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Nanoimprint lithography

Nanoimprint lithography (NIL) is a mechanical nanopatterning technique that replicates nanoscale features by pressing a rigid mold or stamp into a deformable resist material on a substrate, followed by curing the resist via thermal or ultraviolet (UV) exposure to solidify the pattern, enabling the fabrication of structures with resolutions below 10 nm. Invented in 1995 by Stephen Y. Chou and colleagues at Princeton University, NIL was developed as a high-throughput, low-cost alternative to photolithography, overcoming limitations such as diffraction in optical systems by relying on direct mechanical deformation rather than light exposure. The technique's foundational demonstration achieved 25 nm resolution with smooth sidewalls, marking a significant advancement in sub-100 nm patterning for nanodevice fabrication. NIL encompasses several variants, including thermal NIL, which heats a thermoplastic resist above its glass transition temperature for imprinting before cooling, and UV-NIL, which uses a UV-curable liquid resist for room-temperature processing and higher throughput.^[1] Additional methods like soft NIL employ flexible stamps such as polydimethylsiloxane (PDMS) to reduce defects on non-planar surfaces, while roll-to-roll NIL facilitates continuous, large-area production suitable for industrial scales.^[1] These approaches achieve resolutions as fine as 5 nm in hard molds made from silicon or quartz, surpassing many conventional lithography techniques in precision and uniformity.^[1] Key advantages of NIL include its cost-effectiveness due to minimal material waste, simple equipment requirements, and ability to produce three-dimensional structures in a single step, making it ideal for applications in electronics, photonics, and biotechnology.^[1] It has been applied to fabricate memristor crossbars with 17 nm features, high-efficiency LEDs, surface-enhanced Raman scattering (SERS) substrates, and advanced optical components like polarizers.^[1] Despite challenges such as overlay alignment errors, defect formation from stamp imperfections, and limitations on uneven substrates, recent developments as of 2025 continue to focus on improving defect reduction, overlay accuracy, and integration with semiconductor back-end processes for memory and logic devices. Notably, Canon delivered the FPA-1200NZ2C NIL system in 2024, enabling 14 nm patterning for high-volume production.^[2] Compared to extreme ultraviolet (EUV) lithography, NIL offers lower operational costs and higher throughput for certain non-critical layers, positioning it as a complementary technology in next-generation manufacturing.^[2]

Introduction

Definition and principles

Nanoimprint lithography (NIL) is a mechanical patterning technique used to fabricate nanoscale structures by pressing a rigid mold, featuring nanoscale topography, into a thin resist layer applied to a substrate, thereby replicating the mold's pattern through physical deformation of the resist. This process enables high-resolution patterning, with demonstrated feature sizes below 10 nm, surpassing limitations imposed by light diffraction or electron beam scattering in traditional lithographic methods.^[3] The fundamental principles of NIL rely on the controlled deformation of a viscoelastic resist material, which is compressed between the mold and substrate to create regions of varying thickness that define the desired pattern. In thermal NIL, heat softens the thermoplastic resist, allowing it to flow under pressure and fill the mold cavities, while in photo-NIL variants, ultraviolet light cures a liquid resist to solidify the imprinted structure without requiring elevated temperatures. After deformation, the mold is separated (demolded), leaving a patterned resist with a thin residual layer beneath the protrusions, which is subsequently removed via anisotropic etching (e.g., reactive ion etching) to transfer the pattern fully to the substrate or underlying layers. The imprint cycle generally comprises three stages: resist coating via spin-coating or dispensing to achieve uniform thin films (typically 50-500 nm thick); imprinting under applied force to ensure complete mold filling; and demolding, often aided by mold treatments to prevent resist adhesion.^[4] Critical parameters influencing NIL performance include the aspect ratio of patterned features, which can exceed 10:1 for high-fidelity replication; imprint pressure, ranging from 1 to 100 bar to balance complete filling and avoid defects like cracking; and, for thermoplastic processes, temperature set 70-90°C above the resist's glass transition temperature (T_g) to optimize flow. Resolution limits are dictated primarily by the mold's structural fidelity and resist properties, with early demonstrations achieving 25 nm features and subsequent refinements enabling sub-10 nm patterns. The underlying physics exploits the viscoelastic behavior of resists, where heating reduces viscosity and Young's modulus, enabling viscous flow during imprinting while elastic recovery post-demolding preserves pattern integrity without significant distortion.^[4]

Comparison to other lithography techniques

Nanoimprint lithography (NIL) differs fundamentally from other nanolithography techniques by employing mechanical deformation of a resist material using a physical mold, rather than relying on optical, electronic, or proximal probes. Traditional photolithography, the industry standard for semiconductor manufacturing, uses ultraviolet light (typically 193 nm deep UV) to project patterns through masks, but is diffraction-limited to resolutions around 20-45 nm with immersion techniques, requiring complex optics and cleanroom environments.^[5] Electron-beam lithography (EBL) achieves sub-10 nm resolution by scanning a focused electron beam serially across the substrate, making it ideal for prototyping but prohibitively slow for large areas. Extreme ultraviolet lithography (EUV) employs 13.5 nm wavelengths to enable sub-10 nm features (e.g., 5-7 nm nodes), yet demands expensive vacuum systems and high-power sources, with costs exceeding $150 million per tool. Scanning probe lithography, such as dip-pen or atomic force microscopy-based methods, offers high precision down to 4-10 nm via direct tip-substrate interaction but operates sequentially, limiting it to small-scale applications.^[6]^[7] NIL provides key advantages over these methods, achieving sub-10 nm resolution (as low as 2-3 nm in demonstrations) without wavelength constraints, as patterning relies on mold geometry rather than radiation. Its parallel processing enables high throughput, comparable to photolithography (e.g., up to 90 wafers per hour for certain tools), while avoiding the need for intricate optics or vacuum chambers, resulting in lower cost per feature—potentially 10 times less than EUV for high-volume production. This makes NIL particularly suitable for replicating uniform patterns over large areas, such as in displays or data storage, where EBL's serial nature would be inefficient.^[5]^[6]^[8] However, NIL's requirement for direct physical contact between the mold and substrate introduces risks of defects, contamination, or mold wear, contrasting with non-contact approaches like EUV or photolithography that minimize such issues through projection or scanning in controlled environments. While NIL's throughput surpasses EBL's slow serial writing, it may lag behind fully optimized EUV systems in overlay accuracy for complex, multi-layer semiconductor devices, necessitating advances in mold fabrication and alignment.^[5]^[6]

Technique	Resolution	Cost	Throughput	Scalability
Nanoimprint Lithography (NIL)	Sub-10 nm (down to 2-3 nm)	Low (simple tools, no vacuum)	High (parallel, wafer-scale)	High (up to 8-inch wafers, roll-to-roll potential)
Photolithography	~20-45 nm (diffraction-limited)	Moderate to high (optics and masks)	High (parallel exposure)	High (industry standard for mass production)
Electron-Beam Lithography (EBL)	Sub-10 nm (~1 nm atomic-scale)	High (serial process, vacuum)	Low (serial scanning)	Low (small areas, prototyping)
Extreme UV Lithography (EUV)	Sub-10 nm (5-7 nm nodes)	Very high ($150M+ systems)	Moderate to high (improving)	High (wafer-scale, but infrastructure-heavy)

History

Invention and early developments

Nanoimprint lithography was invented in 1995 by Stephen Y. Chou and his colleagues, Peter R. Krauss and Preston J. Renstrom, at the NanoStructure Laboratory in the Department of Electrical Engineering, University of Minnesota.^[4] The technique emerged as a mechanical approach to pattern transfer, aiming to bypass the diffraction limits inherent in conventional optical lithography, which restricted feature sizes to around 100 nm or larger at the time.^[9] This innovation was motivated by the need for a high-throughput, low-cost method to fabricate nanoscale structures for electronics and other nanodevices, potentially enabling resolutions below 10 nm without relying on complex optical systems.^[4] The first demonstration involved hot embossing a mold into a thermoplastic resist to create high-resolution patterns. In their initial experiments, Chou's team used polymethyl methacrylate (PMMA) as the resist material, spin-coated to a thin film on a silicon substrate and heated above its glass transition temperature to facilitate molding.^[9] They achieved imprinting of sub-25 nm vias and trenches with depths up to 100 nm and aspect ratios greater than 4, demonstrating the technique's capability for precise nanoscale replication.^[9] These patterns were subsequently transferred using anisotropic etching or lift-off processes to form metal nanostructures, such as 25 nm diameter dots with 100 nm periods.^[4] Molds for these early imprints were fabricated from silicon using electron-beam lithography to define features as small as 25 nm, followed by reactive ion etching to create the relief structures.^[9] A key foundational challenge addressed was demolding the patterned resist without fracture or distortion, which was mitigated by optimizing the imprint pressure, temperature, and cooling process to ensure clean separation while preserving the high-fidelity transfer of mold topography.^[4] These efforts laid the groundwork for nanoimprint as a viable alternative to electron-beam or photolithographic patterning at the nanoscale.^[9]

