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Entegris

Entegris, Inc. (: ENTG) is an specializing in the development, manufacture, and supply of and process solutions for the and other high-technology industries. Founded in 1966 as Fluoroware, a startup serving early manufacturers, the company merged with EMPAK in 1999 and rebranded as Entegris in 2000. Headquartered in , Entegris employs approximately 8,000 people globally and maintains manufacturing, customer service, and research facilities across the , Canada, China, , , , , , , , and . The company focuses on three primary business segments: microcontamination control, which includes products like filters, gas purification systems, and wafer shippers to protect against particle and chemical ; specialty chemicals and engineered materials, encompassing for deposition, , and processes; and advanced materials handling, featuring transport carriers, pods, and storage solutions for and other components. These offerings enable advancements in fabrication, particularly for complex device architectures and , with approximately 95% of its $3.2 billion in 2024 net sales derived from the sector. Entegris holds over 4,500 active patents and emphasizes innovation through collaboration with leading manufacturers to address challenges in yield enhancement, purity, and process efficiency. Beyond semiconductors, it serves life sciences and other high-tech fields, contributing to global technological progress with a commitment to and employee safety.

Overview

Corporate Profile

Entegris, Inc. (NASDAQ: ENTG) is a leading supplier of advanced materials, process solutions, and services for the semiconductor and other high-technology industries worldwide. The company plays a critical role in enabling advanced manufacturing by providing materials that support yield improvement and contamination control in complex production environments. Headquartered in , Entegris employs approximately 8,200 people across its global operations as of December 31, 2024. Its core business centers on yield-enhancing materials and solutions tailored for manufacturing processes in , life sciences, and other high-purity applications, helping customers achieve higher productivity and performance. Founded in 1966 and having gone public in 2000, Entegris originally evolved from Fluoroware through mergers and rebranding efforts. The company reported annual of $3.24 billion for 2024. For 2025, it achieved $2.37 billion in net sales over the first nine months, with fourth-quarter guidance of $790 million to $830 million, indicating full-year of approximately $3.16 billion to $3.20 billion.

Mission and Strategic Focus

Entegris's mission is to help its customers improve their productivity, performance, and technology by providing critical and solutions that enable higher yields in high-tech processes. This mission underscores the company's dedication to protecting product integrity through innovative materials that address and process challenges in demanding industries. The company's core values, encapsulated in its PACE framework—People, Accountability, Creativity, and Excellence—guide its operations and culture. These values emphasize people and teamwork by fostering a collaborative environment that respects diverse talents; accountability, integrity, and trust through ethical decision-making; creativity and innovation to drive novel solutions; and dedication to excellence in delivering superior outcomes. Entegris integrates sustainability into these values by prioritizing responsible supply chain practices, including reductions in emissions, water usage, and waste to minimize environmental impact. Entegris's strategic focus centers on expanding its role within the ecosystem, where it invests heavily in such as -driven chip design and advanced solutions. For instance, the company has committed $700 million to domestic R&D over several years to advance materials for applications, including 3D-NAND deposition and thermal-efficient . Additionally, Entegris maintains a strong commitment to principles, embedding , safety, and inclusion into its business strategy through targeted goals like a 42% reduction in scope 1 and 2 by 2030. Looking ahead, Entegris aims to sustain its leadership in contamination control and materials handling to meet the escalating global demand for semiconductors, fueled by advancements in and . This long-term goal aligns with broader efforts to enhance and support customer innovation in high-purity environments.

