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Lloyd's mirror

Lloyd's mirror is an optics experiment that demonstrates interference using a single coherent light source placed parallel to a flat reflecting mirror, where the direct light and the reflected light—appearing to originate from a virtual image source—superpose to form a pattern of bright and dark fringes on a nearby screen.^[1] Devised in 1834 by Humphrey Lloyd, professor of natural and experimental philosophy at Trinity College Dublin, the apparatus builds on Thomas Young's double-slit experiment by employing wavefront division rather than amplitude division, allowing for coherent interference without splitting the beam explicitly.^[2] In the standard setup, the light source is positioned a small distance d above the mirror surface, and the screen is placed at an angle or distance to observe the fringes, with the path difference between the direct and reflected paths determining the fringe positions according to the formula \delta = d \sin \theta, where \theta is the angle from the mirror edge.^[1] A distinctive feature of Lloyd's mirror is the \pi-radian phase shift introduced upon reflection from the denser mirror medium, which inverts the expected fringe pattern compared to Young's setup, producing a dark central fringe at the mirror-screen contact point rather than a bright one.^[2] This phase effect provided early evidence for the wave theory of light and has been used in precision measurements, such as determining wavelengths or testing the speed of light from moving sources.^[3] Beyond education, modern adaptations employ Lloyd's mirror in applications like ultraviolet photolithography for fabricating subwavelength nanostructures on materials such as gallium arsenide and titanium, leveraging its simplicity and high resolution for periodic patterning without complex optics.^[1] The experiment's principles extend to other wave phenomena, including microwaves and acoustics, underscoring its versatility in illustrating interference fundamentals.^[4]

History

Discovery

In 1834, Humphrey Lloyd, then Professor of Natural and Experimental Philosophy at Trinity College, Dublin, conducted experiments on light diffraction to provide empirical support for the wave theory of light amid ongoing debates with the corpuscular model. Motivated by the need to explore diffraction patterns and interference, Lloyd arranged a narrow slit illuminated by a lamp flame behind two movable metallic plates, with a polished black glass surface positioned adjacent to the slit at nearly grazing incidence. Upon observation through an eyepiece, he detected a system of equidistant interference fringes formed by the superposition of direct rays from the slit and those reflected from the glass surface, resembling alternating bright and dark bands. With white light, the pattern showed a dark band at the point of contact with the mirror edge, followed by colored fringes.^[5] Lloyd explicitly likened these fringes to the interference pattern in Thomas Young's double-slit experiment, first demonstrated in 1801, noting that his setup produced effects similar to one-half of the pattern from Fresnel's double-mirror arrangement but using a single reflecting surface instead of multiple slits or mirrors.^[6] This analogy highlighted the role of coherent wavefront division in generating interference, reinforcing the undulatory hypothesis without requiring separate light sources. His work was situated within the broader 19th-century optical context, where Young's foundational interference demonstrations and Augustin-Jean Fresnel's advancements in wave diffraction and polarization—from the 1810s onward—had shifted scientific consensus toward the wave model of light.^[7] Lloyd's findings were detailed in his paper "On a New Case of Interference of the Rays of Light," presented to the Royal Irish Academy in 1834 and published in volume 17 of its Transactions (pages 171–177), where he concluded that the observed phenomena offered "a new and striking confirmation of the undulatory theory." This publication marked the initial documentation of what became known as Lloyd's mirror, emphasizing its simplicity and utility in visualizing wave superposition.