Key milestones and commercialization

In 1999, Stephen Y. Chou and his team at Princeton University introduced ultraviolet nanoimprint lithography (UV-NIL), a variant that addressed limitations of thermal NIL by using UV-curable resists for room-temperature processing and improved pattern fidelity.^[10] This advancement enabled higher throughput and compatibility with sensitive substrates, marking a pivotal shift toward practical implementation. During the 2000s, researchers at the University of Texas at Austin, including C. Grant Willson, developed step-and-flash imprint lithography (S-FIL), a low-pressure, room-temperature technique using inkjet-dispensed monomers and quartz templates for sub-100 nm features with overlay accuracy below 20 nm.^[11] In the 2010s, efforts focused on enhancing template durability, with innovations like diamond-like carbon coatings achieving over 1,000 imprints without degradation, crucial for high-volume production.^[12] Key contributors to NIL's evolution include companies such as Molecular Imprints Inc. (MII), which commercialized S-FIL tools, and was acquired by Canon in 2014 to accelerate semiconductor applications.^[13] Obducat AB advanced soft UV-NIL systems with intermediate polymer stamps for large-area patterning, while EV Group developed versatile platforms like the HERCULES NIL stepper for research-to-production transitions.^[14] Academically, the National Institute of Standards and Technology (NIST) demonstrated direct NIL patterning of ultralow-k dielectrics for interconnects, quantifying fidelity at sub-10 nm scales, and IMEC contributed to process integration for 3D architectures through collaborative pilots.^[15] Commercialization began with the first tools in the early 2000s from firms like Nanonex and Obducat, enabling lab-to-pilot-scale fabrication for photonics and biotech.^[16] Canon's FPA-1200NZ2C NIL stepper, introduced in 2019, supports 10 nm nodes with 14 nm resolution and 80 wafers per hour throughput, reducing energy use by up to 90% compared to EUV.^[17] From 2023 to 2025, Canon deployed semiconductor-grade systems in pilots, including Kioxia's Yokkaichi plant for 3D NAND memory and emerging logic chip trials, achieving defect densities below 1 cm⁻².^[18] By 2025, NIL's intellectual property landscape includes tens of thousands of patents worldwide, covering template designs and resists, while SEMI's International Nanoimprint Lithography Task Force established standards for template form factors and test structures to ensure interoperability.^[19]^[20]

Core Processes

Thermoplastic nanoimprint lithography

Thermoplastic nanoimprint lithography (T-NIL), the foundational variant of nanoimprint lithography, relies on thermal deformation of a thermoplastic resist to replicate nanoscale patterns from a mold through the application of heat and pressure. Introduced in 1995, this process enables high-resolution patterning by exploiting the viscoelastic properties of polymers above their glass transition temperature, allowing direct mechanical transfer of features without reliance on photon-based exposure.^[21] The process commences with the deposition of a thin thermoplastic resist layer, typically via spin-coating, onto a substrate such as silicon. Common resists include polymethyl methacrylate (PMMA) or polycarbonate, chosen for their thermal stability and low viscosity in the molten state. The coated substrate is heated to a temperature above the glass transition temperature (Tg) of the resist—around 105°C for PMMA (with imprinting typically at 130–180°C)—to render it sufficiently fluid. A rigid mold bearing the nanoscale topography, fabricated from materials like quartz for optical transparency or electroplated nickel for mechanical durability and replication fidelity, is then pressed into the softened resist at pressures ranging from 1 to 10 MPa. This imprinting step allows the resist to conform to the mold cavities, forming the desired patterns while leaving a thin residual layer beneath the mold protrusions. Upon completion, the system cools below Tg to harden the resist, the mold is separated (demolded), and the residual layer is removed through anisotropic etching, such as oxygen reactive ion etching, to expose the underlying substrate for subsequent processing.^[21] T-NIL provides high-fidelity replication of dense, sub-10 nm patterns, achieving resolutions limited primarily by the mold quality rather than physical diffraction constraints, making it suitable for creating uniform, high-aspect-ratio structures over large areas. The imprint dynamics follow a viscous flow model, where the time required for pattern filling is approximated by

t = \frac{h^2}{D} \ln\left(\frac{h}{h_r}\right)

with h as the initial resist thickness, h_r the target residual thickness, and D an effective diffusion coefficient inversely related to the polymer viscosity. Despite its precision, T-NIL faces challenges from thermal expansion mismatches between the mold and substrate materials, which can induce pattern distortions or stresses during heating and cooling. Additionally, the cycle time, often spanning several minutes per imprint due to the thermal ramping phases, limits throughput compared to room-temperature alternatives.

Photo-nanoimprint lithography

Photo-nanoimprint lithography (photo-NIL), also referred to as UV-nanoimprint lithography (UV-NIL), represents a low-temperature variant of nanoimprint lithography that employs ultraviolet light to cure a photopolymer resist, enabling patterning without the thermal deformation associated with thermoplastic processes. Developed as an advancement over early thermal methods, photo-NIL facilitates high-resolution replication at ambient conditions, making it suitable for sensitive substrates and high-throughput applications.^[22]^[23] The process initiates with the deposition of a liquid UV-curable resist onto the substrate, commonly achieved through spin-coating or precise dispensing to form a thin, uniform layer. A transparent mold is then pressed into the resist at room temperature under controlled pressure, typically ranging from 0.1 to 1 MPa, to conform the pattern into the fluid material. UV exposure follows, using wavelengths such as 365 nm and energy doses of 10-100 mJ/cm² to trigger polymerization and solidify the resist within seconds. Demolding completes the imprint, yielding a patterned layer that can be further processed, such as by etching the residual resist thickness.^[10]^[24] Suitable materials for photo-NIL include monomer-based resists, such as acrylates blended with photoinitiators like benzoin derivatives, which enable rapid cross-linking upon UV irradiation. Molds are fabricated from UV-transparent substrates like quartz for rigid applications or polydimethylsiloxane (PDMS) for flexible, conformal imprinting, often surface-treated with release agents such as fluorosilanes to facilitate clean separation. These material choices ensure compatibility with nanoscale features while maintaining optical clarity for curing.^[25]^[26] Key performance metrics highlight photo-NIL's efficiency: curing times of mere seconds support imprint cycles under one minute, while resolutions as fine as 5 nm have been demonstrated, limited primarily by mold fidelity and resist viscosity. In contrast to thermal nanoimprint lithography, photo-NIL reduces pattern distortion from thermal expansion and enhances throughput by eliminating prolonged heating and cooling phases. To further mitigate defects like air bubbles or uneven filling, drop-on-demand dispensing methods deliver discrete resist droplets, optimizing volume control for large-area or step-and-repeat schemes.^[23]^[22]^[24]

Resist-free and thermal variants

Resist-free direct thermal nanoimprint lithography (NIL) enables patterning directly into thermoplastic substrates, such as polycarbonates or polyethersulfone, without applying an additional resist layer, thereby simplifying the fabrication workflow by eliminating deposition and etching steps associated with traditional resists. In this process, a rigid mold is pressed into the heated substrate above its glass transition temperature, typically in the range of 100–300°C, under pressures of 2.5–10 MPa, allowing the material to deform viscoplastically and replicate nanoscale features upon cooling and demolding. This variant is particularly suited for functional polymers where the substrate itself serves as the patterned layer, as demonstrated in the fabrication of 25 nm diameter metal dots with 120 nm periodicity by direct patterning of thermoplastic resins followed by lift-off.^[27] Other thermal variants extend this approach to accommodate diverse substrates and molds. Soft thermal NIL employs elastomeric molds, such as polydimethylsiloxane (PDMS) or nanocomposite variants, to pattern fragile or curved surfaces at lower pressures and temperatures around 130–200°C, reducing mechanical stress and enabling conformal contact over large areas. For instance, PDMS-based soft thermal imprinting has achieved sub-10 nm features in polymethyl methacrylate (PMMA) films for flexible electronics, with curing times of 2–3 minutes. Hybrid thermal-photo NIL combines thermal deformation of thermoplastics with ultraviolet curing of photopolymers, allowing mixed-material systems where thermal imprinting handles the bulk substrate and photo-curing stabilizes hybrid layers, as seen in replica mold fabrication with resolutions down to 20 nm. These methods prioritize direct material manipulation for applications requiring minimal processing layers.^[27]^[28] The primary advantages of these variants include a streamlined process that reduces fabrication steps and material costs, while achieving high-fidelity patterns—such as 20 nm features in polycarbonates for optical devices—without resist-induced defects or additional transfers. However, challenges arise from increased substrate wear due to direct mechanical contact, potentially leading to mold contamination or incomplete filling at high aspect ratios, and the need for precise temperature control to avoid thermal degradation. Deformation in these processes is governed by viscoelastic models, where the stress σ required for patterning relates to the material's modulus E and applied strain ε via σ = E * ε, derived from the linear elastic approximation within the polymer's transition regime, though full viscoelastic behavior incorporates time-dependent relaxation terms for accurate prediction of flow and recovery.^[27]

