[9]^[6]^[17] Standard autocollimators employ a fixed-focus design optimized for infinite conjugates, where the target is effectively at infinity due to collimation, though adjustable configurations accommodate finite distances by varying the focal length or adding corrective optics. Typical working distances range from 0.5 to 2 meters for general setups, extendable to 25 meters in specialized long-range models, ensuring flexibility in alignment tasks. Ray tracing diagrams illustrate this configuration with incident parallel rays striking the mirror, their reflection retracing the path without displacement for zero tilt, and a parallel but offset return beam for angular errors, highlighting the symmetry of the optical axis.^[9]^[6]^[18]

Angle Measurement Mechanism

In an autocollimator, the angle measurement mechanism relies on the precise deviation of a reflected light beam caused by any tilt in the target mirror. When the mirror is perpendicular to the incident collimated beam, the reflection returns directly to the reticle, superimposing the images perfectly. However, a small tilt angle θ in the mirror redirects the beam by twice that angle (2θ), resulting in a lateral displacement of the reflected reticle image on the focal plane of the objective lens. This displacement d is directly proportional to the tilt angle, enabling the quantification of angular errors through optical geometry.^[19]^[20] The relationship between the displacement and the angular deflection is given by the approximation

\theta \approx \frac{d}{2f}

where θ is the tilt angle in radians, d is the lateral displacement of the image in the focal plane, and f is the focal length of the objective lens. To express the angle in arcseconds, which is the standard unit for high-precision measurements, multiply by the conversion factor 206265 (since 1 radian ≈ 206265 arcseconds), yielding

\theta_{\text{arcsec}} = \frac{d}{2f} \times 206265.

This equation derives from the paraxial approximation in optics, where the beam's return path doubles the effective deflection.^[19]^[20]^[21] The sensitivity and resolution of the measurement depend primarily on the focal length f and the detection method's granularity. A longer focal length amplifies the displacement d for a given θ, thereby enhancing the ability to resolve smaller angles, though it narrows the field of view. In electronic autocollimators, resolution is further influenced by the pixel size of the charge-coupled device (CCD) array, which determines the smallest detectable shift; typical resolutions range from 0.1 to 1 arcsecond across commercial instruments.^[19]^[21] The measurement process varies by autocollimator type. In visual autocollimators, the operator observes the displaced reticle image through an eyepiece and manually aligns or reads the position against a calibrated scale or micrometer, directly correlating the shift to the angle via the aforementioned equation. Electronic autocollimators, in contrast, employ a CCD sensor to capture the displaced image, where software algorithms compute the centroid of the light spot digitally, providing automated and higher-precision angle calculations without subjective interpretation.^[20]^[19]^[21]

Types of Autocollimators

Visual Autocollimators

Visual autocollimators represent the foundational design of autocollimation technology, employing a simple optical setup centered around an eyepiece for direct observation. The core components include a high-quality objective lens, a beam splitter or partially reflecting mirror, an illuminated reticle (graticule) positioned at the focal plane, and a micrometer-adjustable eyepiece. The reticle, typically featuring crosshairs, is backlit by a light source such as a lamp or LED, allowing the operator to view both the reticle and the reflected image from a target mirror simultaneously through the eyepiece. This configuration enables manual alignment without requiring electronic components, making it a portable and mechanically robust instrument weighing as little as 0.5 kg in compact models like the TA60.^[9] In operation, the light from the illuminated reticle passes through the objective lens, which collimates it into a parallel beam directed toward the target surface, such as a plane mirror. Upon reflection, the beam returns along the same path but appears displaced if the target is tilted, forming a secondary image of the reticle visible in the eyepiece. The operator manually adjusts the micrometer to shift the reticle crosshairs into coincidence with the displaced reflected image, with the micrometer's graduated scale directly indicating the angular deviation in arcseconds. This process relies on the principle of autocollimation, where the displacement of the image is proportional to the target's angular tilt, and measurements can be taken at distances up to 20 meters depending on the model, though effectiveness diminishes at longer ranges due to oblique ray limitations.^[9]^[4] The primary advantages of visual autocollimators stem from their mechanical simplicity and lack of dependence on power sources or complex electronics, resulting in low cost and ease of setup in diverse environments. They are particularly suited for field applications, such as workshop alignments or tool room inspections, where portability and minimal maintenance are essential; for instance, models like the VA900 support right-angle viewing for confined spaces. Calibration is straightforward and traceable to national standards, ensuring reliability in basic metrology tasks.^[9]^[22] However, these instruments are limited by their reliance on human observation, introducing subjective interpretation that can lead to operator error and variability in readings. Resolution typically ranges from 0.5 to 5 arcseconds, constrained by the eye's ability to discern fine displacements, with higher-precision models like the TA51 achieving 0.2 arcsecond direct reading under ideal conditions but still susceptible to fatigue or parallax issues.^[9]^[4]^[23] Visual autocollimators gained prominence in early 20th-century surveying and precision engineering for tasks like aligning machine tools and measuring surface flatness, as the autocollimation concept was developed around a century ago for non-contact angle measurements. Today, they remain in use for basic laboratory setups and educational purposes, where cost-effectiveness outweighs the need for sub-arcsecond automation.^[24]^[9]

