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Decapping

Decapping, also known as decapsulation or delidding, is the process of removing the protective encapsulant—typically an epoxy molding compound—from a packaged integrated circuit (IC) to expose the internal silicon die, bond wires, and other components for detailed examination.^[1] This technique is a fundamental step in semiconductor analysis, enabling access to the device interior without excessive damage to enable subsequent inspections such as microscopy or electrical testing. Importance in Semiconductor Analysis
Decapping plays a critical role in failure analysis by allowing identification of manufacturing defects, material failures, or contamination within the IC package, which is essential for improving device reliability and yield in the semiconductor industry.^[2] It is also vital for quality control, reverse engineering to document designs, and counterfeit detection by verifying internal structures against known specifications.^[3] Performed through chemical, mechanical, or thermal methods, decapping ensures precise root cause analysis in complex electronic systems.^[4]

Introduction

Definition

Decapping, also known as decapsulation, is the process of removing the protective cover, lid, or encapsulant material from a packaged integrated circuit (IC) to expose the internal silicon die for inspection or analysis. The silicon die refers to the active semiconductor chip containing the IC's circuitry, while the packaging consists of the outer protective layers, including leads or balls for electrical connections, and the encapsulant, typically a molding compound such as epoxy resin, which seals and shields the die from environmental factors. This procedure is essential for accessing the die without compromising its structural integrity for subsequent examination.^[1]^[5]^[6] Decapping differs from delidding, which involves the targeted removal of only the top heat spreader or lid—often a metal or ceramic component in high-performance processors like CPUs—while leaving the underlying encapsulant intact. In contrast, decapping entails the full removal of the encapsulant, providing complete exposure of the die and wire bonds. This distinction is particularly relevant for hermetic packages, where delidding applies to lid removal, whereas decapping broadly encompasses both lid and polymer encapsulant elimination.^[1]^[7] The process commonly affects various IC package types, including plastic packages such as Plastic Dual In-line Packages (PDIP) and Quad Flat Packages (QFP), which use epoxy-based encapsulants; ceramic packages like Ceramic Dual In-line Packages (CERDIP) for hermetic sealing; and flip-chip packages, often integrated into Ball Grid Array (BGA) formats with underfill encapsulants for advanced interconnects. These package types represent the majority of commercial ICs requiring decapping for internal access.^[1]^[8]

Importance in Semiconductor Analysis

Decapping plays a pivotal role in semiconductor analysis by enabling direct inspection of the die and internal components, such as bond wires and transistors, to identify defects that are otherwise inaccessible through non-invasive methods.^[2] This process, which involves exposing the die by removing the encapsulant, facilitates detailed examination of wiring and potential faults, supporting advanced failure analysis and quality control efforts.^[2] Where possible, selective decapping techniques minimize damage to the die, allowing subsequent non-destructive analyses like microscopy or electrical testing.^[9] Throughout the semiconductor lifecycle, decapping contributes from design verification—where it aids in validating internal structures against specifications—to post-manufacturing quality assurance, ensuring reliability before deployment.^[10] In quality control, it serves as an initial step in destructive analysis to expose the die for root cause investigation of manufacturing defects, thereby enhancing overall process yields.^[9] For instance, companies like TechInsights utilize decapping in their proprietary services to perform in-depth device teardowns and structural analyses, providing insights into technology integration and performance.^[11] Economically, decapping reduces debugging costs by pinpointing failure root causes early, avoiding prolonged production halts and rework expenses in high-volume manufacturing.^[4] By preventing widespread product failures through proactive defect detection, it mitigates potential recalls and liability, sustaining profitability in an industry where yield improvements directly impact operational efficiency.^[12] This strategic application underscores decapping's value in advancing semiconductor research and industry practices, where timely analysis can accelerate innovation cycles.^[1]

Integrated Circuit Packaging

Types of Packaging

Integrated circuit (IC) packaging encompasses a variety of materials and structures designed to encase and protect the semiconductor die while facilitating electrical connections. The most prevalent material is epoxy resin, which dominates plastic packages due to its cost-effectiveness, adhesion properties, and ability to provide robust encapsulation.^[13] Ceramic materials are commonly used in high-reliability applications, such as aerospace and military electronics, for their superior thermal stability and hermetic sealing capabilities.^[14] Additionally, metal lids or integrated heat spreaders (IHS), often made of copper or nickel-plated copper, are employed in high-performance CPU packages to enhance heat dissipation. These materials collectively shield the internal components from environmental factors like moisture and mechanical damage. IC packages are broadly categorized by mounting style and complexity. Through-hole packages, exemplified by the dual in-line package (DIP), feature leads that insert through holes in the printed circuit board (PCB) for soldering, making them suitable for prototyping and older designs.^[15] Surface-mount packages, such as small-outline integrated circuit (SOIC) and quad flat no-lead (QFN), allow direct placement on the PCB surface, enabling higher component density and automated assembly.^[16] Advanced packages include ball grid array (BGA) configurations, which support high input/output counts via solder balls on the underside, and flip-chip assemblies that use underfill epoxy to fill gaps between the die and substrate, improving mechanical reliability and thermal performance.^[17]^[18] Internally, IC packages consist of key components that ensure structural integrity and electrical functionality. Lead frames, typically made of copper or alloy materials, provide mechanical support and serve as the primary electrical pathway from the die to external leads.^[19] Bond wires, thin connections usually composed of gold for its ductility, copper for cost savings, or aluminum for compatibility with certain processes, link the die's bond pads to the lead frame.^[20] Die attach materials, including epoxy adhesives for low-stress bonding or high-lead solders for thermal conductivity, secure the semiconductor die to the lead frame or substrate.^[21] Over time, IC packaging materials have evolved to balance performance, reliability, and environmental compliance. Earlier generations relied on ceramic packages for their durability in harsh conditions, often combined with metal cans for hermetic sealing.^[22] In contrast, contemporary designs favor lead-free epoxy molding compounds, which offer similar protective qualities while adhering to restrictions on hazardous substances like lead in solders and resins.^[23]