Early Developments

Following the initial description of the interference phenomenon in his 1834 paper, Humphrey Lloyd extended his analysis in subsequent writings, including qualitative explanations of fringe visibility and accompanying diagrams illustrating the setup. In these works, Lloyd emphasized how the visibility of interference fringes depends on the coherence of the light source and the angle of incidence, noting that the central fringe at the mirror edge appears dark due to the phase shift upon reflection, while subsequent fringes arise from path differences. Diagrams depicted the reflector, source, and screen, showing the paths of direct and reflected rays to highlight the formation of parallel bands perpendicular to the mirror edge.^[5] Throughout the 19th century, researchers replicated and modified Lloyd's setup to explore related optical effects, often employing monochromatic light sources such as gas flames with filters to enhance fringe contrast. These experiments improved upon Lloyd's original qualitative observations by quantifying fringe spacing under different illumination conditions, laying groundwork for understanding wave interactions at boundaries. In the early 20th century, quantitative studies advanced the understanding of the phase shift in reflection, notably through Otto Wiener's 1890 experiments on standing light waves. Wiener used thin metallic films and photographic plates to map intensity nodes and antinodes, confirming a π phase shift upon reflection for the electric field of transverse electromagnetic waves, with nodes at the mirror surface. This work provided empirical validation of the wave nature of light at boundaries, aligning with Maxwell's theory and explaining the dark central fringe in Lloyd's mirror.^[8] The transition to highly coherent sources occurred in the 1960s following the invention of the laser, which enabled sharper, more stable fringes in Lloyd's mirror experiments due to extended spatial and temporal coherence lengths. Early laser-based implementations, using helium-neon sources, produced interference patterns with resolutions far exceeding those of classical incandescent or arc lamps, facilitating precise measurements of wavelength and phase shifts in modern optical research. This shift marked the evolution from qualitative demonstrations to quantitative tools in wave optics.

Theoretical Principles

Interference Mechanism

In Lloyd's mirror, interference arises from the superposition of a direct wave emanating from the source and a reflected wave from the mirror surface, which behaves as if originating from a virtual source positioned symmetrically below the mirror plane. This virtual source configuration creates a two-beam interference pattern analogous to that from two coherent point sources, where the real source and its image interfere in the region above the mirror.^[9]^[1] The path difference between the direct ray from the source to an observation point and the reflected ray via the mirror determines the interference condition, leading to constructive interference when the difference equals an integer multiple of the wavelength and destructive interference otherwise. Upon reflection at the air-mirror interface, typically a denser medium, an additional phase shift of π radians occurs, inverting the interference pattern such that the point of contact near the mirror edge exhibits a dark fringe rather than bright.^[9]^[1] At grazing incidence, where the source illuminates the mirror at a shallow angle, the effective separation between the real and virtual sources increases, resulting in larger fringe spacing and improved visibility of fringes close to the mirror edge due to minimized diffraction effects from the mirror boundary. This configuration enhances pattern resolution in applications requiring fine control over interference geometry.^[10] Polarization plays a critical role in fringe contrast, as the reflection coefficients for s- and p-polarized components differ according to the Fresnel equations, altering the relative amplitudes and phases of the interfering beams. For s-polarization (perpendicular to the plane of incidence), the reflection coefficient is higher and introduces a consistent π phase shift, yielding higher contrast fringes, whereas p-polarization (parallel) has a lower coefficient and variable phase shift depending on the angle, potentially reducing contrast unless the incident light is optimized, such as by using half-wave plates to adjust polarization states.^[11]^[9] Compared to Young's double-slit experiment, Lloyd's mirror eliminates the need for a second physical aperture, avoiding the diffraction envelope that limits fringe visibility over a wide field and allowing interference patterns with higher uniformity, particularly beneficial for wavefront division without significant power loss.^[1]