Electronic Autocollimators

Electronic autocollimators represent a digital evolution of traditional visual models, replacing the eyepiece with electronic detectors such as charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS) sensors to enable automated, high-precision angle measurements. These sensors capture the reflected reticle image displaced by angular deviations, converting optical data into digital signals that can be interfaced with computers via USB or RS232 ports for processing and output. This design facilitates integration into automated systems, allowing for precise quantification of small tilts without manual observation.^[25]^[26]^[27] In operation, the sensor array records the position of the autocollimated image, which software algorithms analyze—typically through centroid calculation methods that determine the image's center of intensity—to compute angular displacement with sub-arcsecond accuracy. This process supports real-time monitoring of alignments and data logging for extended measurements, enhancing repeatability in metrology tasks compared to visual autocollimators that rely on subjective scale readings. Manufacturers like Taylor Hobson produce models that integrate with specialized metrology software, enabling statistical analysis of measurement data for quality control.^[28]^[29]^[30]^[31] Advancements in electronic autocollimators emerged in the 1980s, coinciding with the maturation of CCD technology, and have since achieved resolutions as fine as 0.01 arcseconds through refined sensor arrays and image processing. Modern features include auto-focus mechanisms to maintain clarity across varying target distances and environmental compensation algorithms that mitigate effects from temperature fluctuations or vibrations, ensuring stability in demanding industrial settings. These improvements, exemplified in products from companies such as PLX Inc. and Möller-Wedel Optical, have broadened their utility in precision alignment without compromising the core optical principles.^[32]^[27]^[33]^[34]

Laser Autocollimators

Laser autocollimators employ a laser diode, typically a low-power semiconductor laser operating at wavelengths such as 638 nm, to generate a coherent and highly collimated beam, replacing traditional incoherent light sources for enhanced beam quality and minimal divergence.^[35]^[1] This design often integrates electronic detectors, such as CMOS sensors, for precise measurement of the reflected beam's position, and may incorporate polarizers or analyzers to assess polarization states during autocollimation.^[35]^[36] In operation, the laser beam is projected onto a target mirror, where it reflects back through a focusing lens to form an image on the detector; angular deviations cause lateral shifts in this image, which are quantified to determine tilt angles with resolutions as fine as 0.01 arc-seconds.^[35]^[36] The coherence of the laser enables measurements over extended distances—up to infinity from a minimum focus of 30 cm—while also allowing evaluation of beam parameters like divergence (down to 0.2 mrad) and width, which is particularly useful for assessing optical system performance.^[35]^[1] However, the coherent nature increases sensitivity to target surface quality, as irregularities can produce speckle patterns that interfere with precise spot positioning.^[1] Key variants include the laser analyzing autocollimator, which measures not only angular alignment but also the polarization state of incoming laser beams via Stokes parameters, ellipticity, and orientation, making it suitable for advanced optical testing.^[35] Another variant integrates with total stations for surveying applications, combining autocollimation with distance measurement for comprehensive alignment tasks.^[35] Laser autocollimators have seen notable development in specialized uses, such as the 2014 invention of the Laser Analyzing Autocollimator (LAA) for bore sighting, enabling alignment of multiple lines of sight to lasers or designators in military and precision optics contexts.^[37]