Role of Encapsulation

Encapsulation in integrated circuit (IC) packaging primarily provides mechanical protection against shock and vibration, safeguarding the delicate silicon die and interconnects from physical damage during handling and operation.^[16]^[13] It also offers environmental shielding by sealing out moisture, dust, and corrosive chemicals, which could otherwise degrade the internal components over time.^[24] Additionally, encapsulation contributes to thermal management by forming a stable matrix that supports heat dissipation structures, such as integrated heat spreaders (IHS), ensuring efficient heat transfer away from the die.^[25] Finally, it delivers electrical insulation, preventing short circuits and electromagnetic interference between the die and external environments.^[16] Beyond these protective roles, encapsulation preserves die integrity by preventing oxidation and corrosion of bond wires, which are highly susceptible to atmospheric exposure.^[13] It facilitates safe handling during assembly processes, reducing the risk of damage to exposed components, and enables the stacking of multiple dies in multi-chip modules by providing structural support and isolation.^[26] Despite these benefits, encapsulation introduces trade-offs, as the added material increases package bulk and manufacturing costs while enhancing overall reliability in demanding applications such as consumer electronics, automotive systems, and aerospace components.^[27] For instance, in quad flat no-lead (QFN) packages, epoxy molding compounds conform closely to the complex die geometry, offering robust protection without excessive volume.^[24]

Decapping Techniques

Chemical Decapping

Chemical decapping involves the controlled dissolution of encapsulant materials, such as epoxy resins, using acidic solutions to expose the integrated circuit die without damaging underlying components.^[28] This wet chemical etching process is particularly suited for plastic-molded packages, where the epoxy mold compound serves as the primary barrier.^[29] The primary chemicals employed are fuming nitric acid (HNO₃) at concentrations exceeding 90%, concentrated sulfuric acid (H₂SO₄) at 96-100%, or mixtures thereof, such as a 9:1 or 2:1 ratio of HNO₃ to H₂SO₄ for accelerated etching.^[28]^[29] Fuming nitric acid is commonly used for epoxy dissolution due to its oxidizing properties, while sulfuric acid or mixtures enhance the reaction rate for denser encapsulants.^[30] Etching is typically performed at elevated temperatures of 75-90°C for nitric acid-based solutions to accelerate the reaction while avoiding excessive vaporization.^[29]^[31] The process begins with preparing the package, often by milling a small trench to localize the etch and protect bond wires.^[28] The device is then heated on a hotplate to the target temperature, and 1-2 drops of the acid or mixture are applied dropwise using a pipette or automated dispenser, either manually or in a controlled chamber.^[28]^[30] The reaction is monitored visually for bubbling and discoloration, with etch times ranging from 15 minutes for small devices to several hours for thicker packages, depending on the encapsulant volume and acid strength.^[31] Once the die is exposed, the remnants are rinsed with deionized water and acetone to remove acid residues, followed by neutralization and drying with nitrogen gas.^[28] This method offers precise control over the etch depth, enabling non-destructive decapping when timed appropriately to halt before reaching the die surface.^[29] It is highly effective for epoxy-based plastic packages and can preserve delicate copper bond wires by minimizing exposure duration and using protective mixtures.^[30] However, the process is time-intensive for large or thick encapsulants, often requiring multiple applications, and generates hazardous fumes necessitating proper ventilation.^[28]

Mechanical Decapping

Mechanical decapping refers to the physical removal of encapsulant materials from integrated circuit (IC) packages using abrasive or cutting tools, providing precise control over material excision without relying on chemical agents. This method is particularly suited for packages with harder or non-reactive encapsulants, such as ceramics or those with metal lids, where chemical dissolution may be ineffective or too aggressive.^[1]^[32] Common tools for mechanical decapping include computer numerical control (CNC) milling machines for precise depth control, diamond saws for slicing through packages, and grinding apparatuses equipped with abrasives like diamond cup wheels or sandpaper for manual or semi-automated removal. In the milling process, a diamond-tipped tool removes bulk encapsulant in a pre-cavitation step, creating a pocket that stops a few microns above the die surface to avoid damage.^[32]^[33]^[34] Diamond saws are often used to score or slice along package outlines, facilitating lid separation in ceramic or metal-lidded types, while grinding employs incremental layers—typically 0.1 mm at a time—to thin the material progressively.^[1]^[32] The process begins with marking the package outlines, often guided by prior X-ray imaging to map internal structures like die and wire bonds. Material is then removed incrementally, with endpoint detection achieved through visual inspection under a microscope, X-ray verification, or advanced electronic systems monitoring position, pressure, and capacitance for sub-micron resolution. This approach preserves the die for subsequent analyses, such as flip-chip inspection, though it remains semi-destructive due to potential mechanical stress.^[32]^[1]^[33] Mechanical decapping is ideal for ceramic packages, where the lid can be pried or ground away to expose the die, and metal-lidded variants that resist chemical attack. It excels in scenarios requiring high circuit survivability, such as quality control or reverse engineering of robust encapsulants.^[32]^[34] However, challenges include the risk of die damage from tool vibration, which can fracture delicate structures, and frictional heat buildup that may oxidize bond wires if not managed with cooling. Additionally, the method is slower for thick encapsulants, often requiring 100–200 seconds per package and post-processing etches for final cleanup.^[32]^[33]^[1]