Mathematical Description

The interference pattern in Lloyd's mirror arises from the superposition of light from a real source and its virtual image formed by reflection off the mirror surface, with the path difference between these rays determining the fringe locations. Consider a coherent source at a perpendicular distance h from the mirror, with the observation point on a screen at a distance D from the source such that the angular position corresponds to angle \theta, where \sin \theta = h / D. The reflected ray travels an extra optical path length compared to the direct ray, given by \delta = 2 h \sin \theta.^[1] This path difference leads to a phase difference of $2\pi \delta / \lambda + \pi, where the additional \pi phase shift occurs upon reflection from the denser medium (the mirror). The resulting intensity distribution at the observation point is I = 4 I_0 \sin^2(\pi \delta / \lambda), where I_0 is the intensity from each ray alone.^[1] The conditions for constructive and destructive interference follow from the phase difference. Due to the phase shift, bright fringes occur when \delta = (m + 1/2) \lambda for integer m = 0, 1, 2, \dots, and dark fringes occur when \delta = m \lambda. Substituting the path difference yields the angular positions \sin \theta_m = (m + 1/2) \lambda / (2 h) for bright fringes.^[1] The fringe spacing \Delta y on the screen, derived from the difference in positions for consecutive orders under the paraxial approximation (small \theta), is \Delta y = \lambda / (2 \sin \theta). To arrive at this, note that the effective source separation is d = 2 h, and for small angles, the standard two-source formula gives \Delta y = \lambda D / d. Substituting h = D \sin \theta yields d = 2 D \sin \theta, so \Delta y = \lambda D / (2 D \sin \theta) = \lambda / (2 \sin \theta). This approximation holds in the paraxial regime where \theta \ll 1 radian, ensuring nearly parallel rays and negligible higher-order effects.^[1] Limitations of this model include the validity of the paraxial approximation, which breaks down for large \theta where fringe spacing varies nonlinearly due to the exact geometry. Additionally, finite source size reduces spatial coherence, blurring fringes if the source angular extent exceeds the angular fringe separation \Delta \theta \approx \lambda / (2 h).^[1] As an example, consider a He-Ne laser with \lambda = 632.8 nm illuminating the setup at \theta = 5^\circ. The fringe spacing is \Delta y = 632.8 \times 10^{-9} / (2 \sin 5^\circ) \approx 632.8 \times 10^{-9} / (2 \times 0.0872) \approx 3.63 \times 10^{-6} m, or 3.63 \mum. Given the phase shift, the central fringe at the mirror edge (\delta = 0) is dark; the first bright fringe position is thus at y_1 = \Delta y / 2 \approx 1.815 \mum from the edge. To arrive at this position, set \delta = \lambda / 2 for the first bright fringe (effective constructive after phase shift), yielding \sin \theta_1 = \lambda / (4 h); with h = D \sin 5^\circ, the linear position y_1 \approx D \theta_1 \approx (\lambda / 2) D / (2 h) = (\lambda / 2) / (2 \sin 5^\circ) = \Delta y / 2.^[1]

Experimental Setup

Basic Configuration

The basic configuration of Lloyd's mirror involves a coherent light source, such as a monochromatic laser (e.g., a red diode laser at 635 nm with 1 mW power), positioned to illuminate a narrow slit or act as a point source, a flat mirror typically made of glass or metal, and an observation screen or detector.^[12]^[13] The light source is placed parallel to the mirror's edge at a small height h above the reflecting surface, ensuring the beam travels along the mirror plane to create the necessary path overlap for interference.^[1] In the standard geometry, the light is incident on the mirror at a shallow grazing angle \theta, with the mirror extending along part of the beam path to reflect a portion of the wavefront while allowing the direct beam to propagate alongside it; this setup effectively creates a virtual source symmetric to the real source below the mirror plane.^[13]^[1] Optional converging or diverging lenses may be included to focus or expand the beam, as in setups using a +20 mm focal length lens near the source and a +150 mm lens before the screen.^[12] The observation zone lies in the region of overlap between the direct and reflected beams, where interference fringes form parallel to the mirror edge on the screen or detector, beginning at the mirror's edge with the zero-order fringe corresponding to the point of equal optical path lengths.^[13]^[1] These fringes are typically viewed on a screen positioned 1-3 meters from the mirror, mounted on an optical bench for stability.^[12] To ensure clear patterns and minimize unwanted reflections, mirrors are often backed with black paint or material, and typical dimensions include a mirror length of 10-20 cm (e.g., a 6-inch glass strip) to accommodate the grazing beam path without excessive scattering.^[13]^[12] This configuration relies on the interference principle of coherent waves dividing at the mirror surface, as elaborated in the theoretical principles section.^[1]