Applications

Optical and Mechanical Alignment

Autocollimators play a crucial role in optical alignment by enabling precise adjustments of mirrors, lenses, and assemblies in systems such as telescopes, microscopes, and laser setups. These instruments detect angular deviations in reflected light to ensure components are parallel and minimize optical aberrations, achieving alignments within fractions of an arcsecond for optimal system performance.^[38]^[39] In practice, the autocollimator projects a reticle pattern onto the surface, and any misalignment causes a displacement in the returned image, which is quantified to guide corrective tilts or translations.^[38] For two-mirror alignment, the procedure begins by positioning the primary mirror perpendicular to the autocollimator's optical axis and adjusting it until the reflected reticle image superimposes exactly on the original, confirming normal incidence. The secondary mirror is then introduced along the beam path, and its tilt and position are iteratively refined by observing the returned image until it again coincides with the reference reticle, establishing collinearity between the mirrors.^[39]^[40] This method, often enhanced by electronic autocollimators for real-time feedback, is adaptable to complex assemblies like those in laser cavities or imaging optics.^[39] In mechanical alignment, autocollimators ensure squaring of machine tool spindles to tables and verify flatness in fixtures or bores through non-contact measurements of straightness, squareness, parallelism, and flatness.^[31]^[6] The process involves mounting a reflective target on the component and scanning with the autocollimator to map angular errors, allowing adjustments to achieve sub-arcsecond precision in industrial tooling.^[31] Autocollimators are integral to semiconductor lithography for stage leveling, where they couple with high-resolution motorized pitch and roll systems to maintain parallelism during wafer bonding or nanoimprint processes, supporting post-alignment accuracies down to 0.5 μm at 3 sigma.^[41] In aerospace component assembly, they facilitate angular adjustments of structural elements to meet stringent tolerances in aircraft optics and mechanical interfaces.^[6] Post-2020 advancements in photonics testing have incorporated laser-based electronic autocollimators with integrated CCD sensors for faster, automated alignments in fiber optic and integrated circuit assemblies, enhancing throughput in high-volume production.^[38]^[40]

Precision Metrology and Testing

Autocollimators play a crucial role in precision metrology by enabling the measurement of small angular errors in mechanical components such as gears, bearings, and prisms. In gear metrology, they are used to calibrate angular indexing errors in gear measuring machines by detecting deviations from nominal angles with high accuracy, ensuring precise tooth profile assessments.^[42] For bearings, electronic autocollimators measure angular runout in high-precision ball bearings, distinguishing between synchronous and asynchronous errors to verify performance in applications requiring minimal tilt, with resolutions down to microradians.^[43] Similarly, in prism testing, visual autocollimators have been employed since the 1960s to quantify angular deviations in optical prisms, achieving accuracies of ±0.5 arcseconds for quality control in optical assemblies.^[19] Deflection testing under load represents another key metrological application, where autocollimators assess material stress by monitoring angular changes in structures like machine tool slideways or thin films under torsional loads. For instance, in torsion testing setups, they measure beam deflections to determine torsional modulus, providing insights into material behavior without contact.^[44] These instruments have been common in metrology laboratories since the 1960s, supporting stress analysis in components subjected to controlled loads for enhanced durability evaluation.^[19] In quality assurance scenarios, autocollimators facilitate testing for automotive parts, such as verifying angular stability in bearings to meet ABEC standards and ensure reliability in vehicle assemblies.^[43] They also verify vibration isolation platforms by detecting angular vibrations in beamline setups, confirming mechanical stability with sub-arcsecond sensitivity.^[45] Resolutions as fine as 0.1 arcseconds allow for effective sub-micron displacement measurements at typical working distances, translating angular data into linear precision for comprehensive part evaluation.^[19] Integration with coordinate measuring machines (CMMs) enables hybrid measurements, where autocollimators provide angular data to complement linear probing for calibrating surface plates and achieving traceable results under ISO standards like ISO 230-7 for geometric accuracy.^[46] Digital outputs from electronic models support automated data logging for ISO compliance in quality control processes, ensuring documentation of metrological traceability to international benchmarks.^[19]

Specialized Industrial Uses

In surveying, autocollimators integrated into total stations enable non-contact angle transfer by measuring reflected mirror angles and laser beam alignments with high precision, facilitating accurate orientation in field applications.^[47]^[48] These devices project collimated beams to infinity, allowing remote mechanical dimensioning and straightness assessment without physical contact. Historically, autocollimators have contributed to geodesy through their use in calibrating geodetic angle instruments, ensuring reliable data transfer in angular positioning systems.^[49] In advanced manufacturing, laser autocollimators support bore sighting for firearms and optics by aligning multiple lines of sight to a laser designator with sub-arcsecond accuracy, as exemplified by the 2014 Laser Analyzing Autocollimator (LAA) developed for military applications.^[37] They also aid in semiconductor wafer handling by measuring angular offsets of reflective surfaces and optical systems, ensuring precise positioning during fabrication processes to maintain micron-level tolerances.^[50] Emerging industrial uses include integration with augmented reality (AR) and virtual reality (VR) systems for virtual alignment, where autocollimators project targets at defined distances to verify headset and display orientations in optomechatronic assemblies.^[47]^[51] This capability supports real-time testing of AR/VR devices, combining mechanical, optical, and laser alignments for immersive technology development.^[52]