Thermal and Laser Methods

Thermal methods for decapping rely on controlled heating to soften the epoxy encapsulant, facilitating its removal through subsequent mechanical prying or flexing without the use of chemicals. Hot air guns or controlled heaters operating at temperatures between 150°C and 180°C (not exceeding 180°C for modern CPUs with indium solder) are commonly applied to localize heat on the package surface, allowing the epoxy to become pliable within minutes before gentle prying exposes the die; this approach is particularly effective for delidding central processing units (CPUs), where the softened material can be carefully separated from the integrated heat spreader. Alternatively, oven baking provides uniform heating across the package at similar temperatures, typically for 10-30 minutes, to achieve consistent softening suitable for larger or more robust encapsulants. These techniques leverage the thermoplastic properties of epoxy, which exhibit reduced viscosity and increased ductility above approximately 150°C, enabling non-destructive access to internal structures when combined with precise temperature control.^[35] Laser methods employ directed energy beams for precise ablation of the encapsulant, vaporizing material layer by layer to reveal the die without broad mechanical or chemical intervention. Carbon dioxide (CO2) lasers, emitting at a wavelength of 10.6 μm, are favored for their strong absorption by epoxy resins, enabling efficient selective removal at rates that expose the die in minutes while minimizing thermal damage to underlying silicon. Ultraviolet (UV) lasers, often operating at 355 nm, offer finer resolution for delicate packages, achieving ablation depths controlled to micrometer precision and integrating well with plasma-assisted dry etching processes for enhanced material removal. In copper-packaged devices, laser techniques are frequently combined with microwave-induced plasma (MIP) systems, where the plasma afterglow etches the softened encapsulant isotropically, preserving fine details on copper or silver wire bonds that might otherwise corrode or deform.^[36]^[37] Compared to traditional chemical approaches, thermal and laser methods provide key advantages, including reduced processing time—from hours to minutes—minimal residue that avoids post-cleaning artifacts, and greater environmental compatibility due to the absence of hazardous acids. These techniques excel in preserving sensitive internal components, such as silver bond wires, by limiting exposure to corrosive agents and enabling targeted ablation that spares the die and interconnects. MIP processes have been standardized by JEDEC (JESD22-B120, 2022) for copper-wired packages, and can be integrated with laser techniques in advanced systems.^[38]^[39]^[40] As of 2024, advancements include automated MIP systems like iMIP XL for handling complex packages and integration with plasma etching for 3D ICs.^[41] Overall, their non-contact nature supports high-precision applications in quality control and reverse engineering, though they require specialized equipment to manage heat dissipation and beam focusing.

Applications

Failure Analysis and Quality Control

Decapping is essential in failure analysis of integrated circuits, as it removes the encapsulant to expose the die and internal components for detailed examination using scanning electron microscopy (SEM), enabling the identification of defects such as cracks, voids, delamination, and contamination that may cause electrical failures.^[1] This exposure allows analysts to correlate observed anomalies with failure symptoms, such as intermittent opens or shorts, by combining SEM imaging with techniques like energy-dispersive X-ray spectroscopy (EDS) for elemental composition analysis.^[5] In one representative case involving copper wire-bonded plastic encapsulated ICs used in high-reliability applications, chemical and mechanical decapping revealed severe corrosion at the copper stitch bonds via SEM, attributed to chlorine contamination and encapsulant delamination, which led to open circuits under thermal stress.^[42] Similar corrosion issues in automotive ICs, such as aluminum bond pad degradation, have been diagnosed through decapping, highlighting vulnerabilities in harsh environments like engine controls.^[43] In quality control, decapping supports fabrication audits by providing access to internal structures for verification of manufacturing parameters, including wire bond integrity, layer alignment in multi-layer dies, transistor density uniformity, and material purity to detect impurities or inconsistencies that could compromise yield.^[44] For instance, post-mold cured packages are decapped to measure bond shear strength and inspect for defects like lifting or corrosion, ensuring compliance with production standards before full-scale deployment.^[44] This process helps identify process excursions early, reducing defect rates in semiconductor fabs.^[45] Decapping integrates seamlessly with complementary tools in failure analysis and quality control workflows; after exposing the die, cross-sectioning can reveal subsurface voids or layer misalignments through metallographic preparation and optical/SEM inspection, while electrical probing on the uncovered die enables parametric testing to confirm functionality or isolate fault sites.^[7]^[46] These steps align with industry standards for reliability testing, such as those in JEDEC JESD22 series and AEC-Q100 for automotive components, where decapping is used post-stress (e.g., temperature cycling or radiation exposure) to inspect bond integrity and assess hardness against environmental factors like radiation-induced degradation.^[47]