Fabrication Schemes

Full-wafer nanoimprint

Full-wafer nanoimprint lithography represents a batch processing approach in nanoimprint lithography (NIL) where an entire substrate wafer, typically up to 300 mm in diameter, is patterned in a single imprint step to achieve high uniformity across the surface. The process begins with the application of a resist layer—either thermoplastic for thermal NIL or a UV-curable monomer for photo-NIL—onto the wafer via spin-coating or dispensing. A rigid or flexible mold, often quartz or polydimethylsiloxane (PDMS), is then aligned to the wafer using high-precision stages that compensate for surface non-parallelism and wedge errors, ensuring conformal contact without distortion. Uniform pressure is applied through hydraulic, pneumatic, or vacuum-assisted systems, typically at low pressures ranging from 2-4 psi for UV variants to under 1 bar for soft lithography, allowing the resist to fill nanoscale features (down to 10 nm) via capillary action or viscous flow. After curing (thermal or UV exposure) and demolding, the residual layer is etched to reveal the pattern, maintaining resolution consistency due to the parallel imprint across the full area.^[29]^[30]^[31] Equipment for full-wafer NIL includes specialized imprint tools such as modified mask aligners (e.g., EV-620 systems) or pressure vessel presses equipped with active substrate stages for alignment accuracy below 100 nm and vacuum chambers to eliminate air entrapment for uniform filling. Modern systems support wafer sizes up to 12 inches (300 mm), while earlier equipment from the 2000s handled 4 to 8 inches, with flexible stamps like PVC or PDMS enabling adaptation to non-flat substrates, such as GaN-based wafers, to avoid defects from poor conformity.^[30]^[32]^[33]^[34] Throughput typically ranges from 1 to 5 wafers per hour, depending on resist viscosity, curing time, and demolding cycles, making it efficient for batch production compared to sequential methods. This scheme is particularly suited for applications requiring uniform patterns over large areas, such as memory arrays in semiconductors or photonic crystals in LEDs, where parallel imprinting preserves feature fidelity and aspect ratios across the wafer without stitching errors. For instance, it has been used to pattern 600-900 nm pitches on 2-inch LED wafers, enhancing optical output by reducing internal reflection. However, limitations include the high cost and fabrication challenges of large-scale molds, which restrict scalability beyond current wafer sizes, as well as potential edge effects from non-uniform pressure distribution at wafer peripheries.^[32]^[29]^[31]

Step-and-repeat nanoimprint

Step-and-repeat nanoimprint lithography involves sequentially imprinting patterns onto small fields across a substrate, such as a silicon wafer, by moving the stage between steps to cover larger areas. This method contrasts with full-wafer approaches by using compact templates to pattern fields typically measuring 26 mm × 33 mm, enabling higher yield through isolated defect management and greater flexibility for irregular or research-oriented patterns.^[35] The process begins with dispensing a low-viscosity UV-curable resist onto the substrate via inkjet printing, followed by precise alignment of the template and substrate. The template, often shaped with a slight bow using air pressure for uniform filling, is then pressed into the resist, allowing fluid to fill the pattern cavities in approximately 1.1 seconds per field. UV light cures the resist in about 100 milliseconds, after which the template is separated, and the stage repositions for the next field, repeating until the entire substrate is patterned. This cycle typically takes 1.5 seconds per field, supporting throughputs of up to 20 wafers per hour per station in multi-station systems.^[35] Alignment relies on advanced optical or interferometric systems to achieve overlay accuracy below 5 nm. For instance, Canon's Interferometric Moiré Alignment Technology (i-MAT) provides sub-1 nm resolution at over 500 Hz, while additional magnification and shape control systems correct for thermal distortions and ensure precise matching with prior lithographic layers. These capabilities enable mix-and-match integration with 193 nm immersion lithography tools.^[35]^[18] Key advantages include the use of smaller, more cost-effective templates that reduce fabrication expenses compared to large-area molds, along with improved suitability for non-uniform patterns or prototyping in research and development settings. Defectivity remains low, at around 1 defect per cm², enhancing overall yield for high-volume production. Throughput scales effectively with field size and station count, making it viable for semiconductor manufacturing.^[35]^[25] Examples of implementation include Canon's FPA-1200NZ2C system, a four-station high-volume manufacturing stepper designed for logic chips and memory devices at nodes down to 5 nm equivalent, with demonstrated overlay of 4 nm (mean + 3σ) and over 90% electrical test yield at 26 nm half-pitch. As of 2024, Canon shipped the FPA-1200NZ2C to research institutes for advanced semiconductor prototyping. This approach has been applied in patterned media and advanced integrated circuits, showcasing its potential for leading-edge semiconductor fabrication.^[35]^[18]^[36]

Roll-to-roll nanoimprint

Roll-to-roll nanoimprint lithography (R2R NIL) enables continuous, high-throughput patterning on flexible substrates by feeding a web of material, such as polyethylene terephthalate (PET) films, between a rotating patterned mold cylinder and a pressure roller. The process involves applying a thin layer of resist material to the substrate prior to imprinting, followed by inline curing—either thermal heating to soften thermoplastic resists or ultraviolet (UV) exposure to solidify photopolymer resists—allowing for seamless pattern transfer without interruption. This web-fed approach contrasts with batch methods by maintaining constant motion, facilitating the production of large-area nanostructures over kilometers of substrate length.^[37] Key equipment in R2R NIL includes cylindrical molds fabricated from durable materials like nickel or perfluoropolyether (PFPE) composites, which provide seamless, repeating patterns across the substrate width, often up to several meters. A backup pressure roller applies uniform force, typically in the range of 0.1–1 MPa, to ensure complete pattern filling, while integrated systems incorporate resist coating modules (e.g., roll or jet dispensing) and curing units. Processing speeds reach up to 15 m/min for thermal-cured systems and about 1.4 m/min for UV-cured systems, enabling industrial-scale output while achieving resolutions of 10–50 nm for features like gratings and pillars.^[37] R2R NIL is particularly suited for fabricating large-area flexible devices, such as nanostructured solar cells, where patterns enhance light trapping and absorption efficiency on substrates like PET or metal foils. Resolutions in the 10–50 nm range support applications requiring subwavelength features, such as moth-eye antireflection structures that reduce surface reflectivity to below 1% over broad wavelengths. The continuous nature of the process allows for uniform patterning over areas exceeding 1 m² per cycle, making it ideal for roll-based electronics and photonics.^[37] Advancements in the 2020s have focused on enhancing R2R NIL for specialized optical films, including laser-assisted direct roller imprinting (LADRI) variants that achieve speeds up to 6 m/s while replicating antireflective nanostructures with 120 nm pitches and reflectivity under 0.5%.^[38] These developments enable cost reduction through mass production, with NIL processes lowering per-unit expenses by over 50% compared to traditional lithography for flexible optics, driven by reusable molds and minimal material waste in continuous lines.^[38]