Practical Implementation

The practical implementation of Lloyd's mirror begins with assembling the basic components on an optical bench or stable platform. The light source, typically a laser or slit illuminated by a coherent source, is aligned perpendicular to the plane of the slit to ensure a well-defined wavefront. The mirror, often a front-surface type to reduce ghosting from back-surface reflections, is positioned flush against the edge of the slit, with its reflecting surface oriented at a small grazing angle θ relative to the incident beam; θ is adjusted iteratively to achieve optimal fringe contrast by balancing the overlap of direct and reflected beams.^[14]^[15] Observation of the interference pattern requires projecting the overlapping beams onto a screen or detector placed at a distance D from the setup. Traditional methods use a white viewing screen to visualize the fringes directly, while modern approaches employ CCD cameras for digital imaging or photodiodes for intensity profiling along the pattern axis. Fringe spacing can be varied by adjusting the wavelength λ of the source or the angle θ, with smaller θ yielding wider fringes due to increased effective source separation.^[16]^[17] Common challenges in implementation include sensitivity to vibrations, which can blur or shift fringes; this necessitates stable mounts or optical tables to maintain coherence over the observation time. Dust particles or surface imperfections on the mirror can distort fringe uniformity, requiring clean, high-quality optics and careful handling.^[18] Modern enhancements improve precision through integration with vibration isolation tables, which dampen external disturbances, and automated alignment systems using piezoelectric actuators or laser-guided feedback to fine-tune θ and source positioning in real-time. For example, a 5 mW HeNe laser (λ = 632.8 nm) at a grazing angle of approximately 0.036° can produce fringes with 0.5 mm spacing over a 5 cm field on a screen 1 m away, suitable for educational demonstrations.^[19]^[17]

Optical Applications

Interference Lithography

In interference lithography, Lloyd's mirror is employed to generate periodic nanostructures by exposing a photoresist-coated substrate to the interference pattern formed between a direct coherent UV or EUV beam and its reflection from an adjacent mirror. The setup positions the mirror parallel to the substrate, with the incident beam grazing the mirror surface at a small angle α, creating a virtual source that interferes with the direct beam to produce one-dimensional grating patterns. The resulting fringe period is given by

d = \frac{\lambda}{2 \sin \alpha},

where λ is the wavelength of the light; this exposes lines in the photoresist that can be developed into nanostructures.^[1]^[20] This configuration provides key advantages over other interference lithography approaches, including mechanical simplicity without requiring a beam splitter or complex optics, which minimizes alignment errors and preserves beam intensity for efficient exposure. Additionally, the period can be precisely tuned by adjusting the grazing angle α via a rotation stage, enabling flexible patterning. With EUV sources (λ ≈ 13.5 nm), the technique achieves high resolution, producing gratings with half-pitches down to approximately 10 nm.^[1]^[21]^[22] Variant mirror-based setups have extended these principles to achieve 5 nm half-pitch resolutions as of 2024.^[23] Lloyd's mirror interference lithography emerged in the 1980s as part of broader efforts in advanced semiconductor patterning, leveraging the growing availability of coherent laser sources for nanoscale fabrication. Advancements in 2016 demonstrated its compatibility with compact high-harmonic EUV sources, enabling laboratory-scale production of high-density periodic structures with enhanced coherence and resolution suitable for next-generation devices.^[24]^[20] To create two-dimensional patterns, such as crossed gratings, the technique employs double exposure: the substrate is exposed once for a one-dimensional grating, rotated by 90°, and exposed again with the same setup. For large-area fabrication, Lloyd's mirror systems integrate with stepper mechanisms, allowing step-and-repeat exposure across substrates up to 300 mm in diameter while maintaining pattern uniformity.^[25]^[26] Despite these strengths, the method has limitations, including a fixed pattern orientation determined by the mirror-substrate geometry, which necessitates substrate rotation for multi-directional patterns and can introduce alignment challenges. Additionally, finite beam sizes lead to edge effects, such as diffraction-induced nonuniformity at the pattern boundaries, restricting the exposed area without supplementary optics.^[27]^[28]