Reverse Engineering and Documentation

In reverse engineering of integrated circuits, decapping exposes the silicon die, which is then photographed using optical microscopes or scanning electron microscopes (SEM) to produce high-resolution die shots for initial layout analysis. These images capture the top-level structure, including transistors and metal layers, often at resolutions down to 10 nm with SEM. For multilayer analysis, delayering proceeds layer by layer, starting with mechanical polishing to planarize the passivation layer, followed by reactive ion etching (RIE) or plasma etching to remove silicon oxide dielectrics and reveal underlying metal interconnects. Subsequent wet etching selectively removes metals like aluminum, while additional polishing and etching expose diffusion regions, allowing systematic imaging of each layer to trace interconnects and reconstruct the circuit netlist through image alignment and polygon extraction techniques. Documentation of decapped dies involves creating detailed visual archives to preserve and study chip designs, particularly for historical or educational purposes. High-resolution composite images are assembled using automated stitching software that aligns multiple overlapping microscope fields into a seamless full-die view, facilitating annotation and schematic extraction. Such archives enable conceptual understanding of circuit functionality without exhaustive simulation, prioritizing key architectural features over every transistor. While decapping supports open-source hardware initiatives by allowing study and replication of legacy designs for interoperability, it is constrained by intellectual property laws that protect trade secrets and copyrights in commercial settings. Under U.S. law, reverse engineering is generally permitted under the Defend Trade Secrets Act (DTSA) as a fair means for independent creation or achieving compatibility, since it does not constitute misappropriation. However, the Digital Millennium Copyright Act (DMCA) prohibits circumvention of technological protection measures except for interoperability purposes, and direct duplication for competitive gain may violate other IP provisions.^[48]^[49] A notable example is the decapping of chips from vintage gaming consoles like the PlayStation to document 1990s silicon fabrication techniques, including custom processors that integrated graphics and audio functions. Similarly, die photography of historical processors, such as the Intel 8087 math coprocessor, has produced annotated images revealing microcode ROM structures and transistor-level implementations, contributing to archival resources on early computing hardware.

Counterfeit Detection

Decapping serves as a critical technique in verifying the authenticity of integrated circuits (ICs) by exposing the internal die and components for detailed inspection, enabling the identification of counterfeit parts that may infiltrate supply chains. This process is particularly vital in high-stakes industries where fake components can lead to catastrophic failures, as it allows analysts to compare internal features against known genuine specifications.^[50]^[51] Key detection methods post-decapping involve scrutinizing die markings for inconsistencies, such as missing or altered manufacturer logos, part numbers, or copyright dates, which are compared to those on authentic devices using optical microscopy or scanning electron microscopy (SEM).^[52]^[50] Anomalies in bond wires, including incorrect counts, material substitutions (e.g., copper instead of gold), double ball bonds, or shifting due to improper handling, are also examined to reveal repackaging from low-quality fabrication facilities.^[52]^[51] Layer inconsistencies, such as mismatched die layouts or unexpected material compositions detected via SEM with energy dispersive spectroscopy (EDS), further indicate counterfeiting processes like sanding or recycling.^[53]^[50] These inspections are often complemented by non-destructive X-ray imaging prior to decapping, which screens for initial red flags like abnormal die sizes, bond wire patterns, or delaminations, guiding whether full decapsulation is warranted.^[53] In one case study, decapping a suspect ZXRE1004 voltage regulator revealed a counterfeit die with deviant markings and layout compared to a genuine sample sourced from the manufacturer, confirming repackaging from an unauthorized fab.^[52] Such analyses play a pivotal role in sectors like aerospace and medical devices, where counterfeit ICs have caused field failures, emphasizing the need for rigorous verification to mitigate reliability risks.^[51] In the broader supply chain, decapping supports authenticity certification by specialized firms such as Nishka Research, which employs tailored chemical etching to expose dies without damage for verification.^[50] As of 2024, the Electronics Resellers Association International (ERAI) reported 1,055 suspect counterfeit parts—a 25% increase from 2023—with annual industry losses due to counterfeit electronic components estimated at approximately $250 billion.^[54]^[55]

Safety Considerations

Hazards and Precautions

Decapping integrated circuits involves significant chemical hazards, primarily from the use of concentrated acids such as nitric and sulfuric acid during etching processes. These acids can cause severe skin burns upon contact and release toxic fumes, including nitrogen oxides (NOx) like nitrogen dioxide from nitric acid reactions, which are corrosive to respiratory tissues and equipment. ^[56] ^[57] Precautions include performing all acid handling in a well-ventilated fume hood to capture fumes, using neutralization baths with bicarbonate or similar agents to treat spills or residues, and ensuring immediate rinsing of exposed skin with water followed by medical attention. ^[56] ^[1] Physical risks arise from mechanical and thermal aspects of decapping, such as sharp edges on exposed die surfaces that can cause cuts, inhalation of fine dust particles generated during grinding or milling, and thermal burns from hot air guns or laser tools used in non-chemical methods. ^[1] ^[58] To mitigate these, operators should secure components in vices to prevent slippage, employ dust extraction systems during abrasive processes, and allow sufficient cooling time after thermal exposure before handling. ^[1] Environmental concerns stem from the generation of hazardous waste, including spent acids and solvents like acetone, which pose fire risks due to their flammability and require disposal in accordance with EPA regulations for hazardous materials under 40 CFR Part 261. ^[59] ^[1] Waste must be neutralized to a pH of approximately 7, segregated from non-hazardous materials, and transported by certified handlers to avoid environmental contamination or ignition sources. ^[56] ^[60] Long-term biological and ergonomic risks include respiratory issues from repeated vapor exposure and musculoskeletal strain from repetitive handling, necessitating mandatory personal protective equipment (PPE) such as nitrile gloves, face shields, respirators with appropriate filters (e.g., A1B1E1 for acids), and lab aprons. ^[56] ^[57] Regular training, breaks to reduce exposure, and availability of spill kits further enhance safety by promoting adherence to these protocols. ^[1]