Business Operations

Global Presence

Entegris maintains a global footprint with operations spanning more than a dozen countries, encompassing manufacturing, research, and customer service facilities strategically positioned to serve its core markets in semiconductors, display technologies, and life sciences. The company's headquarters is located in Billerica, Massachusetts, United States, with key U.S. manufacturing and R&D sites in Chaska, Minnesota; Chandler, Arizona; Fremont, California; and the recently opened Colorado Springs, Colorado, facility, which enhances production capacity for advanced materials handling solutions. These U.S. hubs are deliberately sited near major semiconductor clusters, such as Silicon Valley in California and the Phoenix area in Arizona, to minimize logistics delays and support rapid innovation cycles. In Europe, Entegris operates manufacturing and customer service centers in (Dresden), (Moirans), the (Barry), and (Kiryat Gat), with the Dresden site providing proximity to Europe's prominent semiconductor ecosystem. represents a critical growth region, featuring advanced manufacturing facilities in (Kaohsiung and ), (Hwaseong), (Yonezawa), (Kulim), , and (Hangzhou and ), alongside an R&D center in (Pune). These locations, including the state-of-the-art Kaohsiung facility in Taiwan's Southern Science Park, are aligned with high-density semiconductor production areas like to facilitate just-in-time delivery and regional collaboration. Entegris supports its international customers through an extensive sales and service network that covers fabrication plants, manufacturing sites, and life sciences laboratories worldwide, ensuring localized and rapid response capabilities. To enhance amid geopolitical uncertainties as of 2025, the company has invested in diversified, localized production strategies, such as expanding facilities in and to reduce dependency on single regions and mitigate risks from trade disruptions. Approximately 8,000 employees are distributed across these global operations, with a significant concentration in and to align with market demands.

Research and Development

Entegris allocates approximately 10% of its annual revenue to efforts, enabling advancements in critical technologies. In , this investment reached $316 million against total revenue of $3.24 billion. These resources support a of over 8,000 employees, including a substantial contingent of scientists and engineers focused on and process innovation. The company's R&D initiatives prioritize the development of materials tailored for next-generation semiconductors, with particular emphasis on (EUV) , 3D architectures, and process nodes below 2nm. These efforts address key challenges in contamination control, material purity, and yield enhancement for high-volume manufacturing at advanced scales. Entegris operates multiple innovation centers worldwide, including facilities in Colorado Springs and , , which align with its global manufacturing presence, as well as plans for a new technology center in , dedicated to R&D as part of a $700 million investment announced in 2025. The company collaborates closely with industry leaders such as and on co-development projects, leveraging joint expertise to accelerate solutions for handling and purification in cutting-edge fabs. As of 2025, Entegris maintains a robust portfolio exceeding 8,000 patents globally, with more than 5,000 granted and over half active, emphasizing sustainable materials and process efficiency to reduce environmental impact in production. This portfolio underscores the company's commitment to innovative, eco-friendly technologies that enhance .

Products and Solutions

Microcontamination Control Solutions

Entegris provides a range of microcontamination solutions designed to prevent particle, molecular, and ionic contaminants from compromising high-tech manufacturing processes, particularly in fabrication. These solutions focus on maintaining ultra-pure environments by integrating advanced and purification technologies that address airborne, gaseous, liquid, and surface contaminants throughout the production lifecycle. By removing defect-causing impurities at critical points, Entegris's offerings help enhance yield and device reliability in advanced nodes below 7 nm. Filtration products form the core of Entegris's microcontamination control portfolio, including point-of-use filters and inline purifiers for gases, chemicals, and environments. For gaseous contaminants, Entegris offers gas purifiers such as the PS series (e.g., PS2, PS5, PS7), which remove impurities like H₂O, O₂, CO₂, H₂, N₂, and THC from process gases including H₂, N₂, He, Ar, Xe, and NH₃, supporting flow rates up to 1,000 Nm³/hr in corrosive chip production settings. These purifiers employ physical, chemical, and catalytic adsorption media to achieve sub-ppm purity levels, ensuring high reliability and low pressure drops in aggressive environments. For liquid chemicals, inline purifiers and point-of-use filters like the Fluorogard® FP/FP-HP series utilize durable PTFE construction to filter out particles, gels, and metals from aqueous and solvent-based fluids, minimizing extractables and enabling faster startups with superior downstream cleanliness. Ambient control systems from Entegris target airborne molecular contamination (AMC) in cleanrooms and fab environments through specialized filters and monitoring strategies. AMC filters, such as the VaporSorb™ ETC and CLR series, employ unique chemistries to capture a broad spectrum of molecular contaminants including acids, bases, organics, and dopants at lower pressure drops, protecting tools and wafers from yield-impacting haze and defects. These systems are deployed throughout the fab and at point-of-tool locations to maintain ultra-pure air, with customizable adsorbents extending filter life and optimizing cost of ownership. Monitoring is facilitated by Entegris's "See It. Control It." approach, utilizing ISO/IEC 17025-accredited labs for in-field AMC profiling and ongoing performance assessment to tailor filtration and ensure process stability. In semiconductor fabs, Entegris's solutions emphasize wafer surface protection and defect reduction by integrating these technologies across the process chain. For instance, empirical models predict metal removal efficiency in solvents, allowing bulk chemical suppliers to achieve targeted purity levels that prevent defects. Gas purifiers and filters specifically address corrosive environments in and deposition, reducing particle-induced defects and enabling 1% yield improvements that can translate to significant economic gains, such as $150 million annually for large-scale operations. These technologies integrate seamlessly with Entegris's broader product portfolio to support end-to-end prevention.