Accuracy and Limitations

Factors Influencing Accuracy

The accuracy of autocollimators is significantly influenced by design parameters, particularly the focal length of the objective lens and the stability of the light source. A longer focal length enhances angular sensitivity and resolution by increasing the displacement on the detector for a given angular deviation, according to the relation where angular deviation A = \frac{X}{2f} (with X as detector displacement and f as focal length), allowing resolutions down to 0.01 arcseconds; however, it narrows the field of view, complicating alignment over larger ranges.^[21] In laser-based systems, light source stability is critical, as wavelength drift can introduce systematic errors in beam collimation; recent advances since 2020, including improved frequency stabilization techniques, have achieved wavelength drifts below 1 pm over hours, enabling nanoradian-level measurements in high-precision setups.^[53]^[54] Environmental conditions further degrade precision through multiple mechanisms. Temperature variations alter the refractive index of air by approximately -0.9 ppm/K and induce thermal expansion in the instrument frame (e.g., 17 ppm/K for steel), leading to beam path distortions and angle errors up to 1 ppm for a 0.06 K change.^[55] Vibration and air turbulence displace the reflected beam via mechanical jitter or refractive index fluctuations, with temperature gradients of 0.01 K/m causing deflections of 21.5 milliarcseconds per meter.^[55] Additionally, the reflectivity of the target surface affects the returned beam intensity and quality; low or uneven reflectivity scatters light, reducing signal-to-noise ratio and introducing measurement uncertainty.^[56] Resolution limits arise from fundamental optical and detection constraints. Diffraction effects become prominent at small angles, particularly with apertures smaller than 2 mm, increasing noise and limiting spatial resolution in slope measurements.^[57] In electronic autocollimators, sensor noise, including shot noise from photon statistics in the light source, sets the ultimate sensitivity floor, constraining performance despite high detector pixel counts. These factors contribute to typical accuracies of about 0.5 arcseconds for visual autocollimators, limited by ocular resolution, and 0.01 arcseconds for electronic models, though modern laser variants post-2020 often exceed this with stabilities below 0.001 arcseconds.^[58]^[59]

Calibration and Error Mitigation

Calibration of autocollimators typically involves verifying the zero angle and linearity using high-precision reference standards such as optical polygons or plane reference flats with flatness better than λ/8. These standards are rotated or tilted relative to the autocollimator's optical axis via an angle comparator or small angle generator (SAG), allowing measurement of angular deviations in both yaw and pitch directions to establish traceability to the SI unit of the radian. Periodic checks are conducted using known tilt standards, such as calibrated plane mirrors or SAGs, to confirm alignment and detect drift, with adjustments made to the optical axis and reticle positioning to within tolerances of less than 1 arcsecond.^[60]^[61] Software-based linearity correction is applied in electronic autocollimators by fitting calibration data from multiple angular positions to polynomial models, compensating for non-linear responses in the detector array and optics. This process minimizes systematic deviations across the measurement range, often achieving uncertainties below 0.1 arcsecond when combined with ray-tracing simulations.^[60] Error mitigation strategies emphasize environmental controls, such as temperature-stabilized enclosures maintaining ±0.3°C and vibration isolation, to reduce thermal expansion and refractive index variations in air that can introduce up to several arcseconds of error. Averaging multiple readings—typically 50 or more per position—helps suppress random noise from detector electronics and ambient fluctuations, improving repeatability to sub-microradian levels. Hybrid systems integrating autocollimators with laser interferometers enable cross-validation of angular and linear errors, allowing real-time compensation for Abbe offsets and thermal drifts in precision metrology setups.^[60]^[60]^[62] Calibration ensures traceability to national metrology institutes like NIST for angle standards or to ISO 10360 for coordinate measuring machine (CMM) applications where autocollimators verify geometric performance. Recommended frequency includes annual recalibration or immediately following relocation to account for potential alignment shifts from transport or environmental changes.^[63]