Equipment and Best Practices

Decapping integrated circuits requires specialized equipment tailored to chemical, mechanical, thermal, or laser-based methods to ensure precise removal of encapsulant materials while minimizing damage to internal structures such as bond wires and die pads. For chemical decapping, essential tools include glass beakers for acid containment, hot plates for heating etchants to controlled temperatures (typically 80–100°C), and automated jet etch systems that spray nitric or sulfuric acid under pressure for uniform exposure.^[61] These systems, such as those from RKD Engineering, accommodate various package sizes and reduce manual handling risks.^[62] Mechanical decapping relies on precision milling tools, including 5-axis CNC mills equipped with diamond blades or polishing wheels to grind away epoxy layers incrementally. The X-Prep system from Allied High Tech exemplifies this, offering automated control for cross-sectioning and polishing to expose die features without excessive heat generation.^[63] For laser-based thermal methods, ablation systems like the FALIT from Control Laser Corporation use diode-pumped infrared lasers (e.g., 14W sealed modules) to vaporize organic encapsulants selectively, preserving underlying metallization.^[64] General supporting equipment encompasses stereomicroscopes for real-time inspection, X-ray imaging systems for pre-decapping structural assessment, and fume extraction hoods to manage residues across all methods.^[32] Best practices emphasize a structured workflow to optimize outcomes, beginning with non-destructive evaluations like X-ray or acoustic microscopy to map internal features before proceeding to decapping, thereby avoiding unnecessary damage.^[61] Process parameters—such as acid concentration, etch duration (often ≤60 seconds for jet systems), temperature, and milling depth—must be documented meticulously to enable reproducibility and post-analysis correlation. Endpoint verification involves visual confirmation under magnification to ensure complete encapsulant removal without over-etching bond wires, supplemented by electrical continuity tests where device functionality is critical.^[61] For copper-wire packages, microwave-induced plasma (MIP) systems from JIACO Instruments provide a safe alternative, using atmospheric plasma to etch epoxy without chemical artifacts or wire corrosion, as validated in failure analysis protocols.^[65] Operators should undergo training in accredited semiconductor labs adhering to JEDEC reliability standards (e.g., JESD47 for stress testing integration), including certification for hazardous material handling to maintain procedural integrity. Tool maintenance routines, such as regular cleaning of milling bits and plasma chambers to prevent cross-contamination, are essential for consistent results and equipment longevity.^[61]

History

Early Methods

The origins of decapping techniques trace back to the 1960s and 1970s, when semiconductor laboratories began developing rudimentary methods for failure analysis of early integrated circuits (ICs). In semiconductor labs, basic exposure of IC dies was achieved through manual prying for metal can packages, such as TO-5 and TO-18 types, using tools like pliers or semiconductor-grade tweezers to separate lids without initially damaging leads for retesting.^[66] For plastic packages, simple chemical dips employing boiling sulfuric acid or fuming nitric acid were used to dissolve encapsulants, though these risked etching passivation layers and dielectrics if not precisely controlled.^[66] Ceramic dual-in-line packages (DIPs), common in early military and aerospace applications, were addressed via mechanical sawing with low-speed diamond saws like the Buehler-Isomet, often preceded by thinning the lid through grinding to access the die while minimizing structural damage.^[66] These methods emerged amid growing IC complexity, as documented in early guides like the RADC Reliability Physics Notebook (1967) and NASA's "Failure Analysis of Monolithic Microcircuits" (1969), prioritizing reliability assessments for emerging technologies.^[66] By the 1980s and 1990s, decapping evolved to handle the rise of epoxy-molded packages, particularly in military and aerospace sectors where plastic encapsulation gained traction for cost-effective reliability. Hot fuming nitric acid baths, heated to 75-80°C, became a standard for dissolving phenolic epoxy mold compounds, often combined with sulfuric acid mixtures to accelerate removal while protecting aluminum bond wires.^[67] This approach was pioneered in defense applications, as evidenced by U.S. Air Force and Naval Aviation evaluations of plastic encapsulated microcircuits (PEMs), where fuming nitric acid completed decapsulation after initial plasma etching for novolac-based epoxies.^[68] Among hobbyists and informal reverse-engineering efforts, brute-force thermal methods like propane torching were employed to char and crack epoxy, allowing manual extraction of the die, though these were highly imprecise and secondary to professional lab techniques.^[57] Key milestones included the refinement of acid-based protocols in MIL-STD-883 standards (updated 1977 and beyond) for internal visual inspection.^[66] Controlled thermal decapping methods, such as oven-based heating, began appearing in lab and hobbyist settings around the late 2000s and 2010s. Early decapping methods were inherently destructive, frequently severing or corroding delicate bond wires and precluding non-invasive reassembly, which limited their use to lot sampling rather than individual device preservation.^[66] These limitations stemmed from the era's focus on basic failure modes like electrical overstress and metallization defects, driven by demands in space technology for radiation hardness verification, where exposing dies enabled post-irradiation microscopy despite the risks.^[66] Techniques like acid dips and sawing, while effective for ceramic packages in radiation testing contexts, often required subsequent polishing to reveal defects smaller than 25 µm, underscoring the trade-offs in precision versus accessibility during this period.^[66]