Specialty Chemicals and Materials

Entegris's Specialty Chemicals and Materials portfolio encompasses high-purity formulations essential for , including for deposition processes and solutions for applications. These chemicals, such as Advanced Deposition Materials () , enable (ALD) and (CVD) to form precise thin films in integrated circuits. For instance, UltraPur™ 4MS serves as a for low-k films in sub-0.25µm interconnects, ensuring low defectivity and high yield. Post-etch solutions like ST-22 and TitanKlean® remove residues and hard masks without damaging underlying structures, supporting advanced nodes in logic and memory devices. Entegris also supplies for emerging dry technologies, collaborating with partners like Gelest and to address () challenges. Advanced materials in this segment include chemical mechanical planarization (CMP) slurries and electronic chemicals designed to enhance surface uniformity and yield. Through the 2022 acquisition of CMC Materials for $5.7 billion, Entegris integrated a leading portfolio of CMP slurries, such as those optimized for and aluminum polishing, which achieve high removal rates with minimal defects in interconnect layers. These slurries incorporate engineered abrasives and additives for planarizing ultra-hard materials, contributing to improved device performance in high-volume production. (SiC) substrates, offered under the SUPERSiC® brand, provide high-purity, thermally stable components for and harsh-environment applications. As of 2025, Entegris emphasizes custom formulations tailored for emerging technologies, including nitride slurries for () processing and materials supporting integration. Nitride slurries enable efficient polishing of , AlGaN, and related surfaces for power and RF devices, with industry-leading removal rates and surface finishes. These advancements, integrated with microcontamination control measures, facilitate contamination-free processes critical for next-generation and wide-bandgap semiconductors.

Advanced Materials Handling

Entegris provides a range of handling solutions designed to protect wafers during transport, storage, and processing, including shippers, front opening unified pods (FOUPs), and carriers compatible with 300mm and 450mm formats. shippers, such as the Ultrapak® Series multiple shipping boxes and H22 Series single shippers, utilize springs and conical pockets to minimize wafer movement and reduce particle generation, ensuring low levels of condensable inorganics through ultrapure construction. These products support various wafer sizes, including 125mm and 100mm, with stackable designs for secure shipping. For larger wafers, Entegris offers FOUPs and carriers tailored to high-volume fabrication, including 300mm multiple application carriers (MACs) with open sidewall designs and "H" bar interfaces for enhanced compatibility. In , the company's full suite of 450mm handling products, comprising 450mm MACs, FOUPs, and wafer shippers (SWS), was selected by the Global 450mm Consortium at SUNY’s of Nanoscale and Engineering to accelerate adoption of larger wafer processes. These innovations, developed since 2007, incorporate iterated designs for thinned and stacked wafers, preserving material purity and product integrity in environments. Entegris's liquid delivery systems enable precise chemical distribution in processes through pumps, valves, and dispense tools engineered for leak-free performance and reliability. These components undergo rigorous testing to maintain process purity, enhancing fab output by supporting high-purity fluid management. Specialty containers and process vessels from Entegris, constructed from fluoropolymers such as , are optimized for handling corrosive s, providing cost certainty, installation flexibility, and facility safety. The FluoroLine® Plus dual containment tubing exemplifies these designs, reducing contamination risks in fluid networks. Overall, these handling solutions integrate features to minimize particle generation, supporting efficient operations in contamination-sensitive settings.