Applications

Semiconductor and electronics

Nanoimprint lithography (NIL) has emerged as a promising technique for patterning advanced transistors in semiconductor fabrication, particularly for FinFETs and gate-all-around (GAA) transistors at nodes below 7 nm. By mechanically transferring nanoscale patterns from a mold to a resist layer, NIL enables the creation of high-aspect-ratio fins and nanosheet channels essential for these 3D transistor architectures, offering sub-10 nm resolution without relying on complex optical systems. This approach has been demonstrated in the fabrication of silicon nanotube arrays with wall thicknesses as low as 10 nm, which serve as precursors for transistor channels in FinFET-like structures.^[39] Additionally, NIL supports the precise etching and spacer patterning required for GAA nanosheet stacking, facilitating improved gate control and reduced leakage in logic devices at advanced nodes.^[40] In the back-end-of-line (BEOL) processing of electronic devices, NIL is utilized for patterning interconnects, including dual damascene structures for copper wiring. It excels in forming dense line-and-space (L/S) patterns and isolated vias at half-pitches down to 24 nm, enabling complex mixtures of features that are challenging for traditional immersion lithography. This capability is critical for scaling interconnect densities in high-performance chips, where NIL's mold-based transfer ensures uniform pattern fidelity across large areas.^[41] Canon's ongoing pilots from 2023 to 2025 highlight NIL's integration into memory production, with systems like the FPA-1200NZ2C delivered to the Texas Institute for Electronics in 2024 for testing in DRAM and NAND flash fabrication. These efforts focus on high-volume patterning for 3D stacked architectures, where NIL complements EUV in hybrid flows by handling non-critical layers or full patterning in cost-sensitive steps. For instance, collaborations with KIOXIA have validated NIL for forming complex 2D/3D circuit patterns in NAND devices.^[18]^[2] In high-volume memory production, NIL achieves cost savings of approximately 40-60% compared to EUV due to lower equipment prices and up to 90% reduced power consumption, making it viable for DRAM and NAND scaling.^[42]^[43] Recent advancements reported at SPIE in 2024 underscore NIL's role in 3D NAND stacking, where it meets standards for defectivity, overlay, and resolution in multi-layer memory cells, supporting vertical channel integration beyond 200 layers. These developments position NIL as a scalable solution for electronics, particularly in memory-dense applications requiring economic patterning at sub-15 nm features.^[44]^[45]

Photonics and optics

Nanoimprint lithography (NIL) plays a pivotal role in fabricating photonic structures and optical components by enabling the precise replication of nanoscale features that manipulate light at sub-wavelength scales. This technique excels in creating periodic and aperiodic patterns essential for controlling light propagation, diffraction, and interference, offering resolutions below 400 nm for features such as waveguides and gratings.^[46] In photonics, NIL's mechanical deformation process allows for high-fidelity transfer of complex templates into various materials, including polymers and hybrid organics, facilitating the integration of optical elements with sub-10 nm precision in CMOS-compatible environments.^[46] Key applications include the production of diffraction gratings and photonic crystals, where NIL achieves sub-100 nm resolutions for efficient light coupling in waveguides and high-aspect-ratio structures via thermal variants.^[46] For instance, NIL-fabricated gratings enable low-loss single-mode waveguides with propagation losses as low as 0.35 dB cm⁻¹ at 1550 nm, supporting compact photonic integrated circuits.^[46] Metasurfaces for augmented reality (AR) and virtual reality (VR) lenses represent another major use, with NIL enabling the replication of metalenses operating at 940 nm focal lengths through high-throughput patterning of nanostructures.^[46] Additionally, anti-reflective coatings benefit from NIL's 3D patterning capabilities, which create moth-eye-like surfaces to minimize reflection losses in optical devices.^[46] In light-emitting diodes (LEDs), NIL supports hybrid integration with quantum dots, enhancing emission efficiency through nanostructured outcoupling layers.^[46] A notable case study involves NIL's integration into silicon photonics, where it fabricates 100 nm features for resonators and couplers, achieving quality factors up to 10⁶ using UV-NIL processes.^[46] This approach demonstrates NIL's compatibility with silicon substrates, enabling wafer-scale production of photonic components with sub-20 nm overlay accuracy.^[46] The advantages of NIL in this domain include low-cost replication of intricate 3D optics, reducing fabrication expenses compared to electron-beam lithography while maintaining nanoscale fidelity. Furthermore, roll-to-roll NIL variants enable high-throughput manufacturing for display optics, such as large-area Fresnel lenses and nanostructured films, supporting scalable production of flexible photonic elements.^[47] These capabilities position NIL as a versatile tool for advancing optical systems in telecommunications and consumer electronics.^[46]

Biomedical and flexible devices

Nanoimprint lithography (NIL) has emerged as a versatile technique for fabricating biomedical devices, particularly in creating microfluidic channels and biosensors with nanoscale features ranging from 10 to 100 nm, enabling precise control over fluid dynamics and biomolecular interactions. For instance, NIL enables the production of 3D nanofluidic devices in PMMA with sub-100 nm channels for capillary-driven antibody detection, such as SARS-CoV-2 biomarkers, achieving multiplexed analysis in lab-on-chip systems.^[48] Similarly, graphene field-effect transistors (GFETs) patterned via NIL with 75 nm features and thiol-functionalized polymers serve as high-sensitivity biosensors, demonstrating non-cytotoxic biocompatibility with over 80% cell viability across various lines.^[49] In tissue engineering, NIL replicates multilevel undercut nanostructures, such as 300 nm biomimetic scaffolds or 40 μm microcavities on biocompatible resists like mr-UVCur26SF, guiding neuronal cell growth and reducing clustering for drug screening applications.^[50] Protein stamps are also realized through NIL, with bovine serum albumin (BSA) adsorbed on 100 nm nanodisk arrays for enhanced biomolecular recognition in sensing platforms.^[48] In flexible electronics, NIL facilitates the patterning of organic transistors and wearable sensors on polymer substrates like PET and PDMS, leveraging its compatibility with low-temperature processes to maintain substrate flexibility. Roll-to-roll NIL, for example, produces large-area e-skin components at speeds up to 1 m/min, integrating nanostructures for organic thin-film detectors with polarization sensitivity.^[50] Recent 2025 advances include NIL-patterned flexible OLEDs on PDMS for wearable displays and SERS-based lab-on-chip devices detecting hemoglobin at 1 nM limits with enhancement factors up to 1.9 × 10⁴.^[48] Biocompatibility of imprinted PDMS is well-documented, supporting cell behavior regulation, such as increased osteopontin expression on 1000 nm spaced nanopatterns, with water contact angles tunable to 40° for hydrophilic surfaces.^[48] Emerging applications encompass nanoimprinted drug delivery patches, where NIL creates wearable SERS patches for real-time glucose monitoring in sweat, achieving detection limits of 1 ppt for heavy metals like Hg²⁺ and 99.5% accuracy for Alzheimer's biomarkers via 3D Au nanowire arrays.^[48] These patches benefit from NIL's ability to form sub-10 nm nanogaps on flexible substrates, enabling single-molecule sensitivity while ensuring antifouling properties with water contact angles exceeding 145°.^[50] Overall, NIL's high-throughput replication on biocompatible polymers like PDMS positions it as a key enabler for scalable, bendable biomedical technologies.

Advantages

Resolution and cost benefits

Nanoimprint lithography (NIL) leverages a mechanical deformation process that circumvents the diffraction limits inherent in optical lithography techniques, enabling the replication of nanoscale features with resolutions below 5 nm. This capability stems from direct physical contact between the mold and resist material, allowing pattern transfer limited primarily by the mold's feature fidelity rather than wavelength constraints. For instance, demonstrations have achieved 5 nm linewidths and 14 nm pitches in resist at room temperature using pressures under 15 atm. Key factors influencing resolution include the sharpness of the mold's nanostructures, the viscosity and flow characteristics of the resist during imprinting, and the uniformity of pressure application, which collectively ensure faithful replication down to sub-10 nm scales across large areas.^[51]^[4]^[52]^[53] A primary cost advantage of NIL lies in its simplified equipment requirements, with systems priced around $15 million—substantially lower than the $150 million or more for extreme ultraviolet (EUV) lithography tools. Consumable templates, typically fabricated from durable materials like silicon or quartz, exhibit high reusability, supporting 100 to 1,000 imprints per template before significant degradation, which amortizes the initial fabrication expense over high-volume production. This reusability, combined with minimal need for complex optics or vacuum systems, results in per-wafer patterning costs that are approximately 25% of those for EUV, or less than 10% compared to alternatives like electron-beam lithography in certain scenarios.^[54]^[55]^[56]^[57] NIL's efficiency further manifests in its parallel mechanical replication, far surpassing the serial nature of electron-beam methods. Energy consumption is also notably reduced, at about one-tenth that of electron-beam lithography per feature due to the absence of high-energy beams and the reliance on mechanical pressure instead of sustained illumination or acceleration. However, the upfront cost of template fabrication—often requiring advanced lithography for the master mold—presents a trade-off that is offset in high-volume applications where the template's extended lifespan enables rapid cost recovery.^[58]^[56]