Modern Developments

In the 2010s, decapping techniques advanced significantly to address challenges posed by the shift to copper and silver wire bonding in semiconductor packaging, which required methods that minimized damage to delicate structures. Laser ablation emerged as a key innovation, using focused laser beams to precisely remove epoxy mold compounds without the corrosive effects of traditional acids, particularly effective for exposing copper wires while preserving bond pads and passivation layers.^[36] This method was highlighted in 2010 research on plasma and laser-based decapsulation for copper-bonded devices, enabling reliable failure analysis by avoiding over-etching.^[69] Similarly, Comco's MicroBlasting systems offered a non-chemical abrasive approach for controlled material removal in integrated circuit decapping.^[70] A pivotal development in 2016 was the introduction of Microwave Induced Plasma (MIP) etching by JIACO Instruments, a dry process that uses atmospheric plasma to selectively etch mold compounds while safeguarding copper and silver wires, bond pads, and die surfaces.^[65] This eco-friendly alternative eliminated the need for hazardous fuming acids, reducing environmental impact and improving safety in failure analysis workflows. MIP proved particularly valuable for high-Tg epoxy packages and multi-tier copper devices, as demonstrated in subsequent studies on thermally stressed components.^[71] The 2020s have seen further integration of these techniques in response to escalating counterfeit semiconductor issues stemming from global supply chain disruptions, including the 2020-2022 chip shortage and ongoing geopolitical tensions as of 2025, where decapping plays a crucial role in verifying die authenticity and detecting tampering.^[72] Commercial services like those from TechInsights have scaled physical analysis, including decapping for reverse engineering over 100,000 chips annually to support competitive intelligence and quality control.^[73] Independent contributors, such as Ken Shirriff, have advanced die photography through meticulous decapping of vintage and modern chips, enabling high-resolution documentation that informs semiconductor history and design evolution.^[74] Recent trends as of 2025 include enhanced automation in plasma systems and integration of AI for post-decapping defect analysis in high-volume quality control.^[75] Looking ahead, ongoing innovations emphasize automation and less invasive methods, such as enhanced plasma systems for high-volume quality control and exploratory optical imaging to complement or reduce reliance on full decapsulation in counterfeit detection.^[76]