History

Founding and Early Years

Entegris traces its origins to Fluoroware, Inc., which was founded in 1966 in , by Victor Wallestad as a custom fabricator serving the burgeoning . The company emerged during the early days of semiconductor manufacturing, providing essential plastic components to protect sensitive materials from contamination in environments. Wallestad, recognizing the need for reliable handling solutions amid the rapid advancement of , established Fluoroware to address the challenges faced by pioneering chip producers. Fluoroware's initial products included screw-top plastic bottles for secure chemical storage and trays designed to safeguard wafers during processing and transport. These innovations, such as the first linear and wafer shipper, were critical for maintaining the integrity of semiconductors, which were increasingly vulnerable to particulate and chemical contamination as technology evolved. The company's early focus on durable, non-reactive plastics helped it supply major players like , , and Delco, enabling safer handling in the production of early microchips. A key early milestone was Fluoroware's expansion into materials, such as Teflon-based carriers, which offered superior chemical resistance essential for withstanding the harsh acids and solvents used in . This shift allowed the company to innovate beyond basic plastics, developing suspension systems that minimized contact and reduced defect risks during the rise of integrated circuits in the and . Through the pre-1999 period, Fluoroware concentrated on these foundational handling solutions, growing alongside the sector's demand for contamination control without venturing into advanced or purification technologies.

Key Mergers and Acquisitions

Entegris was formed in 1999 through the merger of Fluoroware, Inc. and EMPAK, Inc., combining Fluoroware's expertise in fluid handling and with EMPAK's specialization in and handling systems for manufacturing. This merger created a unified company focused on contamination control solutions, establishing Entegris as a key player in materials integrity management. In July 2000, Entegris completed its on under the ticker symbol ENTG, raising capital to support expansion in the semiconductor supply chain. The following year, in May 2001, Entegris acquired International for $27.5 million in cash, integrating NT's ultrahigh-purity flow and pressure sensing technologies to enhance process control capabilities. A significant expansion occurred in 2005 when Entegris merged with Mykrolis Corporation in a stock-for-stock transaction valued at approximately $1.3 billion, with Entegris shareholders receiving 1.39 shares for each Mykrolis share. This merger of equals added Mykrolis's advanced filtration and purification technologies, including gas and liquid filters, strengthening Entegris's portfolio in microcontamination control for and other high-tech industries. The combined entity relocated its headquarters to , and continued trading under the ENTG symbol. In subsequent years, Entegris pursued strategic acquisitions to broaden its electronic materials offerings. In April 2014, it acquired ATMI, Inc. for $1.15 billion in cash, incorporating ATMI's high-purity materials delivery systems and electronic chemicals to bolster capabilities in advanced processes. In June 2018, Entegris purchased the SAES Pure Gas business from SAES Getters S.p.A. for approximately $355 million, gaining leadership in molecular gas purification systems essential for ultra-clean manufacturing environments. The most transformative deal came in July , when Entegris acquired CMC Materials, Inc. in a cash-and-stock transaction with an enterprise value of $6.5 billion, including $3.8 billion in cash consideration. This acquisition integrated CMC's chemical mechanical planarization (CMP) slurries and pads, positioning Entegris as a comprehensive provider of critical materials for advanced node fabrication.

Recent Developments

In 2023 and 2024, Entegris advanced the integration of its 2021 acquisition of BASF's Precision Microchemicals business, completed in November 2021 for $90 million, which strengthened its offerings in precision cleaning chemicals and etchants for fabrication processes. In March 2024, Entegris divested its and Materials (PIM) business, acquired as part of CMC Materials, to focus on core electronic materials offerings. Additionally, in December 2024, entered a preliminary agreement under the CHIPS Act, securing funding to support the Springs facility expansion. This integration, part of the broader cumulative effect of prior mergers, enabled expanded production capabilities and enhanced material purity solutions amid rising demand for advanced nodes. also broke ground on key facilities, including expansions in and the Springs site, with the latter initiating commercial operations in 2025 to bolster domestic manufacturing resilience. To support the surge in AI-driven semiconductor applications, Entegris announced a $700 million investment in U.S.-based in August 2025, including a new technology center in focused on advanced materials for and logic chips. This initiative aligns with industry growth in AI infrastructure, where Entegris's contamination control and materials handling solutions play a critical role in yield improvement for leading-edge processes. Earlier in the period, the company ramped up investments in facilities like the Kaohsiung plant in , which entered in 2024 to meet escalating needs for AI-related wafer processing tools. Facing persistent global chip shortages and escalating US-China trade tensions, Entegris implemented adaptations through strategic reshoring and regional diversification. In May 2023, the company expressed confidence in its operations while prioritizing proximity to major fabs to mitigate geopolitical risks. By 2025, these efforts culminated in the November grand opening of the Colorado Springs Manufacturing , a $600 million facility dedicated to producing front-opening unified pods (FOUPs) used by chipmakers like and , thereby reducing reliance on overseas suppliers amid tariff threats and export restrictions. A significant 2025 milestone was the CEO transition on August 18, when Bertrand Loy retired after 13 years as and CEO, succeeded by Reeder, a board member with extensive experience in . Concurrently, Entegris advanced its sustainability agenda as a founding member of the Semiconductor Climate Consortium, committing to net-zero by 2050 through targeted reductions in Scope 1 and 2 emissions by 42% and water usage by over 50% per revenue dollar by 2030. Entegris also pursued growth in non-semiconductor sectors during this period, particularly life sciences and , where its filtration, fluid handling, and purification technologies supported production and advanced panel fabrication. In life sciences, solutions for single-use systems and compatibility drove adoption in biologics , while applications benefited from high-purity materials for OLED and LCD processes, diversifying revenue beyond core semiconductor markets.