Throughput and scalability

Nanoimprint lithography (NIL) achieves high throughput through efficient cycle times, typically ranging from 10 to 60 seconds per field in step-and-repeat configurations, enabling rapid patterning across wafer surfaces.^[59] In full-wafer NIL systems, optimized tools process over 100 wafers per hour, with examples like the EVG 620 soft UV NIL system demonstrating more than 130 wafers per hour for first-print operations with short exposure times.^[6] These cycle times are facilitated by the mechanical simplicity of imprinting, which avoids prolonged exposure steps common in photolithography, allowing for parallel processing in multi-station clusters.^[60] Scalability in NIL extends from laboratory-scale research and development to high-volume fabrication environments, supporting industrial production volumes comparable to established semiconductor processes.^[56] Roll-to-roll NIL variants further enhance scalability by enabling continuous patterning over large areas at rates exceeding 2 m² per minute on wide webs, such as 250 mm, which is suitable for flexible substrates in mass production.^[61] This progression mirrors the transition of NIL from proof-of-concept demonstrations to fab-integrated tools, with throughput scaling achieved through modular designs that accommodate varying substrate sizes and pattern densities.^[62] Automation plays a critical role in improving NIL throughput and scalability, particularly through precise alignment mechanisms and automated resist dispensing systems like inkjet delivery, which minimize downtime and ensure uniform coverage.^[63] For instance, Canon's 2024 FPA-1200NZ2C NIL system incorporates advanced automation for alignment and fluid dispensing, targeting throughputs around 90 wafers per hour in operational settings.^[64] At scale, NIL achieves yields greater than 95% in optimized production, paralleling the high-volume replication efficiency seen in mass production techniques such as DVD stamping, where defect rates are similarly controlled through templating.^[45]

Challenges

Alignment and overlay

In nanoimprint lithography (NIL), alignment refers to the precise positioning of the mold relative to the substrate, while overlay denotes the accuracy with which subsequent patterned layers align with previous ones, critical for fabricating multi-layer nanodevices such as integrated circuits. For advanced applications like 14 nm half-pitch memory devices, overlay requirements are stringent, typically demanding errors below 2 nm to prevent misalignment-induced defects and ensure functional interconnectivity.^[65] These tolerances arise because even sub-nanometer shifts can compromise electrical performance in densely packed structures.^[66] Key sources of overlay error in NIL include thermal expansion of the mold and substrate materials, which can induce differential shrinkage during imprinting and curing, and stage drift from mechanical instabilities in the positioning system, leading to positional inaccuracies over repeated exposures. Thermal effects are particularly pronounced in thermal NIL variants, where temperature cycles cause coefficient-of-thermal-expansion mismatches, while stage drift accumulates in step-and-repeat processes due to vibration or long-term settling. To mitigate these, systems incorporate environmental controls like temperature stabilization and low-friction chucks.^[66]^[67] Several techniques enable precise alignment in NIL. Moiré alignment uses interference patterns from grating overlays on the mold and substrate to detect sub-wavelength shifts, achieving single-point overlay accuracies below 20 nm in early demonstrations for multi-level patterning. Interferometry provides in situ measurement of relative positions through phase-sensitive optical feedback, suitable for UV-NIL where real-time corrections during imprinting yield alignments on the order of tens of nanometers. Fiducial markers, such as etched reference patterns on both mold and substrate, facilitate image-based registration, with designs allowing alignment of small features to larger ones for overlay errors under 5 nm in substrate conformal imprints. In step-and-repeat NIL, feedback loops integrate these methods with closed-loop control systems, using sensors to adjust translation, rotation, and scaling in real time for field-by-field patterning.^[68]^[69]^[70]^[71] Overlay performance is quantified through budgets that aggregate error contributions, often expressed as the standard deviation \sigma_{\text{overlay}} = \sqrt{\sigma_{\text{translation}}^2 + \sigma_{\text{rotation}}^2 + \sigma_{\text{scale}}^2}, where each term represents variability in linear positioning, angular misalignment, and dimensional scaling, respectively; this root-sum-square approach ensures the total error stays within device tolerances like 15-20% of the half-pitch. Recent advancements have pushed boundaries, with 2023 NIL systems demonstrating 1.8 nm overlay accuracy in closed-loop configurations for semiconductor applications, incorporating high-order distortion corrections and process-tuned variables to address residual errors. As of 2025, systems like Canon's FPA-1200NZ2C maintain 1.8 nm single-machine overlay with mix-and-match improvements to 2.4 nm.^[66]^[67]^[36] These improvements enable mix-and-match integration with other lithographies, achieving sub-3 nm single-machine overlay across wafers.^[66]^[67]

Defects and template issues

Common defects in nanoimprint lithography (NIL) include line-edge roughness (LER), tearing during demolding, and trapped air bubbles, which compromise pattern fidelity and yield. These defects are broadly classified as random or systematic (repeated). Random defects, such as particle-associated defects, voids from incomplete filling, and separation-related issues, arise sporadically due to environmental contaminants or process variations and do not repeat consistently. In contrast, systematic defects originate from imperfections in the template or substrate and recur across multiple imprints, amplifying their impact on large-scale production.^[6] Line-edge roughness emerges primarily from atomic-scale interactions between the mold and resist during pressing and demolding; molecular dynamics simulations demonstrate that LER increases with stronger mold-resist adhesion forces and peaks at intermediate resist molecular weights, such as 4000 for PMMA, correlating with higher demolding forces. Tearing during demolding occurs when cured resist adheres excessively to the template, causing polymer fragments to stick and resulting in deformed or missing patterns, particularly under mismatched thermal expansion or resist shrinkage. Trapped air bubbles form at low imprinting pressures in ambient conditions, where air gets pinned at pattern edges, hindering resist flow and creating voids; this is prevalent in UV-NIL without vacuum assistance.^[72]^[73]^[73] Template fabrication for NIL typically relies on electron-beam lithography to pattern high-resolution features on silicon or quartz substrates, but this method incurs high costs for large areas owing to its serial writing process and low throughput. Templates can endure hundreds to thousands of imprints depending on material and coating, with silicon molds typically lasting a few thousand cycles. Industry targets for defect density are below 1 per cm² in engineering prototypes, with production aiming for 0.1 per cm² to enable viable semiconductor integration. As of 2024, Canon's NIL systems have achieved defect densities suitable for semiconductor production, targeting below 0.1 per cm² with advanced coatings.^[74]^[75]^[76]^[36] Mitigation strategies focus on surface treatments to reduce adhesion and enhance durability. Antistick coatings, such as fluorosilane-based monolayers (e.g., FDTS or Optool DSX), lower template surface energy to facilitate clean demolding and minimize tearing or bubble entrapment, though they degrade progressively over cycles via chain scission and radical interactions with UV-cured resists. Diamond-like carbon (DLC) coatings, often fluorinated for added antistick properties, provide superior abrasion resistance and extend template lifetime significantly, with advancements in coatings and working stamps achieving up to 10,000 or more cycles as reviewed in 2025 literature on industrial NIL scaling.^[77]^[78]^[44]

Residual layer removal

In nanoimprint lithography, particularly in thermoplastic processes where a heated polymer resist is pressed against a mold, incomplete flow of the resist material results in a thin, uniform residual layer beneath the mold protrusions. This layer forms because the resist does not fully displace into the nanoscale cavities within the limited imprint time and pressure, typically leaving a thickness of 10-100 nm.^[25]^[79] The primary method for removing this residual layer to enable full pattern transfer to the substrate is anisotropic reactive ion etching (RIE) using oxygen (O₂) plasma, which selectively etches organic polymer resists. The process relies on the directional ion bombardment to achieve high vertical etch rates while minimizing lateral etching, providing an etch rate selectivity greater than 10:1 between the residual layer and the sidewalls of the imprinted features.^[80] Challenges in residual layer removal include ensuring uniformity across large wafers, where variations in resist flow and plasma distribution can lead to inconsistent etch depths, and avoiding over-etching that risks degrading the delicate imprinted nanostructures.^[81] As an alternative to extensive etching, optimizing the imprint pressure can minimize the initial residual thickness; a brief model approximates this as h_r = h_0 \exp\left(-\frac{P}{\eta}\right), where h_r is the residual height, h_0 is the initial resist thickness, P is the applied pressure, and \eta is the resist viscosity.^[82]