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[PDF] Laboratory 1: Dissection of Electronic Packaging
As shown in Figure 1, the first level package consists of the following 5 main components: lead frame, die, die attach, wire bond, and encapsulant. The lead ...
[25]
Wire Bonding Process in Semiconductor Packaging - Viasion
Rating 5.0 (4) Dec 17, 2024 · Bonding Wire: The wire materials used in wire bonding processes are typically copper, gold, and aluminum. Each material type has specific ...
[26]
Die Bonding/ Die Attach - AmTECH Microelectronics
Die bonding is the process of attaching a semiconductor die (IC chip) to a substrate or package. Common techniques include epoxy, eutectic, and silver sintering ...<|control11|><|separator|>
[27]
The Ultimate Guide to Semiconductor Packaging - AnySilicon
Typical materials of choice are epoxy resins (for better adhesion), polyimides (better thermal stability) or silicones (better mechanical stability). Figure 2: ...
[28]
Epoxy Molding Compounds for Semiconductors | Chemical Products
In order to support our customers to achieve lead-free packaging technology and highly reliable performance in high-temperature applications, we have ...
[29]
https://www.semitracks.com/newsletters/august/2015-august-newsletter.pdf
[30]
Making IC Encapsulation Meshing Faster & More Reliable - Moldex3D
Aug 22, 2022 · In this process, an integrated circuit is encapsulated with epoxy material to protect it and dissipate heat. With chip size getting smaller ...Why Is Cae Required In... · Challenges In Cae... · Pre-Processing Solution With...
[31]
A 101 Guide to the Integrated Circuit Packaging Process - Thomasnet
Jan 27, 2019 · Bonding. The bonding process entails electrically connecting a semiconductor die to the lead frame. This is usually done by thermosonically ...Missing: attach | Show results with:attach
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Ultimate Guide to IC Package Types: Find the Right Fit
Jul 28, 2025 · Explore all IC package types including BGA, QFP, 3D IC and more. Learn how to choose the best chip package for your system's size, speed, ...
[33]
[PDF] DECAPSULATION OF PLASTIC ENCAPSULATED ... - escies
Dec 2, 2014 · The following chemicals are required: • HNO3 : (fuming nitric acid), 100% or red fuming nitric acid > 90%. • H2SO4 : (sulphuric acid), 100%.Missing: integrated | Show results with:integrated
[34]
[PDF] Substrate Materials - Semitracks
Aug 2, 2015 · 98% Fuming Nitric Acid (HNO3) produces a faster etch rate, with much less metal damage. It can also be used over a wider temperature range.
[35]
[PDF] Experiences with Decapsulation of Copper Bond Wire ... - NASA NEPP
Jun 13, 2016 · Using a mixture of 1:1 Fuming. Nitric and Sulfuric Acids, drop acid onto die heated to 130C on a hot plate for about 1 minute. Let acid etch for ...
[36]
[PDF] arXiv:2109.11473v1 [physics.ins-det] 23 Sep 2021
Sep 23, 2021 · removed the die from its packaging by placing the IC in. 90% fuming nitric acid at 90 °C for 15 minutes. We then rinsed the fully-exposed die ...
[37]
Decapsulation - ULTRA TEC Manufacturing, Inc.
MECHANICAL DECAPSULATION Precision Milling and Grinding methods provide the most accurate means of removing electronic packaging materials with the highest ...
[38]
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### Summary of Mechanical Decapping Process, Tools, Suitability, and Challenges for IC Packages
[39]
[PDF] Decapsulation & Delidding of Electronic Packages Using the ...
Decapsulation or delidding is applied in order to gain access to a die or component in most cases encapsu- lated with a polymer. The die is then accessible so ...Missing: integrated | Show results with:integrated
[40]
Important information about delidding Intel 1851 CPUs
Nov 6, 2024 · The safest and recommended method for heating the CPU for delidding is the Intel 1851 Delid-Die-Mate Heater V1, specifically designed for this purpose.
[41]
[PDF] Laser Decapsulation - Semitracks
Sep 2, 2013 · One can remove mold compound epoxies with pulsed CO2 sys- tems that operate a 10.6µm wavelengths. This wavelength is an in- frared energy ...
[42]
(PDF) Microwave induced plasma decapsulation of stressed and ...
Aug 9, 2025 · The applicability of Microwave Induced Plasma (MIP) afterglow etching in copper wire bonded IC package decapsulation is investigated.
[43]
Laser-assisted decapsulation of plastic-encapsulated devices
Aug 10, 2025 · In failure analysis and quality control processes, integrated circuit (IC) packages are decapsulated in order to gain direct physical access ...Missing: assurance | Show results with:assurance
[44]
Microwave induced plasma decapsulation of stressed and ...
The applicability of Microwave Induced Plasma (MIP) afterglow etching in copper wire bonded IC package decapsulation is investigated. In-situ monitoring of ...
[45]
Plasma IC Decapsulation (MIP) - JIACO Instruments
Microwave Induced Plasma (MIP) has been recognized by JEDEC as a decapsulation technique suitable for preservation of integrity of copper and silver wires.
[46]
Applications of SEM in Semiconductor Device Failure Analysis
SEM can be used to identify failure modes including cracks, delamination, or contamination. Since the escape depth of secondary electrons is close to the ...Missing: decapping IC
[47]
[PDF] A Case Study of the Reliability of Copper Bond Wires In Plastic ...
The following case study examines copper wire bond corrosion at the lead frame, which resulted in the electrical failure of the end product in the field, and ...Missing: automotive decapping
[48]
Aluminum bond pad corrosion of wirebond packages - Allen Press
Oct 1, 2016 · Corrosion of aluminum bond pads in wirebonded packages can lead to device reliability issues under the harsh conditions in automotive applications.
[49]
Acid Decapsulation of Epoxy Molded IC Packages With Copper Wire ...
Aug 7, 2025 · A jet etching technique with fuming nitric acid (HNO 3 ) and sulfuric acid (H 2 SO 4 ) dissolves the encapsulant on the package, leaving the die ...
[50]
Chip Decap Machine in the Real World: 5 Uses You'll Actually See ...
Oct 14, 2025 · Failure analysis is vital for identifying defects in semiconductor devices. Decap machines enable engineers to expose internal structures ...
[51]
Understanding cross-sectioning - Foresite, Inc.