Leadership and Governance

Executive Management

Entegris's executive management team leads the company's operations in advanced materials and process solutions for the semiconductor and high-tech industries. David Reeder serves as President and Chief Executive Officer, a position he assumed in August 2025 following his appointment to the board of directors in March 2024. With over 20 years of experience in the semiconductor sector, including roles at GlobalFoundries and as Director and President Emeritus at Applied Materials, Reeder brings expertise across integrated device manufacturers, fabless companies, foundries, systems, and component suppliers. Bertrand Loy, who retired as President and CEO in August 2025 after 13 years in the role, now holds the position of Executive Chair. Loy is recognized for driving and a robust acquisition that supported Entegris's inorganic growth in the sector. Key executives include Linda LaGorga, and since May 2023, who oversees all financial matters including operational finance, planning, analysis, treasury, and debt financing. Clint Haris serves as and President of the Advanced Purity Solutions division, focusing on microcontamination control solutions to filter and purify critical liquids for manufacturing. Bill Shaner is and President of the Advanced Materials Handling division, developing technologies to monitor, protect, transport, and deliver critical liquid chemistries and materials. The management team emphasizes cross-functional to foster and strengthen customer partnerships, as demonstrated in initiatives like projects that integrate diverse expertise for material and . This approach aligns with Entegris's recent transition to support ongoing strategic growth.

Board of Directors

The Board of Directors of Entegris, Inc. consists of eight members as of the 2025 annual meeting, with seven independent directors comprising the majority to ensure objective oversight of the company's strategic direction in the semiconductor and advanced materials sectors. This structure aligns with listing requirements for independence, promoting unbiased decision-making on key matters such as mergers, , and . Key leadership on the board includes Bertrand Loy as Executive Chair, who previously served as President and CEO from 2012 until August 2025, providing continuity in guiding the company's focus on microcontamination control and materials handling solutions. David Reeder, who assumed the roles of President and CEO in August 2025, also serves as a director. The Audit and Finance Committee is chaired by independent director Mary Puma, leveraging Reeder's prior experience in operational leadership within technology firms. Independent directors chair other critical committees, such as James F. Gentilcore, the Lead Independent Director, who oversees the Management Development and Compensation Committee to align incentives with long-term shareholder value. The board's expertise spans semiconductor industry veterans like Yvette Kanouff, with deep knowledge from roles at and ; finance specialists such as James P. Lederer, a former partner; and governance experts including Azita Saleki-Gerhardt, Ph.D., from , collectively ensuring robust strategic oversight amid evolving challenges in high-tech . Rodney Clark contributes insights from 's enterprise operations, while Mary Puma brings perspective from her CEO tenure at . Entegris demonstrates a commitment to board , with approximately 38% women (Yvette Kanouff, Mary , and Azita Saleki-Gerhardt), exceeding many industry peers and fostering inclusive perspectives on and . practices include annual shareholder engagement, reaching over 70% of the top 25 investors in through direct dialogues on strategy and compensation, resulting in high say-on-pay approval rates of 91.2%. The board also prioritizes in technology supply chains, with dedicated oversight of cybersecurity, financial controls, and via specialized committees, including a policy to deter excessive risk-taking. This framework supports the board's role in approving executive appointments to maintain alignment with Entegris's growth objectives.

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