Advanced Techniques

3D patterning

Nanoimprint lithography (NIL) enables the fabrication of three-dimensional (3D) nanostructures by extending beyond planar patterns to create multilayer or volumetric features, leveraging repeated imprinting steps combined with etching or specialized mold geometries. One primary method involves sequential imprint-etch cycles, where multiple layers are patterned by imprinting a resist, followed by anisotropic etching to transfer the pattern and expose the substrate for the next imprint, allowing stacking of features with controlled interlayer spacing.^[83] This approach has been used to produce woodpile structures in 3D photonic crystals, achieving up to three stacked layers with sub-100 nm overlay alignment through UV-based NIL and dry etching.^[84] Alternative techniques employ inclined or rotating molds to generate angled or sloped features in a single imprint step, avoiding the need for multiple alignments. Inclined nanoimprint lithography (INIL) applies a shear force by tilting the mold at angles up to 45° during pressing, producing asymmetric 3D nanostructures such as slanted nanopillars or gratings with varying heights across the pattern.^[85] Similarly, rotating nanoimprint tools enable orthogonal imprinting on curved or edged surfaces, imprinting features at angles of 45°, 60°, or 90° relative to the substrate normal, which is particularly useful for non-planar 3D geometries.^[86] These 3D NIL methods find applications in creating complex volumetric structures, such as 3D photonic crystals that manipulate light propagation through periodic refractive index variations, enabling devices like low-loss waveguides or optical filters.^[87] In microfluidics, 3D NIL fabricates multilayer channels and reservoirs with integrated nanostructures for enhanced fluid control, supporting lab-on-a-chip systems for biological assays. Aspect ratios up to 10:1 are routinely achieved in these structures, balancing resolution with structural integrity for features as small as 100 nm in height.^[88] Key challenges in 3D NIL include precise multilayer alignment, where overlay errors must be maintained below 10 nm to ensure feature registry across layers, often requiring advanced alignment marks and stages to compensate for thermal expansion or distortion. Demolding introduces additional stress, as the differential shrinkage between mold and resist during cooling generates shear forces that can fracture high-aspect features or cause pattern distortion, necessitating low-adhesion coatings or optimized peel angles.^[89] Simulations indicate that these stresses peak at mold edges, potentially exceeding the yield strength of polymeric resists.^[90] In 2024, advances in 3D NIL have focused on metamaterials, with demonstrations of nanoimprint-based fabrication of high-refractive-index metalenses and diffractive elements exhibiting subwavelength features for wavefront control in visible and infrared spectra. These developments integrate NIL with additive processes to produce all-inorganic 3D metamaterial arrays, enhancing efficiency in plasmonic and quantum photonic applications.^[91] As of 2025, further progress includes scalable NIL for 3D photonic metasurfaces and high-throughput patterning in photonics, as reviewed in recent literature.^[46]^[92]

High-aspect-ratio nanostructuring

High-aspect-ratio (HAR) nanostructuring in nanoimprint lithography (NIL) enables the creation of tall, narrow features essential for applications requiring enhanced light-matter interactions, such as waveguides and sensors. Aspect ratios exceeding 20:1 have been achieved through optimized imprinting conditions, allowing structures like nanowires and vertical gratings with heights up to several micrometers and widths below 100 nm.^[93]^[94] Key techniques for HAR patterning include high-pressure thermal NIL, where pressures of 10 MPa or more are applied to thermoplastic resists like PMMA at elevated temperatures around 180°C to ensure complete filling of mold cavities. Low-viscosity UV-curable resists, such as OrmoComp with viscosities below 50 mPa·s, facilitate capillary-driven filling in UV-NIL variants like micromolding in capillaries (MIMIC), reducing the need for extreme pressures while achieving aspect ratios up to 28:1. Post-imprint deepening is often performed using Bosch deep reactive ion etching (DRIE) on the residual polymer layer, enabling transfer to substrates like silicon with aspect ratios of 15:1 or higher for robust, vertical sidewalls.^[94]^[95]^[96] Representative examples include NIL-defined nanowire arrays, where molds with 80 nm linewidths yield structures over 1.6 μm tall for electronic and photonic devices, and vertical gratings with near-90° sidewalls and aspect ratios greater than 10 for diffractive optics. In photonics, NIL has produced high-Q resonators, such as silicon nitride microring devices with Q-factors exceeding 10^5, leveraging HAR features to minimize propagation losses.^[97]^[98]^[99] Challenges in HAR NIL primarily involve mold release for tall features, where shear stresses can cause fractures, often mitigated by soft PDMS stamps or anti-stiction coatings. Collapse during drying arises from capillary forces in residual liquids, leading to instability in isolated pillars with aspect ratios above 30:1, though metallic or dielectric coatings can enhance mechanical stability by factors up to 164. Residual layer removal via etching, as in Bosch processes, must be controlled to avoid undercutting, ensuring fidelity in final HAR transfer.^[100]^[101]^[101] As of 2025, innovations include backside UV-assisted NIL for enhanced metal nanostructure aspect ratios and scalable production of HAR polymer nanopillars for metasurfaces, alongside lithium niobate nanoimprinting for nonlinear optical devices.^[102]^[103]^[104]

Proximity effects and alternatives

In nanoimprint lithography (NIL), proximity effects primarily stem from the mechanical displacement of resist material during imprinting, leading to long-range systematic variations in pattern dimensions and residual layer thickness. When the mold features varying pattern densities, local polymer flow occurs to fill cavities in dense regions, causing resist thinning in adjacent sparse areas and non-uniformity over centimeter scales. This effect is independent of individual feature size and can degrade global pattern fidelity, particularly in thermal NIL where viscous flow dominates.^[105] Thermal diffusion during the heating phase exacerbates these issues by enabling polymer chain mobility, which broadens features through mass transport. In thin resist films, confinement alters this dynamics by increasing effective viscosity and reducing molecular displacement, thereby limiting excessive flow and stabilizing patterns against long-range distortions.^[106] To mitigate proximity effects, low-temperature NIL processes are utilized, operating closer to the glass transition temperature to minimize resist fluidity and diffusion while maintaining imprint fidelity. Optimized resist thicknesses and pattern layouts with balanced densities further confine flow, reducing systematic variations.^[107] Alternative approaches to conventional NIL address proximity limitations by innovating material interactions and energy delivery. Electrochemical NIL (ECNIL) employs ion-assisted imprinting directly into metallic or semiconducting substrates, bypassing polymer resists and enabling precise 3D patterning in materials like silicon without flow-induced distortions. This method achieves sub-10 nm resolution and CMOS compatibility, with applications in microdevice fabrication.^[108]^[109] As of 2025, enhanced ECNIL variants, including conformal techniques using stretchable stamps for non-planar surfaces, have improved efficiency and environmental friendliness for biomedical and silicon patterning.^[110]^[111] Laser-assisted direct imprint uses localized heating from pulsed lasers to soften substrates or resists selectively, avoiding global thermal budgets that promote diffusion. This technique supports ultrafast processing, with femtosecond pulses inducing phase changes for parallel nanostructuring over large areas.^[112]^[113] Roller NIL represents another variant, facilitating continuous imprinting on curved or flexible surfaces through cylindrical molds, which inherently confines flow paths and enhances uniformity for non-planar applications like optical films.^[114]

Recent Developments

Industrial adoption

Nanoimprint lithography (NIL) has seen increasing integration into semiconductor manufacturing workflows, particularly for back-end-of-line (BEOL) processes, driven by its potential for cost-effective patterning at advanced nodes. Canon has emerged as a leading provider with its FPA-1200NZ2C system, the first commercial NIL tool qualified for 14 nm patterning in October 2023, enabling lower power consumption compared to extreme ultraviolet (EUV) lithography.^[18]^[2] By September 2024, Canon shipped its initial system to the Texas Institute for Electronics (TIE), a U.S.-based R&D consortium backed by Intel, Samsung, and DARPA, to evaluate NIL for high-volume production.^[115] SK Hynix has conducted pilots with Canon's NIL equipment since at least May 2023, focusing on testing for memory applications, though it has clarified that the technology is not yet in production for 3D NAND.^[116] Key milestones include Canon's 2023 tool qualification, which demonstrated viability for semiconductor fabrication, and presentations at SPIE Advanced Lithography + Patterning 2024 highlighting NIL's suitability for BEOL applications such as dual damascene structures, with overlay accuracy below 3 nm and throughput exceeding 90 wafers per hour.^[45]^[117] Advancements in defect control and particle management have supported yield improvements in NIL processes for applications like meta-optical elements.^[92] The global NIL system market is projected to reach approximately $193 million in 2025, reflecting growing adoption amid efforts to address EUV limitations.^[118] Barriers to widespread use, such as template variability and defectivity, have been addressed through advancements in template fabrication, including improved quartz-based designs for better durability and pattern fidelity in high-volume settings.^[119] Standardization efforts, including consistent material specifications and quality assurance metrics for critical dimensions, have advanced NIL integration.^[120] Primarily adopted in the semiconductor sector for memory and logic devices, NIL is expanding into optics, where it supports cost-effective production of photonic components and nanostructures with sub-10 nm features.^[67] As of November 2025, additional developments include China's Prinano delivering its first domestically developed NIL machine in August 2025, challenging established players like Canon.^[121] Canon announced a new fabrication facility in Japan in September 2025 to expand NIL production for advanced chipmaking.^[122] NIL Technology raised $31 million in funding to scale manufacturing of metasurface lenses using NIL.^[123]