Jun 1, 2018 · Cross-sectioning is a common reliability test method used to expose inner details of circuit boards normally hidden to the eye.How It Works · Pcb Testing · Pcba Testing
[52]
[PDF] AEC-Q100 - Automotive Electronics Council
Aug 11, 2023 · JEDEC JESD22 Reliability Test Methods for Packaged Devices. UL-STD-94 ... Figure A7.1: Flow Chart 1 – Reliability Test Criteria for New Component ...
[53]
Integrated Circuit Decapsulation | Nishka Research
Whether it's failure analysis, counterfeit detection, or extracting masked ROM data, our decapsulation methods are tailored for precision, safety, and ...Missing: mechanical | Show results with:mechanical
[54]
[PDF] Post Decapsulation Internal Visual Inspection - ERAI
Erik has published work with SMTA, ERAI and ISTFA regarding decapsulation as a method of counterfeit detection. Workshop Title. Post Decapsulation Internal ...<|control11|><|separator|>
[55]
[PDF] METHODS USED IN THE DETECTION OF COUNTERFEIT ...
In this paper I will discuss the different methods and equipment used to detect counterfeit electronic parts, specifically integrated circuits as well as ...
[56]
[PDF] Advanced Physical Inspection Methods for Counterfeit IC Detection
4-Dimensional Scanning Electron Microscopy (SEM) SEMs are extensively used in counterfeit detection as a defect characterization tool. SEM micrographs have ...
[57]
[PDF] Counterfeit Electronic Components -- An Overview
From five to twenty percent of electronic components in distributors' supply chains are probably counterfeit. Counterfeits cost industry up to $100B per year.
[58]
(PDF) Counterfeit Integrated Circuits: A Rising Threat in the Global ...
Aug 5, 2025 · Counterfeit ICs pose serious challenges to global supply chains, particularly for the defense, automotive, and aerospace industries.
[59]
Don't Try This at Home: Decapping ICs With Boiling Acid.
Jun 24, 2016 · Nitric acid is an oxidiser so there is a risk of fire or explosion - no naked flames. It is your responsibility to make sure that all safety ...
[60]
IC Decapping: The Process - Experimental Engineering
Feb 20, 2016 · The method I use is heat based, using a Propane torch to destroy the epoxy package, without damaging the Silicon die too much.Missing: softening oven<|separator|>
[61]
Laser Fault Injection for the Masses, Part 3 | by Janne Taponen
Sep 19, 2024 · The primary advantage of thermal decapping is that it avoids direct chemical exposure or mechanical abrasion, both of which carry risks of ...
[62]
Regulations for Hazardous Waste Generated at Academic ...
Dec 26, 2024 · Requiring hazardous waste to be removed from the laboratory every twelve months. Allowing eligible academic entities the flexibility to decide ...
[63]
Frequent Questions About Managing Hazardous Waste at Academic ...
Feb 27, 2025 · The eligible academic entity must count and report routinely generated laboratory hazardous waste (e.g. spent solvents, spend acids/bases) just ...
[64]
[PDF] Decapsulation Overview - Semitracks
Jan 2, 2014 · Jet Etch decapsulation is normally the preferred method for decapping plastic packaged parts. ... Participants learn the fundamental manufacturing ...
[65]
RKD Engineering: Jet Etcher Acid Decapsulator
Our automated IC decapsulation systems allow an individual to safely open a wide range of packaged semiconductor devices. We offer the most reliable failure ...Missing: CNC diamond
[66]
X-Prep® Precision Milling/Polishing System
The X-Prep is a specialized 5-axis CNC-based milling/grinding/polishing machine designed to support electrical and physical failure analysis techniques.Missing: decapping ICs
[67]
FALIT® - Control Laser Corp Since 1965
In 2004, CLC launched the FALIT, offering EMC, gel decap, cross-section, ECO non-destructive decap, and delayering features.
[68]
MIP Decapsulation of Cu and Ag wire IC packages
The JIACO Instruments Microwave Induced Plasma (MIP) decapsulation system allows one to access the area of interest during failure analysis protocol easily.<|control11|><|separator|>
[69]
[PDF] Microelectronics Failure Analysis Techniques. A Procedural Guide
Nov 1, 2024 · This guide provides a collection of useful failure analysis techniques, with technical discussions and samples for use in the semiconductor ...
[70]
[PDF] Failure Analysis Techniques for the Evaluation of Electrical ... - DTIC
The removal of certain types of epoxy relies on a sulfuric acid/sodium dichromate mixture. Molding compounds can be removed with nitric and sulfuric acid ...<|separator|>
[71]
[PDF] Commercial Plastic Encapsulation Microcircuits for Naval Aviation ...
In some parts, a chemical rinse using fuming nitric acid was done to complete the process. Of 92 parts evaluated, 8 parts were rejected following. MIL-STD ...
[72]
Low Temperature Plasma Decapsulation of Copper-Wire-Bonded ...
Nov 1, 2010 · Thicker copper wires (over 2 mils) can be safely decapsulated using a ratio mixture of fuming acids. Some surface etching of the copper will ...
[73]
Decapping Integrated Circuits - Comco Inc.
Dec 18, 2021 · When using MicroBlasting, decapping an integrated circuit is safer, easier and more environmentally friendly than other methods.
[74]
Microwave Induced Plasma decapsulation of thermally stressed ...
This work investigates the difficulties when exposing Cu/Al ball bonds in high-density copper wire packages after thermal stress testing, and proposes an ...
[75]
[PDF] DEFENSE INDUSTRIAL BASE ASSESSMENT: COUNTERFEIT ...
assessments of the U.S. integrated circuit industry, the U.S. space industry, the U.S. machine tool ... advanced testing equipment, such as decapping or x-ray ...
[76]
TechInsights Inc. - The Semiconductor Information Platform
TechInsights helps Product Manufacturers navigate semiconductor market shifts with data-driven insights for smarter supply chain and design decisions.About Us · TechInsights · Contact TechInsights · TechInsights' Accessibility PlanMissing: decapping | Show results with:decapping
[77]
Ken Shirriff Chats About A Whole World Of Chip Decapping
Oct 11, 2018 · Ken uses a method of stitching together multiple photos from his microscope using the Hugin software package. It's the secret to die shots where ...Missing: photography | Show results with:photography
[78]
MIP Applications for IC Decapsulation of Cu and Ag wire IC packages
Benefits of using a CF4-Free Microwave Induced Plasma (MIP) Spot Etch Process to Remove Underfill and Analyze 2.5D Modules