Metrology and Testing

Lloyd's mirror interferometry serves as a valuable tool for assessing the flatness of optical surfaces, such as mirrors and lenses, by generating interference fringes that reveal deviations from planarity. In this configuration, a coherent light source illuminates the test surface at grazing incidence, where the direct and reflected beams interfere to produce straight, equally spaced fringes on a perfectly flat surface. Any surface irregularities cause distortions in fringe spacing or shape, which can be quantified using moiré superposition techniques to visualize and measure deviations, enabling the detection of irregularities as small as fractions of the wavelength of light used.^[29] This method is particularly advantageous for large or diffusely reflecting surfaces that are challenging to test with conventional interferometers like the Fizeau, as the grazing angle minimizes scattering from roughness while maintaining high sensitivity. For instance, qualitative assessments of curved glass surfaces demonstrate how moiré fringes deform proportionally to the curvature, providing a direct map of flatness errors without requiring a reference flat.^[30]^[30] Beyond flatness, Lloyd's mirror setups generate high-contrast, periodic interference patterns that function as test gratings for calibrating optical instruments, offering a cost-effective alternative to mechanically ruled gratings. These cos²-modulated fringes, produced by parallel illumination of the mirror edge, provide known spatial frequencies suitable for verifying the resolution of microscopes or the wavelength dispersion in spectrometers. In practice, the fringe period can be precisely controlled by adjusting the source-to-mirror separation, enabling accurate alignment and performance checks in laboratory settings. Wavelength measurement benefits from the predictable fringe shifts in Lloyd's mirror arrangements, where changes in the incidence angle or source separation alter the fringe width according to the relation \beta = \frac{\lambda D}{d}, allowing \lambda to be determined with high precision from direct measurements of \beta, D, and d. This technique achieves accuracies on the order of 0.1% or better for monochromatic sources like lasers, making it a standard educational and experimental method for optical metrology.^[15] In industrial contexts, Lloyd's mirror adaptations facilitate the inspection of silicon wafers and extreme ultraviolet (EUV) optics by leveraging interference patterns to detect nanoscale surface defects and flatness errors. For wafer inspection, the setup exploits the Lloyd's mirror effect to suppress destructive interference from surface roughness, enhancing scatter signal clarity for defect localization during variable-angle illumination scans. Similarly, for EUV mirrors, grazing-incidence interferometry quantifies wavefront errors critical to lithography performance. Quantitative analysis often incorporates phase-shifting techniques, where sequential fringe captures at different phase offsets enable sub-fringe precision in error mapping, adaptable to Lloyd's geometry for 3D profilometry of curved optics.^[31]^[32]

Non-Optical Applications

Underwater Acoustics

In underwater acoustics, the Lloyd's mirror effect arises when a sound source near the sea surface produces direct propagation paths to a receiver alongside paths reflected from the air-water interface, which acts as a pressure-release boundary imposing a π phase inversion on the reflected wave. This interference results in an oscillatory pattern of constructive and destructive interference, manifesting as alternating lobes and nulls in the received intensity, analogous to the optical case but adapted to acoustic wavelengths in water. The nulls, or zones of minimal intensity, occur due to the out-of-phase combination of the direct and reflected signals, creating characteristic shadow zones that can obscure detection near the surface.^[33] This mechanism has been pivotal in sonar applications, particularly for range estimation where the spacing of interference nulls in the frequency or time domain allows inference of source-receiver geometry. In submarine detection, the effect influences beam pattern modeling, as the surface-induced nulls form shadow zones that limit near-surface propagation and affect target visibility for shallow submerged objects. For instance, during World War II, U.S. Navy developments under the National Defense Research Committee (NDRC) analyzed image interference to optimize hydrophone performance and transmission loss predictions.^[34]^[33] Mathematically, the acoustic field in the far-field approximation for a source at depth z_s above a reflecting surface is given by