Future prospects

Emerging trends in nanoimprint lithography (NIL) include hybrid approaches that integrate NIL with complementary techniques to achieve resolutions below 2 nm, such as combining NIL with reactive ion etching (RIE) for advanced patterning in semiconductor nodes.^[44] For instance, Canon's FPA-1200NZ2C system targets 2 nm nodes with overlay accuracy under 3 nm, positioning NIL as a viable complement to extreme ultraviolet (EUV) lithography for sub-2 nm features.^[44] Additionally, AI-optimized imprinting is gaining traction, with artificial neural networks used to predict imprint quality based on process parameters, enabling real-time adjustments to reduce defects and improve throughput.^[124] NIL is also expanding to quantum devices, where it fabricates precise arrays of quantum dots and point contacts for electron manipulation in quantum computing and photonics applications.^[125]^[126] These advancements promise significant impacts, including a cost revolution in chip manufacturing, with NIL offering up to 40% lower costs compared to traditional dual damascene processes due to reduced equipment and material needs.^[44] The global NIL systems market is projected to exceed $200 million by 2030, growing at a compound annual rate of around 9-15%, driven by demand in semiconductors and optics.^[127] Beyond electronics, NIL's high-resolution capabilities enable applications in 6G antennas through metasurface patterning for efficient signal manipulation and in personalized medicine via scalable biosensors for targeted diagnostics.^[44] Challenges ahead include developing sustainable materials, such as solvent-free resins and biomimetic resists, to minimize environmental impact while maintaining pattern fidelity.^[44] Global supply chains for templates also pose hurdles, with mold durability needing enhancement—strategies like working stamps aim to extend master mold life beyond 100,000 imprints to support high-volume production.^[44]^[128] As of November 2025, debates continue on NIL's competitiveness with EUV, with a recent analysis (November 4, 2025) arguing that NIL will not rival EUV in the near term despite Canon's claims.^[129] The NNT 2025 conference on November 13, 2025, celebrated the 30th anniversary of NIL, highlighting new imprint methods without mechanical pressing, improved resists, and techniques for smaller features.^[19] Looking 30 years ahead from its inception, the 2025 review of NIL underscores its transformative role in nanoelectronics, where it could enable ultra-low-cost patterning for next-generation transistors, and in biosensors for real-time health monitoring, provided ongoing innovations in hybrid processes and materials are realized.^[44]