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A new torsion tester based on an electronic autocollimator for ...
Oct 21, 2021 · A new torsion tester with high resolution is developed based on the torsion-balance method and the autocollimation principle for measuring the ...
[44]
Optical autocollimator for vibration measurements at Diamond I13 ...
In this paper we present the setup developed to measure mechanical stability of beamline based on optical autocollimator.
[45]
Calibration of surface plates using autocollimator, laser systems and ...
Apr 12, 2023 · In this investigation an autocollimator systems, laser systems and coordinate measuring machines (CMMs). A comparison among these methods of ...Missing: integration | Show results with:integration
[46]
ACT-25FO Autofocusing Autocollimator - PLX Inc.
Integrates an autocollimator and laser beam profiler in one system. Motorized focusing with multi-wavelength operation from UV to NIR. Measures and aligns laser ...
[47]
New Total Station Autocollimator - Duma Optronics
The newly introduced Total Station Autocollimator is capable of measuring reflected mirror angles, laser beams, straightness and remote mechanical dimensions ...
[48]
[PDF] Theoretical aspects of the calibration of geodetic angle ...
The autocollimator transfers the data to a com- puter 4 where the data of angular position of the rotary table are also transmitted. The principle of tested/ ...
[49]
https://pdfs.semanticscholar.org/c2cb/47d55a5f0b441c4323d602f0ed7fb66a9863.pdf
[50]
[PDF] Application Note - Advanced Electronic Autocollimators
• AR/VR/XR Device Verification: Alignment of headsets and displays; focus and virtual distance verification. • Aerospace & Defense: Gyroscope and inertial ...
[51]
[PDF] Total Station Autocollimator - E
- Emerging optomechatronics AR/VR industry has introduced special applications requirement: - Interalignment and testing of lasers, optics, mechanics and ...
[52]
Nanoradians level high resolution autocollimation method based on ...
Jul 2, 2024 · The autocollimation device could distinctly discern the angular shift of 0.0005 arcsec at a measurement frequency of 125 times per second, ...<|control11|><|separator|>
[53]
Improved laser frequency stabilization achieved with unprecedented ...
Jun 18, 2025 · This advancement features a beyond state-of-the-art optical storage time and a novel approach to actively cancel spurious stabilization noise.Missing: wavelength autocollimators 2020-2025
[54]
[PDF] Environmental influences on autocollimator-based angle and form ...
Feb 1, 2019 · In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, ...
[55]
Environmental influences on autocollimator-based angle and form ...
Feb 14, 2019 · In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy ...Missing: vibration | Show results with:vibration
[56]
Investigations on the spatial resolution of autocollimator-based ...
Aug 10, 2025 · The aperture size smaller than 2 mm increases measurement noise from diffraction and interference effects [48] . NOMs have demonstrated ...
[57]
Angles on accuracy - SPIE
Oct 1, 2003 · Visual autocollimators can measure angle changes as small as 0.5 arcsec under ideal conditions, but are generally used only to resolutions of a ...
[58]
TriAngle - Electronic autocollimator for precise optical angle ...
The software OptiAngle® is a powerful tool covering all aspects of accurate angle measurement with the TriAngle electronic autocollimators in terms of ...
[59]
[PDF] Guidelines on the Calibration of Autocollimators - EURAMET
This document provides guidelines on the calibration of autocollimators to enhance the equivalence and mutual recognition of calibration results.Missing: centroid | Show results with:centroid
[60]
A simple method for high-precision calibration of an angle encoder ...
Mar 9, 2015 · A simple method for high-precision calibration of an angle encoder using an electronic nulling autocollimator | NIST.Missing: traceability | Show results with:traceability
[61]
Interferometric profile scanning system for measuring large planar ...
We proposed and demonstrated a hybrid optical measurement system comprising two HSMs to implement efficient on-site evaluation of 2D planar stages. Comparing to ...Missing: mitigation | Show results with:mitigation
[62]
NIST Policy on Metrological Traceability
Feb 12, 2010 · Metrological traceability [3] requires the establishment of an unbroken chain of calibrations to specified reference standards: typically ...Missing: autocollimator | Show results with:autocollimator
[63]
Advances in Computer Numerical Control Geometric Error ... - MDPI
This paper comprehensively reviews recent advancements in geometric error measurement and compensation techniques, particularly in five-axis machine tools.Missing: 2020s | Show results with:2020s