p \propto \frac{e^{i k r}}{r} \cdot 2i \sin\left( k z_s \sin \theta \right),

where k = 2\pi f / c is the wavenumber, f is frequency, c is the speed of sound in water, r is range, and \theta is the grazing angle; the intensity then follows I \propto \sin^2( k z_s \sin \theta ), leading to nulls when k z_s \sin \theta = n \pi for integer n. The resulting fringe spacing in source or receiver depth, representing the vertical distance between successive nulls at fixed \theta, is z = \frac{c}{2 f \sin \theta}, highlighting how lower frequencies or steeper angles widen the pattern.^[33] Real-ocean challenges include additional multipath from bottom reflections or roughness, complicating the ideal Lloyd's mirror assumption. Sea state effects can fill nulls and reduce peaks. These effects are mitigated through array processing techniques, such as beamforming, which spatially filter signals to resolve direct and reflected components and enhance signal-to-noise ratios in sonar systems.^[33]

Radio Astronomy

In radio astronomy, Lloyd's mirror interference manifests when radio waves from celestial sources arrive at a ground-based antenna via both a direct path from the sky and a reflected path off the Earth's surface, typically the sea or terrain, resulting in multipath propagation that produces characteristic interference fringes in the received signal. This effect is particularly prominent at low frequencies (40–400 MHz), where the long wavelengths make antennas sensitive to nearby reflectors, and the setup effectively forms a simple interferometer with the ground acting as the mirror. The interference pattern arises from the superposition of the two signals, leading to amplitude modulation that can enhance angular resolution for source localization but also introduces systematic errors if unaccounted for.^[35] The phase difference δ between the direct and reflected signals, which governs the fringe pattern, is given by

\delta = \frac{4\pi h \sin \epsilon}{\lambda},

where h is the effective height of the antenna above the reflecting surface, \epsilon is the elevation angle of the source above the horizon, and \lambda is the observing wavelength; this results in a 180° phase shift upon reflection from the surface, producing nulls and maxima in the antenna's response lobes and potential gain reductions of up to 6 dB at low elevations. Early applications leveraged this for calibration in precursor interferometry techniques leading to Very Long Baseline Interferometry (VLBI), where fringe spacing provided precise source positions, as demonstrated in 1948 observations of Cygnus A achieving sub-degree resolution. Additionally, the modulation of fringes by ionospheric refraction—causing phase delays scaling as \lambda^{-2}—has been used to study ionospheric effects, particularly at frequencies below 100 MHz, where total electron content variations distort low-elevation signals.^[35] Pioneering experiments in the 1940s utilized low-frequency sea-cliff arrays (e.g., 100 MHz) at sites like Dover Heights, Australia, to map solar radio bursts, with McCready et al. resolving emission from active regions to ~1° angular scales by analyzing interference fringes from direct and sea-reflected paths.^[35]^[36] Similar setups in Hawaii at 20–100 MHz revealed diurnal ionospheric absorption and scattering, rendering lower-frequency data challenging but enabling partial fringe analysis at 100 MHz for cosmic sources.^[37] In modern low-frequency telescopes such as the Murchison Widefield Array (MWA), mitigation involves elevation cuts (>20° to avoid strong multipath), site modeling of ground reflections, and self-calibration algorithms to correct phase errors during VLBI observations. Recent advancements in the 2020s include drone-based beam mapping for arrays operating at 400–800 MHz to improve gain uniformity in cosmology experiments.^[38]