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Multilength Scale Patterning of Functional Layers by Roll-to-Roll ...
We demonstrate the fast (>10 m/min) and continuous fabrication of multilength scale structures by roll-to-roll UV-nanoimprint lithography on a 250 mm wide web.Missing: m²/ | Show results with:m²/
[58]
[PDF] Nanoimprint Lithography technology for high volume manufacturing
Nanoimprint lithography (NIL) has developed from an emerging nano replication technology into a matured and industrially viable manufacturing technology. Since ...
[59]
China ships first NIL lithography tool as 300-plus firms mobilize to ...
Aug 6, 2025 · Pulin's PL-SR series uses inkjet-based step-and-repeat NIL technology designed for sub-10nm nodes and is directly benchmarked against Canon's ...Missing: throughput | Show results with:throughput
[60]
Canon announces alternative to EUV litho for writing 5nm circuitry
Oct 16, 2023 · Wafer throughput is not revealed but three years ago a Canon paper said it was 90 wafers oer hour. An FPA-1200NZ2C in operation.Missing: per | Show results with:per
[61]
Evaluation of alignment accuracy for nanoimprint lithography - KIOXIA
Oct 5, 2022 · Although NIL has achieved a substrate alignment accuracy of 2 nm, it has problems specific to particularly fine patterning, such as a half-pitch of 14 nm.
[62]
Nanoimprint lithography methods for achieving sub-3nm overlay
Sep 27, 2021 · The purpose of this paper is to describe the application of the improvements discussed above to realize a mix and match overlay of less than 3nm.
[63]
Nanoimprint Finally Finds Its Footing - Semiconductor Engineering
Apr 20, 2023 · Nanoimprint lithography (NIL) has consistently been touted as a lower-cost alternative to traditional optical lithography.<|control11|><|separator|>
[64]
Sub-20-nm Alignment in Nanoimprint Lithography Using Moiré Fringe
We achieved a single-point overlay accuracy (error distribution) of sub-20 nm between the first and second imprinted layers by using two sets of Moiré fringes.
[65]
Interferometric in situ alignment for UV-based nanoimprint
Jun 23, 2025 · A high precision alignment concept is evaluated for suitability in UV-based nanoimprint lithography. Through three consecutive alignment steps ...
[66]
Accuracy of wafer level alignment with substrate conformal imprint ...
Oct 4, 2013 · By aligning a small fiducial on a big fiducial, only one master structure is used for two lithography layers. Figure 4 shows the design of the ...
[67]
Nanoimprint system alignment and overlay improvement for high ...
Nanoimprint lithography (NIL) manufacturing equipment utilizes a patterning technology that involves the field-by-field deposition and exposure of a low ...
[68]
[PDF] 2015: Molecular Dynamics Study of Line Edge Roughness ... - EIPBN
When the pattern size becomes smaller than several tens of nanometers, the behavior of resist molecules plays an important role in nanoimprint lithography ...
[69]
Interfacial Interactions during Demolding in Nanoimprint Lithography
Nanoimprint lithography (NIL) is a useful technique for the fabrication of nano/micro-structured materials. This article reviews NIL in the field of demolding ...
[70]
UV-assisted nanoimprint lithography: the impact of the loading effect ...
The silicon loading effect, caused by DRIE, impacts UV-nanoimprint lithography by varying pattern depth due to different etching rates of smaller features.Missing: seminal paper
[71]
Nanoimprint lithography: An old story in modern times? A review
Mar 27, 2008 · Nanoimprint lithography (NIL) is a high throughput, high-resolution parallel patterning method in which a surface pattern of a stamp is replicated into a ...INTRODUCTION · Nanoimprint lithography: A... · III. SPECIFIC QUESTIONS
[72]
Ready For Nanoimprint? - Semiconductor Engineering
Mar 17, 2016 · The goal for engineering release is 1 percm², and production release 0.1 per cm². In a presentation Toshiba showed lower values of 1 defect cm².
[73]
XPS study of the degradation mechanism of fluorinated anti-sticking ...
Aug 7, 2025 · Thanks to their low surface energy, fluorinated anti-sticking layers are widely used in UV nanoimprint lithography (UV–NIL) to treat the ...Missing: mitigation fluorosilanes
[74]
Ultrathin fluorinated diamondlike carbon coating for nanoimprint ...
Dec 3, 2009 · Through the use of F-DLC, we have demonstrated a method for creating an antistick layer on a typical Si O 2 imprinter where DLC has excellent ...Missing: mitigation fluorosilanes
[75]
Nanoimprint with thin and uniform residual layer for various pattern ...
Aug 7, 2025 · In NIL process, the residual resist layer often remains in the resist bottom [18] , and this layer is usually removed by oxygen contained plasma ...
[76]
Anisotropic Oxygen Reactive Ion Etching for Removing Residual ...
Mar 29, 2016 · Here, we propose an apparatus of O2. RIE in which electrodes were aligned parallel with a long distance between the electrodes to reduce plasma.
[77]
[PDF] Effect of initial resist thickness on residual layer thickness ... - Nanonex
Quantification and control of the residual layer thickness is a critical challenge facing nanoimprint lithography. This thickness must be known to within a ...
[78]
[PDF] effect of the processing and transport
This formulation allows us to mimic the roll-to-roll imprinting process of two parallel plates with the plate containing the fluid film approaching the plate.<|control11|><|separator|>
[79]
Fabrication of 3D-photonic crystals via UV-nanoimprint lithography
Dec 10, 2007 · A variety of potential applications has been demonstrated using NIL (e.g., surface acoustic wave devices, vias and contact layers with dual ...
[80]
[PDF] Fabrication Process of 3D-Photonic Crystals via UV-Nanoimprint ...
Up to three layers of the woodpile structure have been realized by using UV-based nanoimprint lithography, dry etching and deposition techniques in order to.Missing: cycles | Show results with:cycles
[81]
Inclined nanoimprinting lithography for 3D nanopatterning
Apr 4, 2011 · We report a non-conventional shear-force-driven nanofabrication approach, inclined nanoimprint lithography (INIL), for producing 3D nanostructures of varying ...
[82]
[PDF] Development and implementation of a rotating nanoimprint ...
Aug 18, 2021 · The micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45°, 60°,and 90° from the center of ...
[83]
High Quality 3D Photonics using Nano Imprint Lithography of Fast ...
May 18, 2018 · The process is based on a novel dual-step soft nano imprint lithography process for producing devices with smooth surfaces, combined with fast ...Results · Characterization · Sol-Gel PreparationMissing: seminal | Show results with:seminal<|control11|><|separator|>
[84]
Nanoimprint Lithography for Functional Three-Dimensional Patterns
Aug 6, 2025 · In this Research News article we highlight current activities towards the use of NIL in patterning active or functional materials, and the ...
[85]
Determination of stress build-up during nanoimprint process in ...
Nanoimprint process in polymers may cause internal stress accumulation in the imprinted structures that can affect their quality, leading to defects or even ...
[86]
Study of the demolding process—implications for thermal stress ...
Nov 24, 2006 · This paper gives our studies of the demolding process using LIGA mold inserts. The demolding forces mainly consist of thermal shrinkage stress ...<|separator|>
[87]
Additive manufacturing of high performance metalenses ...
Jun 18, 2024 · We fabricate all-inorganic, high refractive index optics, including metalenses, waveguides, and diffractive optical elements via nanoimprint ...
[88]
High Aspect Pattern Fabrication by Nano Imprint Lithography Using ...
Based on the advanced process, we first demonstrate the fabrication of high aspect ratio patterns over 20 with 80 nm line width, however, the polymer might be ...
[89]
High-aspect-ratio nanoimprint process chains - Nature
Jul 17, 2017 · These structures exhibit aspect ratios (ARs) of over 10 and almost vertical sidewalls, making them much more challenging to develop than the ...
[90]
Nanoimprint Lithography - Next Generation Nanopatterning ...
In this chapter, we briefly review the state-of-the-art lithography methods and introduce nanoimprint lithography (NIL), a very cost effective lithography ...Missing: Schift | Show results with:Schift<|control11|><|separator|>
[91]
Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching
### Summary of Bosch Etching Post-NIL for High Aspect Ratio
[92]
Nanowire Arrays Defined by Nanoimprint Lithography | Request PDF
Aug 9, 2025 · ... High-aspect ratio nanostructures pose an additional challenge, which originates from the divergence of the material transport preventing ...
[93]
High-aspect ratio grating fabrication by imprint lithography
A fine grating with high aspect rate pattern is one of the essential elements for advanced nano optical devices such as a quarter wave plate.Missing: vertical | Show results with:vertical
[94]
https://www.nature.com/articles/micronano201717
[95]
Realization of high aspect ratio metalenses by facile nanoimprint ...
Jun 15, 2023 · We propose a novel wet etching NIL method with no detachment process to fabricate flawless HAR metalenses.
[96]
Increasing the Stability of Isolated and Dense High-Aspect-Ratio ...
May 5, 2023 · We present UV-NIL replication of pillars with aspect ratios reaching up to 15 with tip diameters down to 35 nm for the first time.
[97]
Local mass transport and its effect on global pattern replication ...
Long-range uniformity is shown to be a result of local polymer flow in ... Nanoimprint lithography is a mechanically based process for definition of ...
[98]
[PDF] The Effects of Thin Films and Confinement on Thermal Nanoimprint ...
One of the primary differences from conventional lithography is that NIL utilizes a mechanical squeeze-flow mechanism to force the resist material to fill the ...
[99]
[PDF] Nanoimprint Lithography and the Role of Viscoelasticity in the ...
For our line-space grating patterns, SXR measurements provide the pattern height, residual layer thickness. (the remaining PS layer between the pattern and ...
[100]
Electrochemical nanoimprinting of silicon - PNAS
May 8, 2019 · Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite efforts to extend ...
[101]
CMOS-compatible electrochemical nanoimprint: High throughput ...
Sep 10, 2023 · CMOS-compatible electrochemical nanoimprint lithography was developed by replacing the platinum (Pt) metallized imprint mold by a glassy carbon ...
[102]
Ultrafast patterning of nanostructures in polymers using laser ...
Nov 24, 2003 · We propose and demonstrate a nanopatterning technique, laser-assisted nanoimprint lithography (LAN), in which the polymer is melted by a ...
[103]
Ultrafast-laser-induced parallel phase-change nanolithography
Jul 25, 2006 · A phase-change nanolithography technique is developed to fabricate up to millions of two-/three-dimensional nanostructures over a large area at a high speed.
[104]
Roller nanoimprint lithography. J Vac Sci Technol B - ResearchGate
Aug 6, 2025 · The nanoimprint technique has the advantages of high throughput, sub-10-nm resolution and low cost. However, the nonuniform surface obtained in ...<|control11|><|separator|>
[105]
Canon delivers first nanoimprint lithography tool to US institute ...
Sep 27, 2024 · The Japanese company delivered its FPA -1200NZ2C nanoimprint lithography system to the Texas Institute for Electronics (TIE) for study.
[106]
SK Hynix denies using NIL equipment for 3D NAND production in ...
May 16, 2023 · According to South Korea media , citing Korean industry sources, SK Hynix is testing nano imprint lithography (NIL) equipment and conducting ...<|separator|>
[107]
Nanoimprint lithography coming into its own - SPIE
Feb 29, 2024 · This form of lithography is of interest because it offers the ability to produce nanometer sized features at high throughput and low cost.Missing: pilots logic 2023-2025<|separator|>
[108]
[PDF] 30 years of nanoimprint: development, momentum and prospects
Abstract: 2025 marks the 30th anniversary of nanoimprint lithography (NIL). Since its inception in 1995, and through global efforts over the past three ...Missing: milestones | Show results with:milestones
[109]
Nanoimprint Lithography System Future-proof Strategies: Trends ...
Rating 4.8 (1,980) Jun 24, 2025 · The Nanoimprint Lithography (NIL) system market is experiencing robust growth, projected to reach a market size of $193 million in 2025, ...Missing: memory logic
[110]
Nanoimprint lithography guiding templates for advanced magnetic ...
Jan 16, 2024 · In this article, we present fabrication routes and overcome challenges to the fabrication of quartz templates suitable for self-alignment and guiding purposes.Missing: 2010s | Show results with:2010s
[111]
Nanoimprint Lithography for Semiconductor Devices and Future ...
For overall template fabrication technology point of view, the defectivity improvement is important and this topic is discussed in the next paragraph in detail.Missing: standardization | Show results with:standardization
[112]
Developing a predictive model for nanoimprint lithography using ...
Dec 15, 2018 · In this research, an artificial neural network (ANN) algorithm was developed to predict the imprint quality based on a set of input factors collected from ...
[113]
Unleashing the potential of nanoimprint lithography
Unleashing the potential of nanoimprint lithography. Monday 11th August 2025. News. Now a mature technology, nanoimprint lithography is ready to support the ...
[114]
Quantum point contacts fabricated by nanoimprint lithography
The potential of integrating nanoimprint lithography into electronic device fabrication is demonstrated by means of a quantum point contact (QPC).
[115]
Nanoimprint Lithography Systems Market Size Report, 2030
The global nanoimprint lithography system size was estimated at USD 130.6 million in 2024 and is expected to reach USD 142.2 million in 2025. What is the ...
[116]
Sustainable Manufacturing with Rolling Nanoimprint Lithography ...
Nov 26, 2024 · Durable and reusable templates. Stensborg's templates are engineered for long-term use, withstanding extensive production cycles without ...Missing: lifetime | Show results with:lifetime