References

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The Lloyd's Mirror approach uses wavefront division at a mirror to produce two-source interference patterns. The basic setup is shown in Figure 1. This was ...
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None
### Summary of Lloyd's Mirror from the Document
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May 1, 1972 · The Lloyd mirror interferometric experiments, by Tolman in 1910 and by Beckmann and Mandics in 1964, on the speed of light from a moving ...
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Abstract. A baffled circular loudspeaker is driven at 10 000 Hz to provide a sound source for a high school level Lloyd's mirrorexperiment.
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Below is a merged summary of "III. On a new case of Interference of the Rays of Light" by Humphrey Lloyd, consolidating all the information from the provided segments into a single, comprehensive response. To retain maximum detail and ensure clarity, I will use a table in CSV format for key experimental and observational details, followed by a narrative summary that integrates the remaining information (motivation, context, quotes, etc.). This approach balances density and readability while preserving all provided data.
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Jul 27, 2025 · The experiment in question is the double-slit experiment, which was first performed in 1801 by the British scholar Thomas Young to show how ...
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Nov 13, 2015 · Fresnel also developed a wave theory of diffraction. He created various devices to produce interference fringes in order to demonstrate the ...
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A Lloyd Mirror Interferometer. The Lloyd mirror is a wavefront-splitting interferometer. It consists of a flat glass mirror that reflects a portion of ...
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With a mirror, a second, virtual light source can be created in addition to a real light source by reflection. In the area of overlap of.<|control11|><|separator|>
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Lloyd's mirror: Laser beam interferes with reflection from glass.
The interference fringes are magnified by the -10" diverging lens and projected onto a screen. See Fig.1. The laser beam is the source S1. The light ...
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### Step-by-Step Procedure for Lloyd’s Mirror Experiment (LEOK-3A-15)
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Abstract. Lloyd's Mirror is used to produce two-source interference patterns, similar to the pattern produced by laser light passing through two slits.Missing: Humphrey publication
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Procedure: Put the diffusing lens on the laser and point toward the screen. Bring the front surface mirror in at a 90 degree angle to the beam and adjust to a ...
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Industrial Fiber Optics' Laser Optics Kit (45-600) contains the basic optical components to perform most of the experiments in this manual. The Laser Optics Kit ...
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A two-axis Lloyd's mirror interferometer with elastically bent mirrors ...
The proposed non-orthogonal two-axis Lloyd's mirror interferometer with EBMs was established on a vibration isolation table in a temperature-controlled room to ...Missing: modern automated
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To address dynamic drifts caused by environmental perturbations, both passive vibration isolation and active fringe-locking techniques are discussed. For ...Missing: modern automated alignment<|separator|>
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Lloyd's mirror interference lithography with EUV radiation from a ...
The angle of the mirror is θ from normal. The visibility of fringes decreases away from the edge owing to the optical path difference between two short pulses.
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Lloyd's mirror interference lithography below a 22-nm pitch with an ...
Feb 22, 2021 · Here, we demonstrate, for the first time, the use of a table-top, high-harmonic EUV system (KM Labs, XUUS4) to perform interference lithography ...
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Mirror-based EUV interference lithography: one step closer to the ...
Apr 30, 2023 · Combined with brilliant and coherent synchrotron light, this Lloyd's mirror-inspired device delivers single-digit HP patterning with remarkable ...
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EUV research began in the 1980s, when the U.S. semiconductor industry was trying to fend off ascendent Japanese firms amid significant government intervention ...
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Jan 15, 2020 · A two-axis Lloyd's mirrors interferometer based optical fabrication system was theoretically investigated and constructed for patterning high-uniformity ...
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Oct 4, 2021 · This Lloyd's-Mirror-setup supplies the critical learnings for the next step: expansion to a 300mm wafer interference exposure (currently under ...
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Generalized method for probing ideal initial polarization states in ...
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Lloyd's mirror experiment is applied to testing flatness of large surfaces. Because of the grazing incidence, even rough surfaces provide the characteristic ...Missing: optics | Show results with:optics
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Lloyd Interferometer Applied to Flatness Testing
### Summary of "Lloyd Interferometer Applied to Flatness Testing"
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corresponding to a linear scale of 800 pc at a distance of 730 Mpc, and the image contains about 10.7 Mpixels. The dynamic range is about 1200.
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A Lloyd's mirror technique is used with frequencies near 20, 30, 50 and 100 Mc./s. The anomalies introduced by the ionosphere at the first three frequencies are ...
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